Fundamental Electron Interactions with Plasma Processing Gases

by Christophorou, Loucas G.; Olthoff, James K.

• ISBN13: 9780306480379
• ISBN10: 0306480379
• Format: Hardcover
• Copyright: 2003-11-01
• Publisher: Plenum Pub Corp

Summary

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

Table of Contents

Preface	xi
Dedication	xiii
Acknowledgments	xv
Fundamental Electron-Molecule Interactions and Their Technological Significance	1	(60)
Introduction	1	(1)
Low Energy Electron-Molecule Interaction Processes	2	(35)
Interactions of Low-Energy Electrons with Ground-State Molecules	3	(9)
Interactions of Low-Energy Electrons With Excited Molecules	12	(11)
Interactions of Low-Energy Electrons with Molecules in High Pressure Gases, Liquids, Clusters, and with Molecules at Surfaces	23	(12)
Interactions of Low-Energy Electrons With Transient Species (Radicals)	35	(2)
Significance of Electron-Molecule Interactions in Plasma Processing	37	(10)
Low-Temperature, Low-Density, Non-Equilibrium Plasmas	39	(1)
Generation, Use, and Modeling of Low-Pressure Plasmas	40	(5)
Primary and Secondary Reactions	45	(2)
The Present Work	47	(4)
References	51	(10)
Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients	61	(52)
Introduction	61	(1)
Collision Cross Sections	62	(25)
Cross Sections for Elastic Electron Scattering	62	(1)
Cross Sections for Inelastic Electron Scattering	63	(2)
Partial Cross Sections	65	(1)
Total Electron Scattering Cross Section, σsc,t(ε)	65	(1)
Methods of Measurement	66	(14)
Calculations	80	(7)
Coefficients and Rate Constants	87	(13)
Electron Transport Coefficients	87	(1)
Coefficients for Electron Attachment, and Electron-Impact Ionization and Excitation	88	(1)
Rate Constants	89	(1)
Methods of Measurement	90	(10)
Boltzmann-Code-Generated Collision Cross-Section Sets	100	(1)
References	101	(12)
Synthesis and Assessment of Electron Collision Data	113	(22)
Introduction	113	(1)
Synthesis, Assessment, and Recommendation of Data	113	(8)
Determination of the Cross Section for Momentum Transfer, σm(ε), of CF4	115	(2)
Determination of the Total Electron Scattering Cross Section, σsc,t(ε), of CF4 Below 1eV	117	(1)
Determination of the Total Electron Attachment Cross Section, σa,t(ε), of Cl2	118	(1)
Consistency Between the Assessed Cross Sections	119	(2)
Deduction of Unavailable Data and Understanding from Assessed Data, New Measurements, and Data Needs	121	(8)
Deduction of Unavailable Data	121	(4)
A Better Understanding from Assessed Data	125	(2)
Determination of Data Needs and New Related Measurements and Calculations	127	(2)
Dissemination and Updating of the Database	129	(2)
References	131	(4)
Electron Interactions with CF4, C2F6, and C3F8	135	(200)
Introduction	135	(1)
Electron Interactions with CF4	136	(84)
Electronic and Molecular Structure of CF4	137	(7)
Electron Scattering from CF4	144	(26)
Electron-Impact Ionization of CF4	170	(18)
Electron-Impact Dissociation of CF4 into Neutral Fragments	188	(7)
Electron Attachment to CF4	195	(10)
Electron Transport in CF4	205	(5)
Electron Interactions with CF4 Neutral Fragments	210	(8)
Summary of Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for CF4	218	(2)
Electron Interactions with C2F6	220	(49)
Electronic and Molecular Structure of C2F6	221	(4)
Electron Scattering from C2F6	225	(11)
Electron-Impact Ionization of C2F6	236	(13)
Electron-Impact Dissociation of C2F6 into Neutral Fragments	249	(1)
Electron Attachment to C2F6	250	(10)
Electron Transport in C2F6	260	(8)
Summary of Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for C2F6	268	(1)
Electron Interactions with C3F8	269	(48)
Electronic and Molecular Structure of C3F8	270	(4)
Electron Scattering from C3F8	274	(9)
Electron-Impact Ionization of C3F8	283	(5)
Ionization Coefficients for C3F8	288	(7)
Electron-Impact Dissociation of C3F8 Producing Neutrals	295	(1)
Electron Attachment to C3F8	295	(16)
Electron Transport in C3F8	311	(4)
Summary of Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for C3F8	315	(2)
References	317	(18)
Electron Interactions with CHF3, CF3I, and c-C4F8	335	(114)
Introduction	335	(1)
Electron Interactions with CHF3	335	(37)
Electronic and Molecular Structure of CHF3	336	(2)
Electron Scattering from CHF3	338	(10)
Electron-Impact Ionization of CHF3	348	(7)
Electron-Impact Dissociation of CHF3 into Neutral Fragments	355	(5)
Electron Attachment to CHF3	360	(4)
Electron Transport Coefficients for CHF3	364	(2)
Electron-Impact Induced Light Emission from CHF3	366	(5)
Electron Interactions with CHF3 Neutral Fragments	371	(1)
Summary of Recommended and Suggested Cross Sections and Coefficients for CHF3	371	(1)
Electron Interactions with CF3I	372	(27)
Electronic Structure and Basic Properties of CF3I	373	(4)
Electron Scattering Cross Sections for CF3I	377	(7)
Electron-Impact Ionization of CF3I	384	(3)
Electron Attachment to CF3I	387	(10)
Optical Emission from Electron Impact on CF3I	397	(1)
Summary of Suggested Cross Sections and Coefficients for CF3I	398	(1)
Electron Interactions with c-C4F8	399	(37)
Structural and Electronic Properties of c-C4F8	400	(2)
Electron Scattering Cross Sections for c-C4F8	402	(5)
Electron-Impact Ionization of c-C4F8	407	(11)
Electron-Impact Dissociation of c-C4F8 into Neutral Fragments	418	(2)
Electron Attachment to c-C4F8	420	(12)
Electron Transport Coefficients for c-C4F8	432	(2)
Ion-Molecule Reactions in c-C4F8	434	(1)
Summary of Suggested and Recommended Cross Sections and Coefficients for c-C4F8	435	(1)
References	436	(13)
Electron Interactions with Cl2, CCl2F2, BCl3, and SF6	449	(316)
Introduction	449	(1)
Electron Interactions with Cl2	449	(67)
Electronic and Molecular Structure of Cl2	451	(13)
Electron Scattering from Cl2	464	(12)
Electron-Impact Ionization of Cl2	476	(4)
Electron-Impact Dissociation of Cl2 into Neutral Fragments	480	(1)
Electron Attachment to Cl2	481	(14)
Electron Transport in Cl2	495	(2)
Optical Emission from Cl2 Gas Discharges	497	(1)
Suggested Cross Sections and Coefficients for Cl2	497	(1)
Electron Collision Data for Cl and Cl+	498	(8)
Electron Detachment, Electron Transfer, and Recombination and Diffusion Processes Involving Cl2	506	(10)
Summary of Data for Other Species and Processes Involving Cl2 Plasmas	516	(1)
Electron Interactions with CCl2F2	516	(58)
Electronic and Molecular Structure of CCl2F2	517	(8)
Electron Scattering from CCl2F2	525	(12)
Electron-Impact Ionization of CCl2F2	537	(10)
Electron-Impact Dissociation of CCl2F2 into Neutral Fragments	547	(3)
Electron Attachment to CCl2F2	550	(14)
Electron Transport in CCl2F2	564	(4)
Optical Emission Under Electron Impact on CCl2F2	568	(5)
Recommended and Suggested Cross Sections and Coefficients for CCl2F2	573	(1)
Electron Interactions with BCl3	574	(36)
Structural and Electronic Properties of BCl3	575	(8)
Electron Scattering from BCl3	583	(7)
Electron-Impact Ionization of BCl3	590	(11)
Electron Attachment to BCl3	601	(8)
Electron Transport Coefficients for BCl3	609	(1)
Suggested and Needed Data for BCl3	609	(1)
Electron Interactions with SF6	610	(119)
Electronic and Molecular Structure of SF6	612	(19)
Electron Scattering by SF6	631	(23)
Electron-Impact Ionization of SF6	654	(13)
Cross Sections, σdis,neut(ε), for Electron-Impact Dissociation of SF6 into Neutral Fragments	667	(8)
Electron Attachment to SF6	675	(33)
Electron Transport in SF6	708	(6)
Autodetachment, Thermally Induced Detachment, Photodetachment, and Collisional Detachment of SF6	714	(8)
Ion Transport in SF6	722	(5)
Recommended and Suggested Electron Collision Cross Sections and Electron Transport Coefficients for SF6	727	(2)
References	729	(36)
Index	765