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Table of Contents
Chapter 1 Strain mapping using diffraction techniques NBD (Leti XX), CBED
Chapter 2 Strain mapping using GPA/HREM
Chapter 3 Dopant mapping using bright field TEM
Chapter 4 Strain mapping using dark field holography
Chapter 5 Interdiffusion and chemical reaction at interfaces by EELS
Chapter 6 Dopant segregation using STEM-EELS
Chapter 7 Chemical imaging using STEM-HAADF
Chapter 8 Characterization of process induced defects
Chapter 9 Specimen preparation by FIB
Chapter 10 Magnetic mapping using bright field holography