| Preface |
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| Editor-in-Chief |
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| Contributors |
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| I Background and Fundamentals |
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1 | (1) |
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Scaling of Micromechanical Devices |
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1 | (1) |
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Mechanical Properties of MEMS Materials |
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1 | (1) |
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1 | (1) |
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Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains |
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1 | (1) |
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Liquid Flows in Microchannels |
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1 | (1) |
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Burnett Simulations of Flows in Microdevices |
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1 | (1) |
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Molecular-Based Microfluidic Simulation Models |
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1 | (1) |
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1 | (1) |
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Physics of Thin Liquid Films |
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1 | (1) |
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Bubble/Drop Transport in Microchannels |
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1 | (1) |
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Fundamentals of Control Theory |
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1 | (1) |
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Model-Based Flow Control for Distributed Architectures |
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1 | (1) |
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Soft Computing in Control |
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1 | (1) |
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| II Design and Fabrication |
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Materials for Microelectromechanical Systems |
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1 | (1) |
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1 | (1) |
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LIGA and Other Replication Techniques |
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1 | (1) |
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1 | (1) |
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Electrochemical Fabrication (EFAB™) |
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1 | (1) |
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Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS |
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1 | (1) |
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Deep Rreactive Ion Etching for Bulk Micromachining of Silicon Carbide |
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1 | (1) |
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Microfabricated Chemical Sensors for Aerospace Applications |
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1 | (1) |
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Packaging of Harsh-Environment MEMS Devices |
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1 | (1) |
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| III Applications of MEMS |
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1 | (1) |
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Micromachined Pressure Sensors |
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1 | (1) |
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Sensors and Actuators for Turbulent Flows |
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1 | (1) |
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Surface-Micromachined Mechanisms |
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1 | (1) |
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1 | (1) |
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1 | (1) |
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1 | (1) |
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Micro Heat Pipes and Micro Heat Spreaders |
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1 | (1) |
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1 | (1) |
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1 | (1) |
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| IV The Future |
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Reactive Control for Skin-Friction Reduction |
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1 | (1) |
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Towards MEMS Autonomous Control of Free-Shear Flows |
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1 | (1) |
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Fabrication Technologies for Nanoelectromechanical Systems |
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1 | (1) |
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| Index |
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