Atomic Layer Deposition of Nanostructured Materials

by Pinna, Nicola; Knez, Mato

• ISBN13: 9783527327973
• ISBN10: 3527327975
• Edition: 1st
• Format: Hardcover
• Copyright: 2011-12-12
• Publisher: Wiley-VCH

Summary

Clearly structured, the introductory part of this first book on ALD provides a great insight into all aspects of the technique, while the second part focuses on nanomaterials and fields of application. As a result, readers and users are led from the fundamental processes and uses of the technique to building nanostructures in various important fields of academic and industrial significance.

Author Biography

Nicola Pinna studied physical chemistry at the Universit? Pierre et Marie Curie (Paris). He received his PhD in 2001, and in 2002, he moved to the Fritz Haber Institute of the Max Planck Society (Berlin). In 2003, he joined the Max Planck Institute of Colloids and Interfaces (Potsdam). In 2005, he moved to the Martin Luther University, Halle-Wittenberg, as an Assistant Professor of Inorganic Chemistry. Since 2006 he is researcher at the Department of Chemistry and CICECO of the University
of Aveiro and since 2009 he is also Assistant Professor at the School of Chemical and Biological Engineering of the Seoul National University. In 2011 he was ranked among the top 100 materials scientists of the past decade by impact. His research activity is focused on the development of novel routes to nanostructured materials, their characterization, and the study of their physical properties.

Mato Knez studied chemistry at the University of Ulm in Germany. He did his dissertation at the Max Planck Institute of solid state research in Stuttgart from 2000?2003. In 2003 he joined the Max Planck Institute for Microstructure Physics in Halle as a Postdoc where he established the ALD-based research direction. Since 2006 he is leading a research group funded by the German Ministry of Education and Research (BMBF). In January 2012 he will join CIC nanoGUNE in San Sebastian (Spain) as an Ikerbasque Research Professor. His research activities are mainly focused on various aspects of the application of ALD, including the synthesis of optical nanolaminates, infi ltration mechanisms when ALD is applied to soft materials, and ALD-assisted nanofabrication of photonic and plasmonic structures. Aside from ALD he has strong research activites in biotemplated inorganic nanostructures for applications in nanotechnology and medicine.

Table of Contents

Introduction to Atomic Layer Deposition (ALD)

General Introduction to ALD and New Challenges

Theroretical Modeling of ALD Processes

New Chemical Approaches to ALD

Polymer and Hybrid ALD (MLD)

Low Temperature ALD Processes

Nanostructures By Atomic Layer Deposition

ALD in Microelectronics

Patterning and Linear Structures

Coating of High Aspect Ratio Structures

Coatings of Nanoparticles

Coatings of Soft Materials

Coatings of Carbon Nanotubes

Inverse Opals and Photonics

Optical Nanolaminates

ALS on Biological Materials

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