Materials Deposition and Microstructuring | |
Roughning and smoothing dynamics during KOH silicon etching | |
Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems | |
Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition | |
Obtention and characterization of bioengineered layers onto silica-based microstructures | |
Microstructure of Cu-C interface in Cu-based metal matrix composite | |
Porous Silicon in Microsystems | |
Porous silicon technique for realization of surface micromachined silicon structures with large gaps | |
Characterization | |
Characterization of the nonlinear optical properties of crystals by the SHEW technique | |
Bonding and Packaging | |
Devices | |
Microstructures of the monomorph piezoelectric ceramic actuators with functional gradients | |
Electrostatically actuated micromirror devices in silicon technology | |
A thermoelectric converter for energy supply | |
Author index | |
Subject index | |
Table of Contents provided by Publisher. All Rights Reserved. |