Chemistry in Microelectronics

by Le Tiec, Yannick

• ISBN13: 9781848214361
• ISBN10: 1848214367
• Edition: 1st
• Format: Hardcover
• Copyright: 2013-02-25
• Publisher: Wiley-ISTE

Summary

This book is about the "Chemistry" involved in the semiconductor industry, chip manufacturing, from Fundamentals to Applications: 5 chapters for this first volume. Other volumes could happen by developing new sectors where chemistry is also involved in this microelectronics world.

Author Biography

Yannick Le Tiec is a Technical expert at CEA-Leti assignee at IBM, Albany (NY), USA.

Table of Contents

Preface ix

Chapter 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts 1
François MARTIN, Jean-Michel HARTMANN, Véronique CARRON and Yannick LE TIEC

1.1. Introduction 1

1.2. Arrangement of the gate 3

1.3. Chemistry of crystalline materials 19

1.4. Contact areas between the gate and the "source" and "drain" 38

1.5. General conclusion 57

1.6. List of Abbreviations 58

1.7. Bibliography 59

Chapter 2. Chemistry in Interconnects 81
Vincent JOUSSEAUME, Paul-Henri HAUMESSER, Carole PERNEL, Jeffery BUTTERBAUGH, Sylvain MAÎTREJEAN and Didier LOUIS

2.1. Introduction 81

2.2. Interconnects: generalities and background 83

2.3. Dielectric deposits 99

2.4. Deposition and properties of metal layers for interconnect structures 122

2.5. Cleaning process for copper interconnects 144

2.6. General conclusions and perspectives 161

2.7. List of Abbreviations 164

2.8. Bibliography 165

Chapter 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying 187
Yannick LE TIEC and Martin KNOTTER

3.1. Introduction 187

3.2. Cleaning 188

3.3. Wet etching 202

3.4. Rinsing and drying 214

3.5. Conclusion 224

3.6. List of Abbreviations 225

3.7. Bibliography 225

Chapter 4. The Use and Management of Chemical Fluids in Microelectronics 233
Christiane GOTTSCHALK, Kevin MCLAUGHLIN, Julie CREN, Catherine PEYNE and Patrick VALENTI

4.1. Ultrapure water 233

4.2. Gases for semiconductors 251

4.3. Dissolved gases 268

4.4. High-purity chemicals 283

4.5. Waste management 290

4.6. List of Abbreviations 301

4.7. Bibliography 303

Chapter 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors 309
Antoine HOANG, Gilles MARCHAND, Guillaume NONGLATON, Isabelle TEXIER-NOGUES and Francoise VINET

5.1. Introduction 309

5.2. Materials 310

5.3. Functionalization process 317

5.4. Molecule and macromolecule immobilization 332

5.5. Analytes capture 340

5.6. Conclusion 348

5.7. List of Abbreviations 349

5.8. Bibliography 349

List of Authors 361

Index 363