Esd Design and Analysis Handbook

by Vinson, James E.; Gernier, Joseph C.; Croft, Gregg D.; Liou, Juin J.

• ISBN13: 9781402073502
• ISBN10: 140207350X
• Format: Hardcover
• Copyright: 2002-11-01
• Publisher: Kluwer Academic Pub

Summary

Electrostatic Discharge (ESD) is a pervasive issue in the semiconductor industry affecting both manufacturers and users of semiconductors. The problem worsens with each new generation of parts and components. As technology scales to higher levels of integration, circuits become more sensitive to ESD and the design of protection becomes more difficult. ESD Design and Analysis Handbook presents an overview of ESD as it effects electronic circuits and provides a concise introduction for students, engineers, circuit designers and failure analysts. This handbook is written in simple terms and is filled with practical advice and examples to illustrate the concepts presented. While this treatment is not exhaustive, it presents many of the most important areas of the ESD problem and suggests methods for improving them. The key topics covered include the physics of the event, failure analysis, protection, characterization, and simulation techniques. The book is intended as both an introductory text on ESD and a useful reference tool to draw on as the reader gains experience. The authors have tried to balance the level of detail in the ESD Design and Analysis Handbook against the wealth of literature published on ESD every year. To that end, each chapter has a topical list of references to facilitate further in-depth study.

Table of Contents

Foreword	ix
Physics and Models of an ESD Event	1	(64)
ESD in our World	1	(4)
Home Life	1	(2)
Work Environment	3	(1)
Threats from ESD	4	(1)
Nature	5	(1)
ESD in Semiconductors	5	(5)
Wafer Fabrication	6	(1)
Assembly, Test, and Customers	7	(2)
ESD Impact	9	(1)
The ESD Event	10	(42)
ESD Overview	10	(6)
Charge Generation	16	(5)
Charge Transfer	21	(6)
Charge Conduction	27	(19)
Charge Induced Damage	46	(6)
Degradation and Latency	52	(4)
Topical Reference List	56	(9)
ESD as an Ignition Source	56	(1)
Lightning	56	(1)
ESD in Manufacturing	56	(1)
Charge Generation	57	(1)
Charge Transfer	58	(2)
Conduction Mechanisms	60	(1)
Damage Mechanisms	60	(4)
ESD Latency	64	(1)
Failure Analysis Techniques	65	(20)
Overview of Failure Analysis	65	(1)
Failure Analysis Objectives	65	(1)
Failure Site Identification	66	(12)
Failure Analysis Operations	67	(1)
Data Review	68	(1)
External Examination	69	(2)
Electrical Verification	71	(4)
Failure Site Localization	75	(3)
Root Cause and Corrective Action	78	(4)
Topical Reference List	82	(3)
Test Methods	82	(1)
Failure Localization Techniques	83	(1)
Etches and Stains	84	(1)
EOS versus ESD	84	(1)
Environmental Protection	85	(26)
Environmental Philosophy	85	(6)
Purpose	85	(1)
The Need	85	(5)
Protection Strategy	90	(1)
Environmental Protection Overview	91	(1)
Room Level Controls	91	(3)
Work Area Controls	94	(4)
Personal Controls	98	(2)
Packaging and Storage	100	(2)
Handling Equipment	102	(1)
Auditing	103	(2)
Topical Reference List	105	(6)
Room Charge Controls	105	(1)
Workstation Controls	106	(1)
Personal Controls	107	(1)
Equipment	108	(1)
Containers	109	(1)
Auditing	109	(2)
Chip Level Protection	111	(46)
Protection Approach	111	(2)
Off Chip Protection	113	(7)
Purpose	113	(1)
Protection Options	113	(7)
On-Chip Protection	120	(28)
Wafer Technology Assessment	121	(1)
Circuit Architecture Assessment	122	(3)
Protection Techniques	125	(19)
Layout Considerations	144	(3)
ESD Protection Review	147	(1)
Topical Reference List	148	(9)
General Protection Information	148	(2)
Off-Chip Protection	150	(1)
Circuit Element Improvements	151	(2)
Clamping Structures	153	(2)
Layout Effects	155	(2)
Device Characterization	157	(24)
Circuit Element Sensitivity	157	(5)
Modeling Limitations	157	(1)
Device Modeling in ESD Design	157	(2)
Measurement Techniques	159	(3)
TLP Testing	162	(13)
Constant Current TLP Tester	163	(1)
Constant Impedance TLP Tester	164	(1)
Problems and Limitations	165	(7)
TLP to HBM Correlation	172	(3)
Characterization Matrix	175	(2)
Topical Reference List	177	(4)
Mosfet Protection	177	(1)
Transmission Line Pulsing	178	(1)
TLP and HBM Correlation	179	(1)
ESD Characterization	180	(1)
ESD Modeling	181	(20)
Circuit Modeling	183	(13)
Introduction to Spice Simulation	185	(2)
Parasitic Influence of ESD Protection	187	(1)
Key Models for ESD Protection	188	(6)
ESD Threshold Predictions	194	(2)
Device Modeling	196	(3)
Topical Reference List	199	(2)
Spice Model Improvements	199	(1)
Device Simulation	199	(2)
Index	201