9781420055191

Manufacturing Techniques for Microfabrication and Nanotechnology

by ;
  • ISBN13:

    9781420055191

  • ISBN10:

    1420055194

  • Edition: 1st
  • Format: Hardcover
  • Copyright: 2011-06-13
  • Publisher: CRC Press

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Supplemental Materials

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  • The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any access cards, study guides, lab manuals, CDs, etc.
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Summary

Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnologyfocuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

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