Alternate Lithography

by Torres, Clivia M. Sotomayor

• ISBN13: 9780306478581
• ISBN10: 0306478587
• Format: Hardcover
• Copyright: 2003-12-01
• Publisher: Plenum Pub Corp

Summary

This book intended for academic and industrial research scientists and engineers, as well as industrial laboratories working on sensors, biotechnology and opto/electronics details in 17 chapters state-of-the-art technologies and the prospects for micro-contact printing and nanoimprint lithography.

Table of Contents

Alternative Lithography	p. 1
Nanoimprint Lithography	p. 15
Viscoelastic Properties of Polymers	p. 25
Nanorheology	p. 47
Wafer Scale Nanoimprint Lithography	p. 77
Step And Stamp Imprint Lithography	p. 103
Step and Flash Imprint Lithography	p. 117
Using PDMS as a thermocurable resist for a mold assisted imprint process	p. 139
Molecules for Microcontact Printing	p. 167
Microcontact Printing Techniques	p. 181
Local Oxidation Nanolithography	p. 213
Combined Approaches for Nanoelectronic Device Fabrication	p. 235
Application of Nanoimprint Lithography in Magnetism	p. 249
Application of Microcontact Printing and Nanoimprint Lithography	p. 271
Optical Applications of Nanoimprint Lithography	p. 287
Biotechnology Applications of NIL	p. 297
Soft Lithography and Imprint-Based Techniques for Microfluidics and Biological Analysis	p. 305
Index	p. 331
Table of Contents provided by Blackwell. All Rights Reserved.