MEMS and Microsystems Design, Manufacture, and Nanoscale Engineering

by Hsu, Tai-Ran

• ISBN13: 9780470083017
• ISBN10: 0470083018
• Edition: 2nd
• Format: Hardcover
• Copyright: 2008-03-17
• Publisher: Wiley

Summary

Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: 'ˆ— Expanded coverage of microfabrication plus assembly and packaging technologies 'ˆ— The introduction of microgyroscopes, miniature microphones, and heat pipes 'ˆ— Design methodologies for thermally actuated multilayered device components 'ˆ— The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.

Author Biography

Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.

Table of Contents

Preface

Overview of MEMS and Microsystems

MEMS and Microsystem

Typical MEMS and Microsystems Products

Evolution of Microfabrication

Microsystems and Microelectronics

The Multidisciplinary Nature of Microsystems Design and Manufacture

Microsystems and Miniaturization

Application of Microsystems in Automotive Industry

Application of Microsystems in Other Industries

Markets for Microsystems

Problems

Working Principles of Microsystems

Introduction

Microsensors

Microactuation

MEMS with Microactuators

Microaccelerometers

Microfluidics

Problems

Engineering Science for Microsystems Design and Fabrication

Introduction

Atomic Structure of Matters

Ions and Ionization

Molecular Theory of Matter and Inter-molecular Forces

Doping of Semiconductors

The Diffusion Process

Plasma Physics

Electrochemistry

Problems

Engineering Mechanics for Microsystems Design

Introduction

Static Bending of Thin Plates

Mechanical Vibration

Thermomechanics

Fracture Mechanics

Thin Film Mechanics

Overview on Finite Element Stress Analysis

Problems

Thermofluid Engineering and Microsystems Design

Introduction

Overview on the Basics of Fluid Mechanics in Macro and Mesoscales

Basic Equations in Continuum Fluid Dynamics

Laminar Fluid Flow in Circular Conduits

Computational Fluid Dynamics

Incompressible Fluid Flow in Microconduits

Overview on Heat Conduction in Solids

Heat Conduction in Multi-layered Thin Films

Heat Conduction in Solids in Submicrometer Scale

Problems

Scaling Laws in Miniaturization

Introduction to Scaling

Scaling in Geometry

Scaling in Rigid-Body Dynamics

Scaling in Electrostatic Forces

Scaling of Electromagnetic Forces

Scaling in Electricity

Scaling in Fluid Mechanics

Scaling in Heat Transfer

Problems

Materials for MEMS and Microsystems

Introduction

Substrates and Wafers

Active Substrate Materials

Silicon as a Substrate Material

Silicon Compounds

Silicon Piezoresistors

Gallium Arsenide

Quartz

Piezoelectric Crystals

Polymers

Packaging Materials

Problems

Microsystems Fabrication Processes

Introduction

Photolithography

Ion Implantation

Diffusion

Oxidation

Chemical Vapor Deposition

Physical Vapor Deposition - Sputtering

Deposition by Epitaxy

Etching

Summary of Microfabrication

Problems

Overview of Micromanufacturing

Introduction

Bulk Micromanufacturing

Surface Micromachining

The LIGA Process

Summary on Micromanufacturing

Problems

Microsystem Design

Introduction

Design Considerations

Process Design

Mechanical Design

Mechanical Design Using Finite Element Method

Design of Silicon Die of a Micropressure Sensor

Design of Microfluidics Network Systems

Computer-Aided Design

Problems

Assembly, Packaging and Testing of Microsystems

Introduction

Overview of Microassembly

The High Costs of Microassembly

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