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9783527307463

Enabling Technology for MEMS and Nanodevices Advanced Micro and Nanosystems

by ; ; ; ; ;
  • ISBN13:

    9783527307463

  • ISBN10:

    352730746X

  • Edition: 1st
  • Format: Hardcover
  • Copyright: 2004-08-06
  • Publisher: Wiley-VCH

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Summary

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Author Biography

((see www.AMN.wiley-vch.de for the 6 series editors' biographies))

Table of Contents

Preface v
List of Contributors
ix
M3: the Third Dimension of Silicon
1(20)
P. M. Sarro
Trends in MEMS Commercialization
21(28)
J. W. Knutti
H. V. Allen
Capacitive Interfaces for MEMS
49(44)
V. P. Petkov
B. E. Boser
Packaging of Advanced Micro- and Nanosystems
93(72)
V. M. Bright
C. R. Stoldt
D. J. Monk
M. Chapman
A. Salian
High-frequency Integrated Microelectromechanical Resonators and Filters
165(28)
F. Ayazi
MEMS in Mass Storage Systems
193(44)
T. R. Albrecht
J. U. Bu
M. Despont
E. Eleftheriou
T. Hirano
Scanning Micro- and Nanoprobes for Electrochemical Imaging
237(52)
C. Kranz
A. Kueng
B. Mizaikoff
Nanofluidic Modeling and Simulation
289(30)
M. Geier
A. Greiner
D. Kauzlaric
J. G. Korvink
Nanofluidics -- Structures and Devices
319(38)
J. Lichtenberg
H. Baltes
Carbon Nanotubes and Sensors: a Review
357(26)
J. R. Stetter
G. J. Maclay
CMOS-based DNA Sensor Arrays
383(32)
R. Thewes
F. Hofmann
A. Frey
M. Schienle
C. Paulus
P. Schindler-Bauer
B. Holzapfl
R. Brederlow
Subject Index 415

Supplemental Materials

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