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Table of Contents
|Sputtering materials for microelectronic industry|
|Sputter deposition of thin films|
|Performance of sputtering targets and productivity|
|Sputtering target manufacturing|
|Sputtering targets for integrated circuits|
|Sputtering targets for displays and photovoltaic devices|
|Ferromagnetic sputtering targets for silicide and data storage applications|
|Diffusion and phase transformation|
|Phase change materials|
|Mechanical property evaluation|
|Units and conversion factors|
|Table of Contents provided by Publisher. All Rights Reserved.|