Smart Mems And Sensor Systems

by Gaura, Elena; Newman, Robert M.; Kraft, Michael (CON); Flewitt, Andrew (CON); de Lima Monteiro, Davies William (CON)

• ISBN13: 9781860944932
• ISBN10: 1860944930
• Format: Hardcover
• Copyright: 2006-10-30
• Publisher: World Scientific Pub Co Inc

Summary

In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective.

Table of Contents

Preface	v
Chapter 1 Markets and Applications	1	(30)
1.1 Technology at Crossroads	1	(1)
1.2 The Present — MEMS in the News	2	(5)
1.3 The Past Great Expectations	7	(3)
1.4 The Future Maturity and Pervasive Applications	10	(3)
1.5 Drivers for Progress	13	(2)
1.6 Progress Device Improvement	15	(3)
1.7 Progress Device Integration	18	(5)
1.8 Smart MEMS The Research Agenda	23	(3)
1.9 Structure of the Book	26	(5)
Chapter 2 Microfabrication Technologies	31	(76)
2.1 Introduction	31	(5)
2.2 Passive Components	36	(6)
2.3 Sensing Components	42	(7)
2.4 Actuating Components	49	(6)
2.5 Materials and Growth	55	(18)
2.6 Fabrication Techniques	73	(24)
2.7 Conclusions	97	(10)
Chapter 3 Sensor Electronics	107	(66)
3.1 Introduction	107	(1)
3.2 Functions of a Sensor System	108	(23)
3.3 Analogue and Digital Design Options	131	(6)
3.4 Digital Signal Processing	137	(6)
3.5 Interface Configurations for Different Transducer Types	143	(9)
3.6 Integration	152	(6)
3.7 Design for Power Awareness	158	(10)
3.8 Conclusion	168	(5)
Chapter 4 Sensor Signal Enhancement	173	(60)
4.1 Errors in Sensor Systems and Measurement Quality (Non-linearity, Cross-sensitivity, Offset, Parameter Drift)	174	(13)
4.2 Sensor Calibration and Compensation — Techniques and Examples	187	(38)
4.3 System Design Choices for Compensation Closed Loop Configurations and other Designs	225	(1)
4.4 Summing up on Sensor Calibration and Compensation	226	(7)
Chapter 5 Case Study: Control Systems for Capacitive Inertial Sensors	233	(40)
5.1 Introduction	233	(2)
5.2 Open Loop Accelerometer	235	(8)
5.3 Closed Loop Accelerometer	243	(25)
5.4 Conclusions	268	(5)
Chapter 6 Case Study: Adaptive Optics and Smart VLSI/MEMS Systems	273	(32)
6.1 Introduction	273	(1)
6.2 Adaptive Optics and MEMS Systems	274	(2)
6.3 Operational Principles	276	(7)
6.4 Device Implementation	283	(11)
6.5 Closed-loop Adaptive Optical System	294	(5)
6.6 Conclusions and Future Trends	299	(6)
Chapter 7 Artificial Intelligence Techniques for Microsensors Identification and Compensation	305	(64)
7.1 Artificial Neural Networks: What They are and How They are Used for Microsensor Control and Identification	305	(10)
7.2 Open Loop, Neural Transducer Prototype for Static/Low Frequency Applications	315	(16)
7.3 Closed-loop Neural Network Controlled Accelerometer	331	(6)
7.4 The Neural Network Non-linear Gain Controller	337	(11)
7.5 Micromachined Sensor Identification Using Neural Networks	348	(16)
7.6 Concluding Remarks	364	(5)
Chapter 8 Smart, Intelligent and Cogent MEMS Based Sensors	369	(48)
8.1 Introduction	369	(1)
8.2 Smart, Intelligent and Cogent Sensors — What do the Terms Mean	370	(9)
8.3 What and Where is the Added Value Brought by Intelligence?	379	(3)
8.4 ANNs and MEMS	382	(8)
8.5 AI for MEMS Intelligence	390	(13)
8.6 'Cogent' Sensors Fault Detection Case Study	403	(9)
8.7 Conclusion	412	(5)
Chapter 9 Sensor Arrays and Networks	417	(48)
9.1 Potential of Sensor Arrays	417	(3)
9.2 Node Design	420	(5)
9.3 An Architectural History of Sensor Arrays and Networks	425	(15)
9.4 Systems Design Issues	440	(3)
9.5 Network Technology and Topology	443	(15)
9.6 Conclusion	458	(7)
Chapter 10 Wireless and Ad Hoc Sensor Networks	465	(44)
10.1 Sensor Network Applications	466	(6)
10.2 System Designers' Role	472	(3)
10.3 Design Assumptions for Ad hoc Networks	475	(2)
10.4 Distributed System Design Philosophy	477	(4)
10.5 Network Design Considerations	481	(4)
10.6 Layered Model	485	(3)
10.7 Sensor Network Operating Environments	488	(10)
10.8 Application Services	498	(3)
10.9 Proposed Sensor Support System Architecture	501	(3)
10.10 Conclusions	504	(5)
Chapter 11 Realising the Dream A Case Study	509	(24)
11.1 Introduction	509	(1)
11.2 The Mission	510	(3)
11.3 Initial Rough Design	513	(5)
11.4 Sensor Technology	518	(5)
11.5 Deployment	523	(2)
11.6 Operation, Control and Communication	525	(1)
11.7 Querying the Array	526	(1)
11.8 A Cogent Sensor	527	(3)
11.9 A World of Applications	530	(3)
Index	533