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Transmission Electron Microscopy in Micro-nanoelectronics,9781848213678
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Transmission Electron Microscopy in Micro-nanoelectronics

by
Edition:
1st
ISBN13:

9781848213678

ISBN10:
1848213670
Format:
Hardcover
Pub. Date:
12/26/2012
Publisher(s):
Wiley-ISTE

Questions About This Book?

What version or edition is this?
This is the 1st edition with a publication date of 12/26/2012.
What is included with this book?
  • The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any CDs, lab manuals, study guides, etc.

Summary

This book presents in a simple and practical way the new quantitative techniques based on transmission electron microscopy which have been recently invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices.

Table of Contents

Introduction

Chapter 1 Strain mapping using diffraction techniques NBD (Leti XX), CBED

Chapter 2 Strain mapping using GPA/HREM

Chapter 3 Dopant mapping using bright field TEM

Chapter 4 Strain mapping using dark field holography

Chapter 5 Interdiffusion and chemical reaction at interfaces by EELS

Chapter 6 Dopant segregation using STEM-EELS

Chapter 7 Chemical imaging using STEM-HAADF

Chapter 8 Characterization of process induced defects

Chapter 9 Specimen preparation by FIB

Chapter 10 Magnetic mapping using bright field holography



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