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9780470091326

An Introduction to Sims for Surface and Thin Film Analysis

by ;
  • ISBN13:

    9780470091326

  • ISBN10:

    0470091320

  • Format: Hardcover
  • Copyright: 2011-03-01
  • Publisher: Wiley
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List Price: $140.00
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Summary

An Introduction to SIMS for Surface and Thin Film Analysis provides a basic introduction to SIMS, covering both the science behind the subject, and the instrumentation and techniques available. Following a scene-setting introduction, the book explores sputtering and ion formation; instrumentation, analytical applications, techniques, and data processing; and a summation of the pros and cons of SIMS in relation to other analytical methods. A perfect companion to Surface Analysis by XPS and AES, the two together provide complete coverage of surface and thin film analysis by SSIMS, DSIMS, XPS, and AES.

Supplemental Materials

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