Defects in Optoelectronic Materials

by Wada; Kazumi

• ISBN13: 9789056997144
• ISBN10: 9056997149
• Format: Hardcover
• Copyright: 2001-11-06
• Publisher: CRC Press

Summary

Defects in Optoelectronic Materialsbridges the gap between device process engineers and defect physicists by describing current problems in device processing and current understanding of these defects based on defect physics. The volume covers defects and their behaviors in epitaxial growth, in various processes such as plasma processing, deposition and implantation, and in device degradation. This book also provides graduate students cutting-edge information on devices and materials interaction.

Table of Contents

About the Series	vii
Foreword	ix
Preface	xi
Defects in Device Fabrication
Saturation of Free Carrier Concentration in Semiconductors	1	(32)
W. Walukiewicz
Point Defect Formation Near Surfaces	33	(10)
K. Wada
Optical Characterization of Plasma Etching Induced Damage	43	(44)
E. L. Hu
C.-H. Chen
Dry Etch Damage in Widegap Semiconductor Materials	87	(58)
S. J. Pearton
R. J. Shul
Generation, Removal, and Passivation of Plasma Process Induced Defects	145	(60)
S. W. Pang
Defects Induced by Metal Semiconductor Contacts Formation	205	(50)
T. Okumura
Electrical Characterization of Defects Introduced in Epitaxially Grown GaAs by Electron-, Proton- and He-Ion Irradiation	255	(90)
F. D. Auret
Defects in Device Operation
Instability and Defect Reaction	345	(24)
Y. Shinozuka
Defects and Device Degradation	369	(40)
K. Wada
H. Fushimi
Index	409