Fundamental Mechanisms of Low-Energy-Beam-Modified Surface Growth and Processing: 0Ymposium Held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.

by Moss, Steven C.; Chason, Eric H.; Cooper, Barbara H.; Harper, James M. E.; Rubia, Tomas Diaz De LA

• ISBN13: 9781558994935
• ISBN10: 1558994939
• Edition: 1st
• Format: Hardcover
• Copyright: 2000-10-01
• Publisher: Cambridge Univ Pr

Summary

Many technologically important thin-film growth, processing and surface modification techniques employ low-energy (hyperthermal and keV) particles. Energetic particle sources include ion beams (for growth and sputter etching), cluster beams, pulsed laser beams and plasmas. Phenomenological evidence suggests that the use of these energetic particles can change growth modes and provide control of surface morphology and film properties. The key to improving this control is to better understand how the energetic beams influence film, surface properties and the microscopic mechanisms responsible for beam-induced effects. This book addresses growth, ion erosion, surface smoothing, texturing and pattern formation, etching, structural stabilization and stress relaxation. Materials modification from the nanoscale to the mesoscale and macroscale are discussed as well as technological applications including thin-film transistors, microelectronics, materials for X-ray mirrors, high-temperature superconductors, sensors and diamond-like coatings. Papers on modeling and analysis of these processes using techniques including molecular dynamic simulations are also included..

Table of Contents

Dedication	xi
Preface	xiii
Materials Research Society Symposium Proceedings	xiv
BEAM-INDUCED SURFACE GROWTH AND MODIFICATION
Novel Defects and Anisotropic Vacancy Diffusion on Reconstructed Surfaces	3	(6)
O. Rodriguez de la Fuente
M.A. Gonzalez
J.M. Rojo
Growth of Co on Ag(100): A Comparison of Ultra Low Energy Ion Beam Deposition and Thermal Deposition	9	(6)
B. Degroote
J. Dekoster
S. Degroote
H. Pattyn
A. Vantomme
G. Langouche
M. Hou
Effects of Transient Diffusion on IPVD Feature Scale Evolution	15	(6)
G-S. Kim
U.P. Hansen
S.T. Rodgers
K.F. Jensen
Surface Smoothing Upon Deposition of Nanoparticles on Single Crystalline Substrates	21	(6)
C.G. Zimmermann
C.P. Liu
M. Yeadon
K. Nordlund
J.M. Gibson
R.S. Averback
U. Herr
K. Samwer
Etching and Surface Smoothing With Gas-Cluster Ion Beams	27	(8)
D.B. Fenner
R.P. Torti
L.P. Allen
N. Toyoda
A.R. Kirkpatrick
J.A. Greer
V. DiFilippo
J. Hautala
BIAXIALLY TEXTURED SUBSTRATES FOR HIGH-TC COATED CONDUCTORS
*Inclined Substrate Deposition by Evaporation of Magnesium Oxide for Coated Conductors	35	(10)
Markus Bauer
Ralf Metzger
Robert Semerad
Paul Berberich
Helmut Kinder
*Ion Beam Induced Growth Structure of Fluorite Type Oxide Films for Biaxially Textured HTSC Coated Conductors	45	(10)
Y. Iijima
M. Kimura
T. Saitoh
*Biaxially Textured Buffer Layers on Large-Area Polycrystalline Substrates	55	(12)
J. Dzick
S. Sievers
J. Hoffmann
K. Thiele
F. Garcia-Moreno
A. Usoskin
C. Jooss
H.C. Freyhardt
*Fabrication of High-Quality Ion Beam Deposited Cubic Oxide Template Films on Meter-Length Substrates	67	(8)
P.N. Arendt
J.R. Groves
S.R. Foltyn
Q.X. Jia
E.J. Peterson
R.F. DePaula
P.C. Dowden
J.Y. Coulter
M. Ma
Quantitative RHEED Analysis of Biaxially-Textured Polycrystalline MgO Films on Amorphous Substrates Grown by Ion Beam-Assisted Deposition	75	(10)
R.T. Brewer
J.W. Hartman
Harry A. Atwater
POLYCRYSTALLINE FILMS--MICROSTRUCTURE AND TEXTURE
Microstructural Evolution of Ion Bombarded Copper Thin Films	85	(6)
T. Wagner
D. Muller
*Modification of Thin Film Growth Using Glancing-Angle Ions	91	(12)
Scott A. Barnett
Kurt C. Ruthe
Paul M. DeLuca
Thin Film Growth and Ion-Beam Modification: MD Simulations Going Beyond Simple Systems	103	(6)
Edwin F.C. Haddeman
Bouke S. Bunnik
Barend J. Thijsse
Improvement of TFT Characteristics by Using Controlled Grains	109	(8)
F. Takeuchi
K. Suga
Y. Mishima
N. Sasaki
BEAM-MODIFIED FILM GROWTH AND SURFACE PROCESSING
Sputtering of Au Induced by Single Xe Ion Impacts	117	(6)
R.C. Birtcher
S.E. Donnelly
Ion-Enhanced Dry Etching of Magnetic Multilayers: Post-Etch Cleaning and Effects of UV Illumination	123	(6)
H. Cho
K.P. Lee
K.B. Jung
F. Sharifi
J. Marburger
S.J. Pearton
Use of the Vacuum Arc Discharge for the Surface Modification	129	(6)
Vladimir A. Kovalenko
KeV Ion Beam Induced Surface Modification of SiC Hydrogen Sensor	135	(6)
C.I. Muntele
D. Ila
E.K. Williams
D.B. Poker
D.K. Hensley
A Possible Production Technique for Modulation Doped SiGe Heterostructures	141	(6)
C. Rosenblad
M. Kummer
E. Muller
T. Hackbarth
H. von Kanel
Patterned ZnS Thin-Film Growth Using KrCl Excimer Lamp on the Zn Nuclei	147	(6)
M. Toda
H. Lizuka
M. Murahara
Stress Formation in Boron Nitride Films Prepared by Ion Beam Assisted Deposition	153	(6)
B. Rauschenbach
S. Sienz
Enhancement in the Growth of Textured HFCVD Diamond Coatings on Ti-6Al-4V Substrates by Excimer Laser Processing	159	(6)
Mikhail T. Galeev
M. Vedawyas
G. Sivanathan
Ashok Kumar
Deposition of Cubic-SiC Thin Films on Si(111) Using the Molecular Ion Beam Technique	165	(6)
T. Matsumoto
K. Mimoto
M. Kiuchi
S. Sugimoto
S. Goto
ECR Plasma Oxidation: Dependence on Energy of Argon Ion	171	(6)
S. Matsuo
M. Yamamoto
T. Sadoh
T. Tsurushima
D.W. Gao
K. Furukawa
H. Nakashima
Layer Splitting by H-Ion Implantation in Silicon: Lower Limit on Layer Thickness?	177	(6)
C. Qian
B. Terreault
Study of Strain Relaxation in Epitaxial Structure Ge0.2Si0.8/Si at Thermo-Implantation Treatment by Ion Beam Channeling	183	(8)
A.F. Vyatkin
V.K. Egorov
E.V. Egorov
A Molecular Dynamics Study of Implant-Induced Erosion of a (100)-Silicon Stepped Surface	191	(6)
A.M. Mazzone
Growth of Metal Nucleus on Polyimide Surface With Photochemical Reaction	197	(6)
M. Tomita
M. Murahara
X-ray Standing Wave Assisted Layer Deposition and Crystal Growth (XSWDG)	203	(6)
D.C. Meyer
P. Paufler
Investigation of Electronic Surface States and Its Correlation to Surface Modifications in Femtosecond UV-Laser Treated n(100) GaAs	209	(12)
T.A. Railkar
A.P. Malshe
W.D. Brown
S.S. Hullavarad
S.V. Bhoraskar
ENERGETIC BEAM EFFECTS ON FILM GROWTH I
Low Energy Ion Assisted Vapor Deposition	221	(6)
X.W. Zhou
H.N.G. Wadley
The Effect of Low-Energy Nitrogen Ions on the Growth Modes of Nitrides on Polymers Used in the Microelectronics Industry	227	(6)
P. Abramowitz
M. Kiene
P. Ho
Modeling Metal Thin Film Growth Under IPVD Conditions Using Molecular Dynamics Rates in a Level Set Approach	233	(6)
U. Hansen
S. Rodgers
M. Nemirovskaya
K.F. Jensen
Study of Low-Energy Ion Assisted Epitaxy of GaN Films: Influence of the Initial Growth Rate	239	(6)
J.W. Gerlach
D. Schrupp
R. Schwertberger
B. Rauschenbach
A. Anders
Ion Beam Processing of Carbon Nitride Thin Films	245	(6)
Richard L.C. Wu
William C. Lanter
John Wrbranek
Peter B. Kosel
Charles A. DeJoseph
AIN Thin Films Prepared by Reactive Ion Beam Coating	251	(6)
L.L. Cheng
Y.H. Yu
B. Sundaravel
E.Z. Luo
S. Lin
Y.M. Lei
C.X. Ren
W.Y. Cheung
S.P. Wong
J.B. Xu
I.H. Wilson
Synthesis of SiC on Si by Seeded Supersonic Beams of Fullerenes	257	(6)
G. Ciullo
F. Biasioli
A. Podesta
P. Milani
T. Toccoli
S. Iannotta
A Comparison Between the Calculated and Experimental Effects of Enhanced Precursor Translational Kinetic Energy on SiC Growth on Si(100) and Si(111) From Hexamethyldisilane	263	(8)
D.W. Beck
Q. Li
M.E. Kordesch
ENERGETIC BEAM EFFECTS ON FILM GROWTH II
*Field Emission From Carbon Films Deposited by Controlled-Low-Energy Beams and CVD Sources	271	(12)
Douglas H. Lowndes
Vladimir I. Merkulov
L.R. Baylor
G.E. Jellison Jr.
D.B. Poker
S. Kim
M.H. Sohn
N.W. Paik
Controlling the Diamond Film Morphology by Low-Energy Electron Bombardment	283	(6)
J.A. Gonzalez
O.L. Figueroa
B.R. Weiner
G. Morell
Ion Irradiation Induced Crosslinking Effects on Mechanical Properties of Photoresist Films	289	(8)
I.T.S. Garcia
D. Samios
F.C. Zawislak
J.A.H. da Jornada
C.E. Foerster
F.C. Serbena
C.M. Lepienski
SURFACE MORPHOLOGY EVOLUTION WITH ENERGETIC BEAMS
*Nonlinear Ripple Formation in Sputter Erosion	297	(8)
A-L. Barabasi
B. Kahng
H. Jeong
S. Park
Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors	305	(8)
Peter Klaver
Wim Goedheer
Fred Bijkerk
Barend J. Thijsse
Application of Cluster Ion Beam Smoothing to SiC and YBCO Surfaces	313	(6)
D. Fathy
O.W. Holland
R. Liu
J. Wosik
W.K. Chu
Author Index	319	(2)
Subject Index	321