Introduction To Surface-Micromachining

by Johnstone, Robert W.; PARAMESWARAN, M.

• ISBN13: 9781402080203
• ISBN10: 1402080204
• Format: Hardcover
• Copyright: 2004-05-30
• Publisher: Kluwer Academic Pub

Summary

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Table of Contents

Dedication	v
Preface	xi
Acknowledgments	xiii
1. INTRODUCTION	1	(8)
1.1 Why miniaturize?	2	(1)
1.2 Why surface-micromachining?	3	(1)
1.3 History	4	(1)
References	5	(4)
Part I Fabrication
2. MICROFABRICATION PROCESSES	9	(20)
2.1 Photolithography	9	(5)
2.2 Thermal Growth	14	(1)
2.3 Deposition	15	(3)
2.4 Etching	18	(3)
2.5 Doping	21	(1)
2.6 Chemical Mechanical Polishing (CMP)	22	(1)
2.7 Wafer Bonding	23	(1)
2.8 Release	24	(1)
2.9 Wire Bonding	25	(3)
References	28	(1)
3. MICROMACHINING TECHNOLOGIES	29	(16)
3.1 Bulk Micromachining	31	(3)
3.2 LIGA	34	(1)
3.3 Surface-Micromachining	35	(6)
References	41	(4)
Part II Design
4. MICROSCALE PHYSICS	45	(18)
4.1 Scaling Laws	45	(6)
4.2 Casimir Force	51	(1)
4.3 Surface Forces	52	(3)
4.4 Friction	55	(2)
4.5 Continuum Mechanics Approximation	57	(4)
References	61	(2)
5. MECHANICS	63	(12)
5.1 Beam Equations	63	(3)
5.2 Torsion	66	(2)
5.3 Cantilevers	68	(2)
5.4 Euler-columns	70	(1)
5.5 Pseudo-rigid body Modelling	71	(2)
References	73	(2)
6. DESIGN RULES	75	(6)
6.1 Minimum Geometry Rules	75	(1)
6.2 Maximum Geometry Rules	76	(1)
6.3 Minimum Enclosure Rules	77	(1)
6.4 Minimum Overlap Rules	78	(1)
6.5 Design Rule Checks (DRC)	78	(3)
7. NON-IDEAL PROCESSES	81	(12)
7.1 Topography	81	(4)
7.2 Dimensional Tolerances	85	(2)
7.3 Thin-film Stresses	87	(5)
References	92	(1)
8. DESIGN TECHNIQUES	93	(10)
8.1 Ground Planes	93	(1)
8.2 Double Thickness Parts	94	(1)
8.3 Conducting Paths	95	(1)
8.4 Tethers	96	(1)
8.5 Dimples	97	(1)
8.6 Process Variations	98	(1)
References	99	(4)
Part III Devices
9. ELECTRICAL COMPONENTS	103	(12)
9.1 Bonding Pads	103	(3)
9.2 Resistors	106	(2)
9.3 Capacitors	108	(2)
9.4 Inductors	110	(2)
References	112	(3)
10. MECHANICAL COMPONENTS	115	(20)
10.1 Compliant Devices	115	(1)
10.2 Springs	116	(3)
10.3 Suspensions	119	(5)
10.4 Flexure Joints	124	(2)
10.5 Levers	126	(7)
References	133	(2)
11. ELECTROSTATIC ACTUATORS	135	(18)
11.1 Parallel-Plate Actuators	136	(5)
11.2 Interdigitated Comb Actuators	141	(4)
11.3 Curved Electrode Actuators	145	(2)
11.4 Scratch-drive Actuators	147	(3)
References	150	(3)
12. ELECTRO-THERMAL-COMPLIANT ACTUATORS	153	(12)
12.1 Thermal Bimorph Actuators	154	(1)
12.2 Guckel Actuators	154	(5)
12.3 Bent-beam Actuators	159	(3)
12.4 Topological Optimization	162	(2)
References	164	(1)
13. RAISED STRUCTURES	165	(12)
13.1 Hinges	165	(3)
13.2 Assembly	168	(4)
References	172	(5)
Part IV Processes
14. POLYMUMPSTM PROCESS	177	(4)
14.1 Design Rules	178	(1)
14.2 Photo Gallery	178	(1)
References	179	(2)
15. SUMMITTM PROCESS	181	(2)
15.1 Design Rules	182	(1)
15.2 Photo Gallery	182	(1)
16. MUSIC® PROCESS	183	(6)
16.1 Design Rules	184	(1)
16.2 Photo Gallery	184	(1)
References	184	(5)
Index	189