did-you-know? rent-now

Amazon no longer offers textbook rentals. We do!

did-you-know? rent-now

Amazon no longer offers textbook rentals. We do!

We're the #1 textbook rental company. Let us show you why.

9780815515937

Sputtering Materials for VLSI and Thin Film Devices

by
  • ISBN13:

    9780815515937

  • ISBN10:

    0815515936

  • Format: Hardcover
  • Copyright: 2013-10-25
  • Publisher: Elsevier Science Ltd

Note: Supplemental materials are not guaranteed with Rental or Used book purchases.

Purchase Benefits

  • Free Shipping Icon Free Shipping On Orders Over $35!
    Your order must be $35 or more to qualify for free economy shipping. Bulk sales, PO's, Marketplace items, eBooks and apparel do not qualify for this offer.
  • eCampus.com Logo Get Rewarded for Ordering Your Textbooks! Enroll Now
  • Write a Review Icon Write a Review
  • Complimentary 7-Day eTextbook Access - Read more
    When you rent or buy this book, you will receive complimentary 7-day online access to the eTextbook version from your PC, Mac, tablet, or smartphone. Feature not included on Marketplace Items.
List Price: $199.00 Save up to $59.70
  • Rent Book $139.30
    Add to Cart Free Shipping Icon Free Shipping

    TERM
    PRICE
    DUE

    7-Day eTextbook Access 7-Day eTextbook Access

    USUALLY SHIPS IN 3-5 BUSINESS DAYS
    *This item is part of an exclusive publisher rental program and requires an additional convenience fee. This fee will be reflected in the shopping cart.

Supplemental Materials

What is included with this book?

Summary

An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications.Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed.The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting.* Provides practical case studies and troubleshooting examples* Unique coverage of the design of sputtering targets and processing of sputtering materials for thin film applications* Essential design information for engineers working in the field of flat panel displays

Table of Contents

Sputtering materials for microelectronic industry
Sputter deposition of thin films
Performance of sputtering targets and productivity
Sputtering target manufacturing
Sputtering targets for integrated circuits
Sputtering targets for displays and photovoltaic devices
Ferromagnetic sputtering targets for silicide and data storage applications
Troubleshooting
Diffusion and phase transformation
Crystallographic texture
Phase change materials
Mechanical property evaluation
Units and conversion factors
Periodic table
Table of Contents provided by Publisher. All Rights Reserved.

Supplemental Materials

What is included with this book?

The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any access cards, study guides, lab manuals, CDs, etc.

The Used, Rental and eBook copies of this book are not guaranteed to include any supplemental materials. Typically, only the book itself is included. This is true even if the title states it includes any access cards, study guides, lab manuals, CDs, etc.

Rewards Program