Microfluidic Technology and Applications

by Koch, Michael; Evans, Alan; Brunnschweiler, Arthur

• ISBN13: 9780863802447
• ISBN10: 0863802443
• Edition: 1st
• Format: Hardcover
• Copyright: 2007-06-05
• Publisher: Wiley-Interscience

Summary

Discusses different modelling techniques in microfluidics (FEM and CFD). Every reader will have an easy start to model any kind of microfluidic device. Presents the necessary fabrication technologies and examples of the latest microfluidic devices and systems. Microfluidics is a very new research area in microelectro-mechanical systems (MEMS). This book introduces the theory and practice of microfluidic technology. The content is designed to be of value to engineers with different backgrounds working in the area of microsystem technology. The book includes the necessary fabrication technologies and examples of the latest microfluidic devices and systems that have been realised by a worldwide community of researchers. It covers all aspects of microfluidic theory and describes the breath-taking developments in this field.

Author Biography

Michael Koch and Alan Evans are the authors of Microfluidic Technology and Applications, published by Wiley.

Table of Contents

List of Figures	xii
List of Tables	xxi
Introduction	1	(2)
Theory of Microfluidic Flow	3	(19)
Fluid Mechanics	3	(17)
One-dimensional Nonviscous Flow	4	(1)
Two-dimensional Laminar Viscous Flow	5	(2)
Dimensional Analysis	7	(1)
Similitude	8	(1)
Turbulent Flow	9	(2)
Flow in a Diffuser and Nozzle	11	(6)
Three-dimensional Fluid Flow	17	(3)
Microfluidics: Differences between Microscopic and Macroscopic Flow	20	(2)
Laminar and Turbulent Flow Regimes	20	(1)
Practical Problems in Liquid Flow at Small Dimensions	21	(1)
Mechanical Aspects of Microfluidic Devices	22	(35)
Mechanics of Materials	22	(15)
Elementary Theory of Elasticity	22	(3)
Bending of Beams and Bridges	25	(1)
Basic Mechanics	26	(3)
Equations for Cantilevers and Clamped Beams	29	(3)
Natural Frequencies	32	(1)
Mechanics of Plates	33	(1)
Fundamental Differential Equation	33	(1)
Rectangular Plates	34	(2)
Circular Plates	36	(1)
Natural Frequencies	36	(1)
Actuation Techniques for Microfluidic Devices	37	(20)
The Piezoelectric Effect	37	(1)
Theory of Piezoelectricity	37	(4)
Applications in Micromechanics	41	(6)
Bimetallic Actuation Technique	47	(2)
Shape-memory Effect in Micromechanical Applications	49	(1)
Electrostatic Actuation Technique	50	(1)
Thermopneumatic Actuators	51	(2)
Magnetic Microactuators	53	(1)
Evaluation of the Actuation Techniques for Microfluidics	54	(3)
Modelling Techniques	57	(49)
The Finite Element Method: an Introduction	57	(3)
Numerical Integration of Differential Equations	57	(3)
One-dimensional Mechanical Finite Element Method	60	(1)
Computational Fluid Mechanics	61	(3)
Finite Difference Method	62	(1)
Finite Element Method (FEM)	63	(1)
Use of FEM Programs	64	(7)
Examples for mechanical FEM	66	(2)
Examples for Computational Fluid Dynamics (CFD)	68	(3)
Coupled FEM and CFD Simulators in Microfluidics	71	(7)
Description of the Simulation Method	73	(3)
Simulation Results and Comparison with Measurements	76	(2)
Analytical Approximations	78	(28)
Micromachined Cantilever Valves	79	(1)
Simple Analytical Approach for the Volume Flow	79	(1)
Coupled Analytical Approximation	80	(3)
Membrane-Actuated Pumps	83	(1)
Continuity Equation and Quasi-Static Model	83	(5)
Pump Model with Dynamic Valve Approximation	88	(6)
Pump Model with Behavioural Model of the Valve	94	(4)
Comparison of the different Dynamic Solvers	98	(1)
Thermal Flowsensors	99	(7)
Fabrication Technology	106	(45)
Introduction	106	(1)
Processing Techniques in Microelectronics	107	(18)
Introduction	108	(1)
Crystal Growth	108	(3)
Lithography	111	(2)
Oxidation of Silicon	113	(2)
Physical and Chemical Vapour Deposition	115	(1)
Chemical Vapour Deposition	115	(4)
Physical Vapour Deposition	119	(2)
Diffusion and Implantation of Dopants	121	(2)
Dry and Wet Etching Techniques	123	(2)
Micromechanical Fabrication Methods	125	(14)
Wet Isotropic and Anisotropic Etching of Silicon	125	(5)
Bonding Techniques for Silicon and Pyrex	130	(2)
Surface Micromachining	132	(2)
Deep Dry Etching	134	(1)
Ion Beam Milling	135	(2)
Sol-Gel Deposition	137	(2)
Special Microfluidic Processes	139	(12)
Thick-Film-On-Silicon Technique	139	(1)
Introduction to Thick-Film Technology	139	(2)
Process Sequence for a Piezoelectric Actuator	141	(2)
Diffusion of Lead into Silicon	143	(2)
Characterisation of the Inks	145	(1)
Isotropic Etching of Pyrex	146	(2)
LIGA Technique	148	(3)
Microfluidic Devices I: Flow Control	151	(66)
Introduction	151	(1)
Inkjet Nozzles and Flow Amplification	151	(8)
Nozzles for Inkjet and Fuel Injection	152	(2)
Microfluidic Amplifiers	154	(3)
Micromachined Turbines	157	(2)
Active and Passive Valves	159	(18)
Passive One-Way Valves in Bulk and Surface Micromachining	159	(1)
Cantilever Valves	159	(5)
Diaphragm Valves	164	(6)
Bivalvular Valves	170	(1)
Diffuser/Nozzle Valve	171	(2)
Actuation Techniques for Valves	173	(4)
Micromachined Pumps	177	(31)
Membrane-Actuated Pumps	177	(1)
Overview	178	(4)
Thermopneumatic Pumps	182	(1)
Piezoelectric Pumps	183	(14)
Bimetallic actuated Pumps	197	(1)
Electrostatically actuated Micropumps	198	(2)
Pumps with the Shape-Memory Effect	200	(1)
Electric Field Actuated Pumps	201	(1)
Electrohydrodynamic Pumps	201	(3)
Electroosmotic Pumps	204	(2)
Other Actuation Techniques	206	(1)
In-Line Gear Pumps	206	(1)
Travelling Flexural Wave (Ultrasonic)	207	(1)
Physical Sensors for Microfluidics	208	(9)
Flowsensors	208	(1)
Drag-force Flowsensors	208	(2)
Differential Pressure Method	210	(1)
Thermal Flowsensors	210	(2)
Electrohydrodynamic Flowsensors	212	(1)
High-speed X-Ray Micro-Imaging	213	(1)
Pressure Sensors	213	(1)
Piezoresistive Pressure Sensors	213	(2)
Capacitive Pressure Sensors	215	(1)
Resonating Pressure Sensors	215	(2)
Microfluidic Devices II: Particles and Chemistry	217	(46)
Introduction	217	(1)
Particle and Cell Handling with Microfluidics	217	(10)
Introduction to Dielectrophoresis	217	(1)
Particle/Cell Trapping	218	(1)
Transportation and Separation of Particles	218	(4)
Particle Counting	222	(5)
Mixing and Chemistry on the Micronscale	227	(11)
Diffusive Mixing Principle	227	(8)
Chaotic Mixing Processes	235	(1)
Microreactors and Chemistry on a Chip	236	(2)
Chemical Analysis with MEMS	238	(11)
Introduction	238	(5)
Flow Injection Analysis	243	(1)
Liquid and Gas Chromatography	243	(2)
Capillary Electrophoresis	245	(3)
DNA Analysis based on MEMS	248	(1)
Biochemical Sensors for Microfluidics	249	(14)
Semiconductor Devices used for Chemical Sensors	250	(1)
Chemdiodes	250	(1)
Chemfet	251	(2)
Metal Oxide Gas Sensors	253	(4)
Catalytic Gas-sensors	257	(1)
Optical Sensing Techniques for Chemicals	258	(1)
Biosensors	259	(4)
Integrated Microfluidic Systems	263	(25)
Microsystems Technology	263	(5)
Advantages of Integration	263	(1)
Integration of Micromechanics and Microelectronics	264	(2)
Integration of Microfluidics and Microelectronics	266	(2)
Connection Systems for Microfluidic Devices	268	(6)
Vertical System Integration	268	(1)
Moulded Connection System	269	(1)
Silicon Tubing	270	(1)
Pyrex-Silicon Microfluidic Circuit Board	271	(3)
Applications of Integrated Microfluidic Devices	274	(13)
Micro Dosing Systems and Drug Delivery	274	(3)
Chemical Microplants	277	(2)
Medical, Chemical and Environmental Monitoring	279	(4)
Drug Discovery and Genetic Diagnostics	283	(4)
Conclusion	287	(1)
Abbreviations and Acronyms	288	(1)
References	289	(26)
Index	315