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9781558993020

Evolution of Expitaxial Structure and Morphology

by ; ; ;
  • ISBN13:

    9781558993020

  • ISBN10:

    1558993029

  • Format: Hardcover
  • Copyright: 1996-06-01
  • Publisher: Materials Research Society
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Summary

The evolution of epitaxial structure and morphology has assumed enormous scientific and technological importance in many areas of materials science. From the growth of magnetic multilayers to the fabrication of semiconductor devices, it is generally recognized that an understanding of microstructural development is fundamental to the control of the electronic, magnetic and mechanical properties of thin films. This book from MRS focuses on the structure and morphology of epitaxial systems with a particular emphasis on the time evolution of these properties as growth proceeds. It brings together advances to assess the relative roles of wetting and cohesion, reconstruction, surface and interfacial energy, misfit stress, and defect generation and propagation. It covers a broad mix of work, from basic studies of epitaxial metals and semiconductors to their application in thin-film electronic materials technology. Topics include: growth monitoring and characterization; island-size distributions and kinetic roughening; surfactants, intermixing and alloying; evolution of large-scale structures; self-organized epitaxial structures; strain relaxation; strain relaxation; steps, adatoms and islands and interface roughness and interdiffusion.

Table of Contents

Preface
Acknowledgments
Materials Research Society Symposium Proceedings
The Use of RHEED intensities for the Quantitative Characterization of Surfacesp. 3
Reentrant Growth in Kientic Thin-Film Deposition on Stepped Surfacesp. 11
Analysis of Reflection High Energy Electron Diffraction Pattern of Silicon Carbide Grown on Siliconp. 17
Low-Temperature Growth and Structural Characterization of GaAs Using Ionized Source Beam Epitaxyp. 23
X-ray Scattering and Absorption Studies of MnAs Thin Films Grown by MBE on GaAs(001) Substratesp. 29
Crossover from Dimer Nucleation to Adatom Exchange during Submonolayer Epitaxyp. 37
Molecular Beam Epitaxial Growth Mode Transitions on Vicinal Surfacesp. 47
Solid-on-Solid Monte Carlo Investigation of Islanding Kinetics During Heteroepitaxyp. 53
Scaling of Island Size Distributions in the Growth of Ni on GaAs(110)p. 59
Effects of Crystalline Microstructure on Epitaxial Morphologyp. 67
A New Method for Fast Simulation of Adsorbate Dynamicsp. 77
A One-Dimensional Stochastic Model of Diamond Growthp. 83
Kinetic Roughening of Fe/Fe(100) Epitaxial Thin Filmsp. 89
Characterization of Surface Morphology in Epitaxial Growthp. 95
Morphology of Ag Islands Grown on GaAs(110) at Low Coverage: Monte Carlo Simulationsp. 103
Analysis of TPD Spectra on Semiconductor Surfaces by Monte Carlo Simulationsp. 109
Heteroepitaxial [actual symbol not reproducible] Layer Growth on (100)Si by Atmospheric Pressure Chemical Vapor Depositionp. 117
Progression of the Surface Roughness of N+ Silicon Epitaxial Films as Analyzed by AFMp. 123
In Situ Cross-Sectional Scanning Tunneling Microscopy Sample Preparation Techniquep. 129
Growth of Transition Metal Films on Al(110) Surfacesp. 135
Molecular Dynamics Simulation of Energetic Deposition of Ag/Fe and Ag/Si Bilayers and Multilayersp. 141
Molecular Beam Epitaxy of InGaP Films Grown on Si(001) Substrates with Various Kinds of Initial Buffer Layersp. 147
Morphological Evolution and Properties of LPE Grown GaSb, AlGaSb, and AlGaAsSbp. 153
Microstructural Evolution of Co[subscript 2]GaAs Thin Film on GaAs Substratep. 159
Molecular Beam Epitaxial Growth of InAs/AlGaAsSb Deep Quantum Wells on GaAs Substratesp. 165
Structural Decomposition at Sn/GaAs(001) Interfacep. 171
The Effect of Substrate Misorientation on the Evolution of Surface Morphology in Epitaxially Grown CaF[subscript 2]/Si(111) Heterostructuresp. 177
High Quality Heteroepitaxial [beta]-SiC Deposited from Methyltrichlorosilane at 1200[degree centigrade] Without any Buffer Layerp. 183
Semiconductor Epitaxial and Nonepitaxial Overgrowth from Solutionsp. 189
Surfactant-Mediated Growth of SiGe/Si Quantum-Well Structures Studied by Photoluminescence Technique and Secondary Ion Mass Spectrometryp. 197
GaAs-on-Ge Heteroepitaxy by Atomic Hydrogen-Assisted Molecular Beam Epitaxy (H-MBE)p. 203
Interdiffusion During the Growth of Fe on Ag/Fe(110)p. 207
The Effect of Strain on Intra- and Interlayer Mass Transport in Metal Epitaxyp. 213
Coarsening and Slope Selection During Crystal Growth and Etching of Ge(001)p. 221
Step-Edge Barriers on GaAs(001)p. 229
Morphological Transition of Epitaxial Rhodium (111)p. 243
Pyramid Formation and Coarsening During Homoepitaxial Growthp. 251
Interfacial Coarsening in an MBE Growth Without Slope Selectionp. 257
On the Roughening of Ceramic Surfacesp. 263
Self-Limiting Growth Kinetics of 3D Coherent Islandsp. 271
Equilibrium Shapes of Small Strained Islandsp. 283
Uniform Quantum Dots by Self-Organizing Process in Atomic Hydrogen-Assisted MBEp. 289
Temperature-Dependent Strain Relaxation and Islanding of Ge/Si(111)p. 295
Heteroepitaxial Layer Morphology and Misfit Defect Formationp. 303
Misfit Dislocations and Elastic Relaxationp. 313
Strain Relaxation at Low Misfits: Dislocation Injection vs. Surface Rougheningp. 325
Correlation Between Extended Defects and Surface Morphology in MBE Grown InAs/GaAs Heterostructuresp. 337
Orientation Dependence of CdTe/Si Grown by MBEp. 343
The Stability of Lattice Mismatched Thin Filmsp. 351
Observations on the Mechanics of Strained Epitaxial Island Growthp. 359
Void and Dislocation Microstructure Development in Heteroepitaxial Film Growthp. 371
Deformation Behavior of Strained Layer Heterostructuresp. 377
Equilibrium Configuration of Epitaxially Strained Thin Film Surfacesp. 383
A Model for Ion-Assisted Molecular Beam Epitaxy and Application to Synthesis of Epitaxial Sn[subscript x]Ge[subscript 1-x] Alloy Filmsp. 389
Dislocation Structure Evolution in Thin Single Crystal Plates Under Cyclic Loadingp. 397
Investigation of Relationships between Dislocations and Crystal Surface Ledgesp. 401
Strain Relaxation in Heteroepitaxial Si[subscript 1-x]Ge[subscript x] Films Via Surface Roughening Processesp. 407
Si[subscript 1-x]Ge[subscript x] Critical Thickness for Surface Wave Generation During UHV-CVD Growth at 525[degree centigrade]p. 413
Morphological Evolution During Ge/Si(100) Heteroepitaxyp. 419
Synchrotron White Beam Topography Studies of Residual Stress in SiC Single Crystal Wafers With Epitaxial Thin Filmsp. 425
Defect Structures in GaP/Sip. 431
Strain Relaxation in GaAs on Si by Two Groups of Misfit Dislocationsp. 437
Formation of Interfacial Dislocations in Heteroepitaxial Layers Grown in Two-Dimensional Modep. 443
Anisotropic Lattice Relaxation and its Mechanism of ZnSe Epilayer Grown on (001) GaAs Substrate by Molecular Beam Epitaxyp. 449
Reciprocal Space Analysis of the Initial Stages of Strain Relaxation in SiGe Epilayersp. 455
X-ray Diffraction Analysis of the Strain of SiGeC/(100)Si Alloysp. 461
Defect Structure of Cu-Rich and In-Rich Chalcopyrite CuInSe[subscript 2] Films Grown on GaAsp. 467
Effect of the Introduction of a MBE Buffer Layer on the Morphology of InSb ALMBE Layers Grown on InP Substratesp. 473
Twinning in Epilayers of CdTe on [211] Si: Influence of ZnTe Buffer Layer and Substrate Misorientationp. 479
TEM Study of Stacking Faults Formed in Pairs in a ZnSe Epitaxial Layer on a GaAs(001) Buffer Layerp. 485
Control of Defect Structures in CuGaSe[subscript 2] Epitaxial Filmsp. 491
First-Principles Study of Domain Evolution of Ir on Ir(111)p. 499
Atomistic Simulation and Elastic Theory of Surface Stepsp. 505
Simulations of Si(100) Growth: Step Flow and Low Temperature Growthp. 511
Growth Kinetics and Structure of Ultrathin Copper Films on the W(110) Surface Studied by LEEMp. 523
Spectral Sensitivities of X-ray Diffraction to the Roughness of Si/SiO[subscript 2] Interfacesp. 531
Growth of GaAs and InAlAs on High Quality, Epitaxial, NiAl Metal Filmp. 537
Double Periodicity Formation in EuTe/PbTe Superlatticesp. 543
Strain-Induced Diffusion in Heteroepitaxially Grown CuInSe[subscript 2] on GaAs Substratesp. 549
Author Indexp. 555
Subject Indexp. 559
Table of Contents provided by Blackwell. All Rights Reserved.

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