The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any access cards, study guides, lab manuals, CDs, etc.
The Used, Rental and eBook copies of this book are not guaranteed to include any supplemental materials. Typically, only the book itself is included. This is true even if the title states it includes any access cards, study guides, lab manuals, CDs, etc.
Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.