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Over the past few decades, the rapid development of ultrafast lasers, such as femtosecond lasers and picosecond lasers, has opened up new avenues for material processing due to their unique features such as ultrashort pulse width and extremely high peak intensity. These techniques have become a common tool for micro- and nanoprocessing of a variety of materials and are now widely used for both fundamental researches and practical applications. This book is composed of 12 chapters covering relevant topics of ultrafast laser processing, including laser itself and novel beam manipulation methods for processing, fundamentals of ultrafast laser processing, nanomaterial synthesis, surface micro- and nanostructuring, micromachining, two-photon photopolymerization, internal modification/fabrication of transparent materials, applications to photonic devices and microchips for biological analysis, industrial applications, and so on. Each chapter is written by world-leading scientists in the related field so as to give comprehensive reviews in the field of ultrafast laser micro- and nanoprocessing.