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9780854046515

Vacuum Technology

by ;
  • ISBN13:

    9780854046515

  • ISBN10:

    0854046518

  • Format: Paperback
  • Copyright: 2003-05-01
  • Publisher: Royal Society of Chemistry

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Supplemental Materials

What is included with this book?

Summary

An accessible and applicable guide to quantitative problem solving in vacuum technology, this book is aimed at newcomers, students and the experienced practitioner. It contains essential information and worked examples for those using vacuum technology in chemical applications and who are involved in the design and operation of vacuum equipment. Using step-by-step solutions of example calculations and formulae, "Vacuum Technology: Calculations in Chemistry" sets out to encourage readers to quantify their own systems so that they can ensure efficient operation and fault finding. Whilst emphasizing the use of appropriate units in calculations and using well-known expressions in vacuum technology throughout, the book includes: --formulae necessary for quantitative vacuum technology --commonly required data for common gases in tabulated form --schematic diagrams of systems and layouts This book is certain to be a confidence-inspiring publication for use in both research and industry.

Author Biography

Dr David Hucknall joined Leybold Vacuum UK Ltd in 1986 and has unrivalled expertise in vacuum technology. Since 1991 he has represented the UK on the European Working Group responsible for drafting standards on leak detection Dr Alan Morris, currently at the University of Southampton, has over 25 years experience in the field of gas phase UV photoelectron spectroscopy. He has contributed to the design and development of spectrometers for the study of unstable species using a wide range of radiation sources

Table of Contents

Principles
1(30)
Introduction
1(1)
Survey
1(1)
Pressure
1(2)
Ideal Gas Law
3(2)
Mixtures of Gases: Partial Pressures
5(3)
Kinetic Theory of Gases
8(9)
Transport Properties
17(7)
Diffusion
17(3)
Viscosity (Internal Friction in Gases)
20(4)
Gas Dynamics
24(7)
Gas Flow
31(25)
Introduction
31(1)
Definitions
31(7)
Viscous (Continuum) Flow
38(5)
Viscous Flow in Ducts and Tubes
38(5)
Molecular Flow
43(8)
Conductance of an Aperture
43(1)
Conductance of Tubes and Ducts
43(6)
Molecular Flow through Components
49(2)
Knudsen (Intermediate) Flow Through a Tube
51(5)
Pumps and Pumping Systems
56(58)
Introduction
56(1)
Vacuum Pumps (Rough--Medium Vacuum Range)
57(19)
Oil-sealed Rotary Pumps
57(8)
Dry Pumps
65(2)
Roots Pumps
67(9)
High/Ultra-high Vacuum Pumps
76(27)
Diffusion Pumps
78(7)
Turbomolecular Pumps
85(7)
Cryopumps
92(11)
Other High/Ultra-high Vacuum Pumps
103(11)
Sputter-ion Pumps
103(5)
Getter Pumps
108(6)
Gas Sources and Attainable Pressure in Vacuum Systems
114(34)
Introduction
114(1)
Leaks
115(14)
Outgassing
129(5)
Permeation
134(6)
Attainable Pressure
140(8)
Total and Partial Vacuum Pressure Measurement
148(28)
Introduction
148(1)
Total Pressure Measurement
148(20)
Direct Pressure Measurement
149(3)
Indirect Pressure Measurement
152(16)
Residual Gas Analysis and Partial Pressure Measurement
168(8)
Some Applications of Vacuum Technology
176(43)
Introduction
176(1)
Chemical Technology
176(19)
Pressure, Temperature and Phase Changes
177(2)
Distillation
179(3)
Evaporation (Drying)
182(5)
Condensers
187(5)
Condenser and Vacuum Pump Combinations
192(3)
UHV Systems
195(12)
Factors Influencing Outgassing
196(11)
Systems Involving Differential Pumping
207(12)
Summary
219(5)
Bibliography 224(1)
Appendix: Symbols Used in Vacuum Technology according to BS 5543:1978/ISO 3753:1977 225(4)
Subject Index 229

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