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9780080436111

Materials Aspects in Microsystem Technologies

by ; ; ; ;
  • ISBN13:

    9780080436111

  • ISBN10:

    0080436110

  • Format: Hardcover
  • Copyright: 1999-10-20
  • Publisher: Elsevier Science
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Supplemental Materials

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Table of Contents

Materials Deposition and Microstructuring
Roughning and smoothing dynamics during KOH silicon etching
Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems
Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition
Obtention and characterization of bioengineered layers onto silica-based microstructures
Microstructure of Cu-C interface in Cu-based metal matrix composite
Porous Silicon in Microsystems
Porous silicon technique for realization of surface micromachined silicon structures with large gaps
Characterization
Characterization of the nonlinear optical properties of crystals by the SHEW technique
Bonding and Packaging
Devices
Microstructures of the monomorph piezoelectric ceramic actuators with functional gradients
Electrostatically actuated micromirror devices in silicon technology
A thermoelectric converter for energy supply
Author index
Subject index
Table of Contents provided by Publisher. All Rights Reserved.

Supplemental Materials

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