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Table of Contents
|Capacitive lumped parameter electromechanics|
|Small-signal capacitive electromechanical systems|
|Electromechanics of piezoelectric elements|
|Capacitive sensing and resonant drive circuits|
|Distributed 1D and 2D electromechanical structures|
|Practical MEMS: pressure transducers, accelerometers and gyroscopes|
|Electromechanics of magnetic MEMS devices|
|Review of quasistatic electromagnetics|
|Review of mechanical resonators|
|Brief survey of MEMS fabrication|
|A brief review of solid mechanics|
|Tables of M- and N-form transducer matrics|
|Finite element analysis as applied to MEMS|
|Table of Contents provided by Publisher. All Rights Reserved.|