Gaseous Electronics: Theory and Practice

by Raju; Gorur Govinda

• ISBN13: 9780849337635
• ISBN10: 0849337631
• Format: Hardcover
• Copyright: 2005-11-10
• Publisher: CRC Press

Summary

With coverage ranging from low pressure discharges to discharges that occur at high voltage and high frequency, this book focuses on the basic concepts required to understand the behavior of electrons in an electric discharge. Designed to serve as a graduate textbook and a data source, the author presents a unified treatment of all types of discharges in a comprehensive manner. Pulling together data scattered throughout the literature, the book provides data comparisons that help readers make decisions. Extensive literature references are cited for both theory and experimental data, and each chapter, with it own list of references, is independent of the other chapters.

Table of Contents

Collision Fundamentals	1	(54)
Coordinate Systems	1	(4)
Laboratory Coordinates	1	(2)
Center of Mass Coordinates	3	(2)
Meaning of Velocity Space	5	(3)
Maxwell's Distribution Function	8	(2)
Mean Free Path	10	(1)
Particle Collisions	11	(28)
Elastic Collisions	12	(3)
Energy Transfer in Elastic Collisions	15	(2)
Differential Scattering Cross Section	17	(3)
Momentum Transfer Cross Section	20	(1)
Diffusion Coefficient	21	(2)
Einstein Relationship	23	(1)
Inelastic Collisions	23	(2)
Collision Frequency	25	(5)
Rate Coefficients and Constants	30	(4)
Ion Mobility	34	(5)
Potential Functions for Particle Interactions	39	(4)
Quantum Mechanical Approach to Scattering	43	(12)
References	52	(3)
Experimental Methods	55	(38)
Total Collision Cross Sections	55	(11)
Ramsauer Technique	56	(2)
Modified Ramsauer's Technique	58	(2)
Linear Transmission Method	60	(1)
Time-of-Flight Method	61	(4)
Photoelectron Spectroscopy	65	(1)
Differential Cross Sections	66	(4)
Beam Scattering Technique	67	(1)
Crossed Beams Technique	67	(3)
Ionization Cross Section	70	(6)
Ionization Tube Method	70	(2)
Ionization Tube with e/m Discrimination	72	(1)
Crossed Beams Methods	72	(3)
Pulsed Crossed Beam Technique	75	(1)
Time-of-Flight Method	76	(1)
Total Excitation Cross Section	76	(8)
Resonance near Excitation Onset	79	(2)
Laser Fluoroscence Method	81	(1)
Swarm Method for Ro-Vibrational Excitation	81	(3)
Semiempirical Approach	84	(1)
Attachment Cross Section	84	(4)
Concluding Remarks	88	(5)
References	89	(4)
Data on Cross Sections---I. Rare Gases	93	(100)
Argon	93	(23)
Total and Momentum Transfer Cross Sections in Ar (20 ≤ ε ≤ 1000 eV)	96	(3)
Total Cross Sections in Ar (0 < ε ≤ 20 eV)	99	(1)
Elastic and Differential Cross Sections in Ar	100	(3)
Total Excitation Cross Sections in Ar	103	(5)
Ionization Cross Sections in Ar	108	(6)
Verification of the Sigma Rule for Ar	114	(2)
Helium	116	(15)
Total and Momentum Transfer Cross Sections in He	117	(3)
Elastic and Differential Cross Sections in He	120	(3)
Total Excitation Cross Sections in He	123	(4)
Ionization Cross Sections in He	127	(3)
Verification of the Sigma Rule for He	130	(1)
Krypton	131	(20)
Total Cross Sections in Kr	132	(1)
Modified Effective Range Theory (MERT)	133	(7)
Momentum Transfer Cross Sections in Kr	140	(2)
Elastic and Differential Cross Sections in Kr	142	(3)
Total Excitation Cross Sections in Kr	145	(3)
Ionization Cross Sections in Kr	148	(3)
Verification of the Sigma Rule for Kr	151	(1)
Neon	151	(19)
Total Cross Sections in Ne	152	(3)
Momentum Transfer Cross Sections in Ne	155	(2)
Elastic and Differential Cross Sections in Ne	157	(4)
Total Excitation Cross Sections in Ne	161	(4)
Ionization Cross Sections in Ne	165	(4)
Verification of the Sigma Rule for Ne	169	(1)
Xenon	170	(15)
Total Cross Sections in Xe	171	(1)
Momentum Transfer Cross Sections in Xe	172	(4)
Elastic and Differential Cross Sections in Xe	176	(1)
Total Excitation Cross Sections in Xe	176	(5)
Ionization Cross Sections in Xe	181	(2)
Verification of the Sigma Rule for Xe	183	(2)
Concluding Remarks	185	(8)
References	186	(7)
Data on Cross Sections---II. Diatomic Gases	193	(74)
Carbon Monoxide (CO)	193	(18)
Total Cross Sections in CO	195	(3)
Momentum Transfer Cross Sections in CO	198	(1)
Elastic Scattering Cross Sections in CO	199	(1)
Rotational and Vibrational Cross Sections in CO	199	(4)
Electronic Excitation Cross Sections in CO	203	(5)
Ionization Cross Sections in CO	208	(3)
Verification of the Sigma Rule for CO	211	(1)
Molecular Hydrogen (H2)	211	(14)
Total Cross Sections in H2	212	(4)
Elastic Scattering Cross Sections in H2	216	(1)
Momentum Transfer Cross Sections in H2	216	(2)
Ro-Vibrational Cross Sections in H2	218	(3)
Electronic Excitation Cross Sections in H2	221	(1)
Ionization Cross Sections in H2	222	(2)
Sigma Rule for H2	224	(1)
Molecular Nitrogen	225	(13)
Total Cross Sections in N2	226	(3)
Momentum Transfer Cross Sections in N2	229	(1)
Elestic Scattering Cross Sections in N2	230	(1)
Ro-Vibrational Excitation in N2	230	(2)
Electronic Excitation Cross Sections in N2	232	(4)
Ionization Cross Sections in N2	236	(1)
Sigma Rule for N2	237	(1)
Molecular Oxygen (O2)	238	(12)
Total Scattering Cross Sections in O2	238	(2)
Momentum Transfer Cross Sections in O2	240	(1)
Elastic Scattering Cross Sections in O2	241	(2)
Ro-Vibrational Excitation Cross Sections in O2	243	(2)
Electronic Excitation Cross Sections in O2	245	(1)
Dissociation Cross Sections in O2	246	(3)
Ionization Cross Sections in O2	249	(1)
Sigma Rule in O2	250	(1)
Nitric Oxide (NO)	250	(6)
Total Scattering Cross Sections (NO)	251	(2)
Momentum Transfer and Elastic Scattering in NO	253	(1)
Electronic Excitation Cross Sections in NO	253	(1)
Ionization Cross Sections in NO	254	(2)
Sigma Rule Verification for NO	256	(1)
Closing Remarks	256	(11)
References	259	(8)
Data on Cross Sections---III. Industrial Gases	267	(62)
Carbon Dioxide (CO2)	267	(12)
Total Scattering Cross Sections in CO2	267	(3)
Elastic and Momentum Transfer Cross Sections in CO2	270	(2)
Ro-Vibrational Excitation Cross Sections in CO2	272	(3)
Electronic Excitation Cross Sections in CO2	275	(3)
Ionization Cross Sections in CO2	278	(1)
Sigma Check for CO2	279	(1)
Hydrocarbon Gases CxHy	279	(4)
Total Scattering Cross Sections in CxHy	280	(1)
Methane (CH4)	281	(1)
Other Hydrocarbons	281	(1)
Inelastic Scattering Cross Sections in CxHy	282	(1)
Vibrational Excitation Cross Sections	282	(1)
Excitation Cross Sections	282	(1)
Mercury Vapor	283	(3)
Nitrous Oxide (N2O)	286	(4)
Ozone (O3)	290	(3)
Silane (SiH4)	293	(1)
Sulfur Hexafluoride (SF6)	293	(12)
Total Scattering Cross Section in SF6	296	(2)
Momentum Transfer Cross Sections in SF6	298	(2)
Elastic and Differential Cross Sections in SF6	300	(1)
Vibrational Excitation Cross Sections in SF6	300	(3)
Electronic Excitation Cross Sections in SF6	303	(1)
Ionization Cross Sections in SF6	304	(1)
Water Vapor (H2O)	305	(3)
Plasma Processing Gases	308	(7)
Tetrafluoromethane (CF4)	308	(2)
Perfluoroethane (C2F6)	310	(2)
Perfluoropropane (C3F8)	312	(1)
Dichlorodifluoromethane (CCI2F2)	313	(2)
Other Gases	315	(1)
Ammonia (NH3)	315	(1)
Disilane (Si2H6)	315	(1)
Germane (GeH4)	315	(1)
Hexafluoropropene (C3F6)	315	(1)
Hydrogen Sulphide (H2S)	315	(1)
Nitrogen Dioxide (NO2)	315	(1)
Sulphur Dioxide (SO2)	315	(1)
Tetrachlorogermane (GeCl4)	315	(1)
Uranium Fluoride (UF6)	315	(1)
Concluding Remarks	316	(13)
References	318	(11)
Drift and Diffusion of Electrons---I	329	(78)
Definitions	329	(1)
Drift and Diffusion Measurement	330	(4)
Electron Energy Distribution	334	(3)
Approximate Methods	337	(2)
Data on Drift and Diffusion	339	(68)
Air (Dry and Humid)	339	(2)
Argon	341	(9)
Carbon Dioxide (CO2)	350	(4)
Carbon Monoxide (CO)	354	(3)
Helium (He)	357	(5)
Hydrogen (H2) and Deuterium (D2)	362	(9)
Krypton (Kr)	371	(2)
Metallic Vapors	373	(1)
Cesium (Cs)	373	(3)
Mercury (Hg)	376	(4)
Sodium (Na) and Thallium (Tl)	380	(1)
Neon (Ne)	381	(3)
Nitrogen (N2)	384	(9)
Oxygen (O2)	393	(4)
Xenon (Xe)	397	(2)
References	399	(8)
Drift and Diffusion of Electrons---II. Complex Molecules	407	(46)
Current Pulse Due to Avalanche	407	(7)
Electron Current (Integrating Mode)	410	(1)
Electron Current (Differential Mode)	411	(3)
Ion Current (Differential Mode)	414	(1)
Arrival Time Spectrum Method	414	(2)
Hydrocarbon Gases	416	(7)
Methane (CH4)	418	(3)
Ethane (C2H6)	421	(2)
Selected Hydrocarbons	423	(1)
Nitrogen Compounds	423	(3)
Ammonia	424	(2)
NO, N2O, and NO2	426	(1)
Plasma Industrial Gases	426	(8)
Trifluoromethane (CHF3)	426	(4)
Tetrafluoromethane (CF4)	430	(2)
Dichlorodifluoromethane (CCI2F2)	432	(1)
Hexafluoroethane (C2F6)	432	(1)
Perfluoropropane (C3F8)	432	(1)
Silane (SiH4)	433	(1)
Sulfur Hexafluoride (SF6)	434	(4)
Water Vapor (H2O and D2O)	438	(2)
Miscellaneous Gases	440	(3)
Halogens	440	(1)
Fluorine (F2)	440	(2)
Chlorine (Cl2)	442	(1)
Bromine (Br2)	443	(1)
Iodine (I2)	443	(1)
Concluding Remarks	443	(10)
References	447	(6)
Ionization Coefficients---I. Nonelectron-Attaching Gases	453	(42)
Discharge Development	453	(1)
Current Growth in Uniform Fields	453	(5)
Measurement of α and γ	456	(1)
Ionization Chamber	456	(1)
Vacuum System	457	(1)
Gas Handling System	458	(1)
Irradiation System	458	(1)
Voltage and Current Measurement	458	(1)
Functional Dependence of a/N on E/N	458	(3)
Space Charge Effects	461	(4)
Breakdown in Uniform Fields	465	(5)
Multiplication in Nonuniform Fields	470	(4)
Electric Field along the Axis of Confocal Paraboloids	472	(1)
Radial Electric Field in a Coaxial Cylindrical Geometry	472	(2)
Concentric Sphere--Hemisphere	474	(1)
Sphere-Plane	474	(1)
Sphere-Sphere	474	(1)
Recombination	474	(1)
Data on Ionization Coefficients	475	(5)
Rare Gases	475	(1)
Argon (Ar)	475	(2)
Helium (He)	477	(1)
Krypton (Kr)	478	(1)
Neon (Ne)	478	(1)
Xenon (Xe)	478	(2)
Molecular Gases (Nonattaching)	480	(5)
Hydrocarbon Gases	480	(1)
Methane (CH4)	480	(1)
Other Hydrocarbons	480	(2)
Hydrogen and Nitrogen	482	(1)
Hydrogen (H2)	482	(2)
Deuterium (D2)	484	(1)
Nitrogen (N2)	484	(1)
Other Gases (Nonattaching)	485	(10)
Mercury Vapor	485	(2)
Tetraethoxysilane	487	(1)
References	487	(8)
Ionization and Attachment Coefficients---II. Electron-Attaching Gases	495	(48)
Attachment Processes	495	(1)
Current Growth in Attaching Gases	496	(4)
Ionization and Attachment Coefficients	500	(36)
Dry and Humid Air	500	(3)
Carbon Dioxide and Carbon Monoxide	503	(1)
Carbon Dioxide (CO2)	503	(1)
Carbon Monoxide (CO)	504	(2)
Freon--12 (CCI2F2)	506	(1)
Halogens	507	(1)
Fluorine (F2)	508	(1)
Chlorine (CI2)	509	(1)
Bromine (Br2)	510	(3)
Iodine (I2)	513	(1)
Nitrogen Compounds	513	(1)
Ammonia (NH3)	514	(1)
Nitric Oxide (NO)	515	(3)
Nitrous Oxide (N2O)	518	(2)
Nitrogen Dioxide and Sulfur Dioxide (NO2 and SO2)	520	(4)
Oxygen (O2)	524	(2)
Sulfur Hexafluoride (SF6)	526	(8)
Selected Industrial Gases	534	(2)
Concluding Remarks	536	(7)
References	536	(7)
High Voltage Phenomena	543	(34)
Types of Voltage	543	(1)
High Direct Voltage Generation	544	(3)
High Alternating Voltage Generation	547	(1)
High Impulse Voltage Generation	548	(4)
Ionization in Alternating Fields	552	(2)
Sparking Voltages	554	(23)
Atmospheric Air	555	(1)
Direct Voltages	555	(2)
Alternating Voltages	557	(1)
Lightning Impulse Voltages	558	(2)
Switching Impulse Voltages	560	(3)
Sulphur Hexafluoride (SF6)	563	(1)
Breakdown Voltage	563	(3)
Particle-Initiated Breakdown	566	(3)
Volt-Time Characteristics	569	(4)
References	573	(4)
Ionization in E x B Fields	577	(38)
List of Symbols	577	(2)
Brief Historical Note	579	(1)
Electron Motion in Vacuum in E x B Fields	580	(2)
Effective Reduced Electric Field (EREF)	582	(3)
Experimental Setup	585	(1)
Ionization Coefficients	585	(3)
Experimental Data	588	(8)
Air	588	(2)
Argon	590	(1)
Hydrogen	591	(1)
Nitrogen	592	(3)
Oxygen	595	(1)
Secondary Ionization Coefficient	596	(2)
Sparking Potentials	598	(4)
Uniform Electric Fields	598	(3)
Nonuniform Electric Fields	601	(1)
Time Lags in E x B Crossed Fields	602	(5)
Computational Methods	607	(3)
Effective Collision Frequency	610	(2)
Concluding Remarks	612	(3)
References	612	(3)
High Frequency Discharges	615	(26)
Basic Plasma Phenomena	615	(3)
Debye Length	618	(1)
Bohm Sheath Model	619	(1)
Plasma Frequency	620	(2)
Plasma Conductivity	622	(1)
Ambipolar Diffusion	622	(1)
RF Plasma	622	(5)
Experimental Studies	624	(3)
Power Absorbed	627	(5)
Glow Region	628	(1)
Sheath--Glow Boundary	628	(1)
Sheath	629	(1)
Discussion	630	(2)
Microwave Breakdown	632	(4)
Laser Breakdown	636	(2)
Concluding Remarks	638	(3)
References	638	(3)
Appendix 1	641	(2)
Appendix 2	643	(12)
Appendix 3	655	(2)
Appendix 4	657	(4)
Appendix 5	661	(2)
Appendix 6	663	(2)
Appendix 7	665	(2)
Index	667