Dislocations and Deformation Mechanisms in Thin Films and Small Structures

by Kraft, Oliver

• ISBN13: 9781558996090
• ISBN10: 1558996095
• Format: Hardcover
• Copyright: 2001-10-01
• Publisher: Materials Research Society

Summary

The mechanical properties of small volumes of materials such as thin films and patterned structures can be very different from the mechanical properties of those same materials in bulk. Many explanations of the mechanical behaviors of such small volumes have depended on simplified models of dislocation behavior. However, recent developments in dislocation modeling have made it possible to understand dislocation behavior in much more detail than before. A wide range of topics is presented in these proceedings, including mechanisms of plastic deformation in heteroepitaxial, multilayered and polycrystalline thin films, as well as three-dimensional mesostructures such as epitaxial islands, semiconducting devices and microcrystallites. Experimental, theoretical and numerical simulations are addressed. Topics include: dislocation and deformation mechanisms in thin metal films and multilayers; discrete dislocations - observations and simulations; dislocations and deformation mechanisms in thin films and small structures; dislocations in small structures; dislocations and deformation in epitaxial layers; dislocation fundamentals -observations, calculations and simulations.

Table of Contents

Preface	p. ix
Acknowledgments	p. xi
Materials Research Society Symposium Proceedings	p. xii
Dislocation and Deformation Mechanisms in Thin Metal Films and Multilayers I
Constrained Diffusional Creep in Thin Copper Films	P1.2
An Experimental and Computational Study of the Elastic-Plastic Transition in Thin Films	P1.3
"Reverse" Stress Relaxation in Cu Thin Films	P1.4
Stress Evolution in a Ti/Al(Si,Cu) Dual Layer During Annealing	P1.5
Study of the Yielding and Strain Hardening Behavior of a Copper Thin Film on a Silicon Substrate Using Microbeam Bending	P1.9
Mechanical Behavior of Thin Cu Films Studied by a Four-Point Bending Technique	P1.10
Discrete Dislocations: Observations and Simulations
Dislocation Dynamics Simulations of Dislocation Interactions in Thin FCC Metal Films	P2.2
Discrete Dislocation Simulation of Thin Film Plasticity	P2.3
Influence of Film/Substrate Interface Structure on Plasticity in Metal Thin Films	P2.6
Observations of Dislocation Motion and Stress Inhomogeneities in a Thin Copper Film	P2.7
Dislocations and Deformation Mechanisms in Thin Films and Small Structures
Solid Solution Alloy Effects on Microstructure and Indentation Hardness in Pt-Ru Thin Films	P3.2
Lack of Hardening Effect in TiN/NbN Multilayers	P3.3
Temperature and Strain Rate Dependence of Deformation-Induced Point Defect Cluster Formation in Metal Thin Foils	P3.5
Dislocation Locking by Intrinsic Point Defects in Silicon	P3.9
Optical Study of SiGe Films Grown With Low Temperature Si Buffer	P3.11
Thickness-Fringe Contrast Analysis of Defects in GaN	P3.12
Dislocations in Small Structures
Modeling of Dislocations in an Epitaxial Island Structure	P4.2
Misfit Dislocation Introduction During the Epitaxial Growth of InAs Islands on GaP	P4.3
X-ray Diffuse Scattering From Misfit Dislocation at Buried Interface	P4.9
Dislocations and Deformation in Epitaxial Layers
Development of Cross-Hatch Morphology During Growth of Lattice Mismatched Layers	P5.2
Mechanism for the Reduction of Threading Dislocation Densities in Si[subscript 0.82]Ge[subscript 0.18] Films on Silicon on Insulator Substrates	P5.3
TEM Study of Strain States in III-V Semiconductor Epitaxial Layers	P5.5
A Kinetic Model for the Strain Relaxation in Heteroepitaxial Thin Film Systems	P5.11
Dislocation Fundamentals: Observations, Calculations and Simulations
Dislocation Core Spreading at Interfaces Between Crystalline and Amorphous Solids	P6.6
Dislocation Networks Strain Fields Induced by Si Wafer Bonding	P6.9
Dislocations and Deformation Mechanisms in Thin Metal Films and Multilayers II
Misfit Dislocations in Epitaxial Ni/Cu Bilayer and Cu/Ni/Cu Trilayer Thin Films	P7.1
Structure and Mechanical Behavior Relationship in Nano-Scaled Multilayered Materials	P7.3
Dislocations in Thin Metal Films Observed With X-Ray Diffraction	P7.6
Local Microstructure and Stress in Al(Cu) Thin Film Structures Studied by X-Ray Microdiffraction	P7.7
Deformation Microstructure of Cold Gas Sprayed Coatings	P7.10
Plastic Deformation of Thin Metal Foils Without Dislocations and Formation of Point Defects and Point Defect Clusters	P7.11
Author Index
Subject Index
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