Integrated Silicon Optoelectronics

by Zimmermann, Horst

• ISBN13: 9783642015205
• ISBN10: 3642015204
• Edition: 2nd
• Format: Hardcover
• Copyright: 2009-10-01
• Publisher: Springer Verlag

Summary

Integrated Silicon Optoelectronics synthesizes topics from optoelectronics and microelectronics. The book concentrates on silicon as the major base of modern semiconductor devices and circuits. Starting from the basics of optical emission and absorption, as well as from the device physics of photodetectors, the aspects of the integration of photodetectors in modern bipolar, CMOS, and BiCMOS technologies are discussed. Detailed descriptions of fabrication technologies and applications of optoelectronic integrated circuits are included. The book, furthermore, contains a review of the newest state of research on eagerly anticipated silicon light emitters. In order to cover the topics comprehensively, also inluded are integrated waveguides, gratings, and optoelectronic power devices. Numerous elaborate illustrations facilitate and enhance comprehension. This extended edition will be of value to engineers, physicists, and scientists in industry and at universities. The book is also recommended to graduate students specializing on microelectronics or optoelectronics.

Table of Contents

List of Symbols	p. xv
Basics of Optical Emission and Absorption	p. 1
Properties of Light	p. 1
Energy Bands of Semiconductor Materials	p. 3
Optical Absorption of Semiconductor Materials	p. 4
Photogeneration	p. 6
External Quantum Efficiency and Responsivity	p. 7
Theory	p. 11
Semiconductor Equations	p. 11
Important Models for Photodetectors	p. 15
Carrier Drift	p. 15
Carrier Diffusion	p. 19
Internal Quantum Efficiency	p. 23
Equivalent Circuit of a Photodiode	p. 24
Silicon Technologies and Integrated Photodetectors	p. 29
Bipolar Processes	p. 29
Integrated Detectors in Standard Bipolar Technology	p. 32
Photodiodes	p. 32
Phototransistors	p. 34
Integrated Detectors in Modified Bipolar Technology	p. 35
UV Sensor	p. 35
PIN Photodiode Integration	p. 36
Color Sensor	p. 39
CMOS Processes	p. 40
One-Well Processes	p. 40
Twin-Well Processes	p. 41
CMOS-Integrated Detectors	p. 42
Integrated Detectors in Standard CMOS Processes	p. 42
Spatially-Modulated-Light Detector	p. 49
PIN Photodiode Integration	p. 51
Finger Photodiodes	p. 75
Avalanche Photodiodes	p. 84
Bipolar Phototransistors	p. 90
Field-Effect Phototransistors	p. 94
Photonic Mixer Device	p. 98
Particle Detector	p. 99
Charge-Coupled-Device Image Sensors	p. 100
Active-Pixel Sensors	p. 104
Schottky Photodiodes	p. 114
MSM-Photodetectors	p. 122
Polycrystalline Photodiode	p. 127
Amorphous-Silicon Detectors	p. 128
BiCMOS Processes	p. 134
BiCMOS-Integrated Detectors	p. 140
Optoelectronic Devices in Thin Crystalline Silicon Films	p. 155
Photodiodes in SOI	p. 156
Phototransistors in SOI	p. 164
Optical Modulators in SOI	p. 166
Silicon on Sapphire	p. 169
Polyimide Bonding	p. 171
Silicon Power Devices	p. 173
Light-Activated Thyristors	p. 173
Light-Activated Triac	p. 176
SiGe Photodetectors	p. 179
Heteroepitaxial Growth	p. 179
Absorption Coefficient of SiGe Alloys	p. 180
Ge-on-Si Photodetector	p. 181
SiGeC	p. 193
SiGe Waveguide Photodetector	p. 195
Long-Wavelength Infrared SiGe Photo conductor	p. 197
SiGe/Si PIN Hetero-Bipolar-Transistor Integration	p. 201
SiGe Phototransistors	p. 203
Detectors Based on Resonant Cavity	p. 205
Principle of Resonant Cavity Enhanced Detectors	p. 205
Example of a Resonant Cavity Enhanced Silicon Detector	p. 208
III-V Semiconductor Materials on Silicon	p. 213
Heteroepitaxial Growth	p. 213
Flip-chip Hybridization Technique	p. 219
Bonding	p. 225
Directly Bonded Photodetectors	p. 227
Directly Bonded Light Emitters	p. 232
Indirect Bonding	p. 236
Silicon Light Emitters	p. 237
PN Junctions	p. 237
Quantum-Size Silicon	p. 239
SiGe and SiGeC	p. 246
Rare-Earth Doped Devices	p. 247
Semiconducting Silicides	p. 251
Organic Polymers on Silicon	p. 252
Liquid Crystals	p. 254
Integrated Optics	p. 257
Waveguides	p. 257
Total Reflection	p. 257
Losses	p. 258
Waveguides for Visible and Infrared Light	p. 259
Waveguides for Infrared Light	p. 264
Waveguide Grating Couplers	p. 267
Photonic Bandgap Filter and Waveguide	p. 268
Optical Amplifier	p. 272
Examples of Integrated Optical Systems	p. 274
Optical Interconnects	p. 274
Optical Transceiver	p. 280
Micro-Spectrometer	p. 281
Optical Pressure Sensor	p. 282
Optical Distance Sensor	p. 283
Optical Pickup Devices	p. 284
Microsystem for Fluorescence Analysis	p. 286
Optical Switches	p. 287
Design of Integrated Circuits	p. 289
Circuit Simulators and Transistor Models	p. 289
Layout and Verification Tools	p. 294
Design of OEICs	p. 295
Transimpedance Amplifier	p. 298
Examples of Optoelectronic Integrated Circuits	p. 307
Digital CMOS Circuits	p. 307
Synchronous Circuits	p. 307
Asynchronous Circuits	p. 311
Digital BiCMOS Circuits	p. 313
Laser Driver Circuits	p. 314
Analog Circuits	p. 317
Bipolar Circuits	p. 317
CMOS Imagers	p. 320
CMOS Circuits for Optical Storage Systems	p. 324
BiCMOS Circuits for Optical Storage Systems	p. 330
Fiber Receivers	p. 338
Summary	p. 352
References	p. 355
Index	p. 379
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