Advances In Multiphysics Simulation And Experimental Testing Of Mems

by Frangi, Attilio; Cercignani, Carlo; Mukherjee, Subrata; Aluru, Narayan

• ISBN13: 9781860948626
• ISBN10: 1860948626
• Format: Hardcover
• Copyright: 2008-07-29
• Publisher: World Scientific Pub Co Inc

Summary

"This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS."--BOOK JACKET.

Table of Contents

Preface	p. v
Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices	p. 1
Using the Kinetic Equations for MEMS and NEMS	p. 37
Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices	p. 81
New Approaches for the Simulation of Micro-Fluidics in MEMS	p. 121
Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers	p. 153
Experimental Techniques for Damping Characterization of Micro and Nanostructures	p. 183
Nonlinear Dynamics of Electrostatically Actuated MEMS	p. 235
Coupled Deformation Analysis of Thin MEMS Plates	p. 287
Pull-In Instability in Electrostatically Actuated MEMS due to Coulomb and Casimir Forces	p. 329
Numerical Simulation of BioMEMS with Dielectrophoresis	p. 375
Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization	p. 399
Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests	p. 427
Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System	p. 455
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