9780521764834

Electromechanics and Mems

by
  • ISBN13:

    9780521764834

  • ISBN10:

    0521764831

  • Edition: 1st
  • Format: Hardcover
  • Copyright: 6/28/2013
  • Publisher: Cambridge University Press
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Supplemental Materials

What is included with this book?

  • The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any access cards, study guides, lab manuals, CDs, etc.
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Summary

Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.

Table of Contents

Introduction
Circuit-based modeling
Capacitive lumped parameter electromechanics
Small-signal capacitive electromechanical systems
Electromechanics of piezoelectric elements
Capacitive sensing and resonant drive circuits
Distributed 1D and 2D electromechanical structures
Practical MEMS: pressure transducers, accelerometers and gyroscopes
Electromechanics of magnetic MEMS devices
Review of quasistatic electromagnetics
Review of mechanical resonators
Brief survey of MEMS fabrication
A brief review of solid mechanics
Tables of M- and N-form transducer matrics
Finite element analysis as applied to MEMS
Table of Contents provided by Publisher. All Rights Reserved.

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