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Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set,9780849331800
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Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

by ;
Edition:
3rd
ISBN13:

9780849331800

ISBN10:
0849331803
Format:
Hardcover
Pub. Date:
8/1/2011
Publisher(s):
CRC Press

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What version or edition is this?
This is the 3rd edition with a publication date of 8/1/2011.
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Summary

Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.


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