Impurities in Semiconductors : Solubility, Migration and Interactions

by Fistul, Victor I.

• ISBN13: 9780203299258
• ISBN10: 0203299256
• Copyright: 2004-01-27
• Publisher: Taylor & Francis

Summary

This text explores the behavior of impurity atoms in semiconductors, integrating experimental data with their theoretical interpretation. It begins by explaining the basic physics of hydrogen-like impurities, atoms with partially filled electron shells, and amphoteric, isovalent, and gas-forming impurities to explain the properties imparted by these impurities. The author also analyzes the macroscopic and microscopic mechanisms of the solubility and migration of impurities and defects in the crystal lattice. Impurities in Semiconductors brings to light work done in the former Soviet Union and highlights several impurities that have potential, but have not yet found widespread application.

Table of Contents

The Semiconductor Impurity System

The Semiconductor Crystal as a Thermodynamic System

Thermodynamic Descriptions of Impurity Solubility

General Characteristics of Impurity Centers

References

Impurity Behavior in Semiconductors

Hydrogen-Like Impurities

Impurities with Partly Filled Electron Shells (d- and f-Impurities)

Amphoteric Impurities

Isovalent Impurities

Volatile Impurities

Impurity Solubility in Semiconductors

Retrograde Solubility of Impurities

Solubility of Hydrogen-Like Impurity Atoms in Germanium and Silicon

Hydrogen-Like Impurity Solubility in AIII BV Compounds

Solubility of Deep Impurities

Solubility of Amphoteric Impurities

Microscopic Analysis of Impurity Solubility in Semiconductors

Dissolution Enthalpy Calculation by Weisserís Method

Dissolution Enthaply in the Pseudo-Alloy Model

Solubility of Interstitial f-Atoms in Silicon

On Solubility Theory for Semiconductor Compounds

Charge Interaction

Potential Interaction

Defect Interaction in Regular Approximation

Interaction Leading to Complexation

Defect Ionization in Solids

Association of Impurity Atoms

Ion Pairs

Polytropic Impurities

Complexation Thermodynamics in a Semiconductor Compound

Impurity-Vacancy Complexes in AIII B V Compounds

Impurity-Vacancy Complexes in Silicon

Impurity Syneresis

Combined Complexation

Indirect Ion-Ion Interaction

Applied Aspects of Complexation

Impurity Kinetics in Semiconductors

Impurity Migration Energy

Microscopic Theory of Impurity Kinetics

Dissociative Diffusion of Impurities

Kinetic Effects in Subsurface Layers

Diffusion Profiles of Interacting Impurities

Impurity Migration in the Formation of Mobile Complexes

Diatomic Complexes: Formation and Decomposition

Diffusion Model for Mobile Complexes

Solution of Diffusion Equations for Various Boundary Conditions

Diffusion Theory Versus Experiment

References

Subject Index

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