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As the first edited volume on the topic, this book focuses on providing a unified overview of the rapidly emerging field of micro/nano system modeling and control. It gives managers, researchers, and graduate students easy access to the expert contributors' cutting-edge knowledge and skills in this crucial field. To this point, very little has been published on this subject, so the editors present an especially wide-ranging overview, covering topics as diverse as micro/nano devices, systems biology, and sensors.