Introduction to Scanning... | Buy

The two volumes LNAI 2773 and LNAI 2774 constitute the refereed proceedings of the 7th International Conference on Knowledge-Based Intelligent Information and Engineering Systems, KES 2003, held in Oxford, UK in September 2003. The 390 revised papers and poster papers presented were carefully reviewed and selected from numerous submissions. Among the areas covered are knowledge-based systems, neural computing, fuzzy logic, uncertainty, machine learning, soft computing, agent systems, intelligent agents, data mining, knowledge discovery, hybrid intelligent systems, natural language processing, information retrieval, Web applications, case-based reasoning, evolutionary computing, signal processing, ontologies, decision making, human-computer interaction, intelligent user interfaces, neuroscience, intelligent agents, biocomputing, etc.

Abbreviations

ix

(2)

Preface

xi

1. Why STEM?--STEM versus TEM

1

(10)

Introduction

1

(3)

Image formation

4

(1)

Beam convergence

4

(1)

Diffraction patterns

4

(1)

Instrument geometry

5

(1)

Applications of STEM

5

(4)

High resolution analysis

5

(1)

High resolution imaging

6

(2)

Analysis of biological macromolecules

8

(1)

How to use this book

9

(1)

References

9

(2)

2. STEM optics

11

(16)

Introduction

11

(1)

Field emission gun (FEG)

12

(4)

Gun lens (GL)

14

(1)

Gun alignment

15

(1)

Differential pumping apertures (DPAs)

15

(1)

Virtual objective aperture (VOA)

15

(1)

Beam blanking

16

(1)

Pre-specimen optics

16

(3)

Condenser alignment and stigmator

16

(1)

Condenser lenses (C1, C2)

17

(1)

Scan coils

18

(1)

Objective alignment

18

(1)

Selected area diffraction (SAD) aperture

19

(1)

Objective lens region

19

(3)

Objective/condenser stigmator

19

(1)

Objective lens (OL)

20

(1)

Objective aperture

21

(1)

Specimen holder

21

(1)

Post-specimen optics and detectors

22

(3)

Secondary electron detector

22

(1)

Post-specimen alignment coils

23

(1)

Post-specimen lenses

23

(1)

Annular dark field (ADF) detector

23

(1)

Diffraction pattern observation screen (DPOS)

24

(1)

Collector aperture

24

(1)

Bright field (BF) detector

25

(1)

X-ray and energy loss spectrometers

25

(1)

Summary

26

(1)

3. The specimen

27

(10)

Geometry

27

(3)

Introduction

27

(1)

X-ray detectors

27

(2)

Specimen preparation

29

(1)

Tilting possibilities

30

(3)

Airlock

33

(1)

Contamination

34

(1)

Beam damage

35

(2)

4. Imaging in the STEM

37

(18)

Introduction

37

(1)

General discussion of probe forming

38

(3)

A few numbers and formulae (facts and figures)

39

(2)

Processes in image formation

41

(2)

STEM detectors

41

(2)

Some typical images from a STEM

43

(4)

Bright field STEM images

43

(1)

Annular dark field STEM images

43

(3)

Secondary electron and Auger images

46

(1)

Resolution

47

(4)

Introduction

47

(1)

Defining resolution

47

(1)

Limits to resolution

48

(2)

Scattering inside specimens

50

(1)

Atomic number contrast

50

(1)

Thickness effects

50

(1)

Comparisons with CTEM

51

(1)

Relationships with diffraction

52

(1)

A few more numbers

53

(1)

References

54

(1)

5. Diffraction in the STEM

55

(14)

Introduction

55

(2)

Lens effects

55

(1)

Reciprocity

56

(1)

Selected area diffraction

57

(5)

TEM image magnification

57

(1)

Selected area diffraction in TEM

58

(1)

Selected area diffraction in STEM

58

(3)

Post-specimen compression

61

(1)

Other types of diffraction pattern

62

(3)

Convergent beam electron diffraction (CBED)

62

(2)

Microdiffraction

64

(1)

High resolution STEM imaging

65

(2)

Limits to diffraction

67

(1)

Summary

68

(1)

6. Microanalysis in the STEM

69

(22)

Introduction

69

(1)

Energy dispersive X-ray microanalysis in the STEM

70

(2)

EDXS detectors

70

(1)

X-ray detector windows

71

(1)

Windowless detectors

72

(1)

EDXS spectrum details

72

(3)

Escape peaks

74

(1)

Sum peaks

75

(1)

Coherent bremsstrahlung (CB)

75

(1)

Quantitative X-ray microanalysis

75

(2)

Cliff-Lorimer thin film method

75

(1)

Hall method

76

(1)

X-ray absorption

76

(1)

Limits of EDXS analysis

77

(3)

Light element analysis

79

(1)

Energy resolution

79

(1)

Dead-time

80

(1)

Electron energy-loss spectroscopy

80

(1)

Energy loss spectrometers

81

(3)

Interfacing to the microscope

82

(1)

Data collection systems

83

(1)

Energy transitions

84

(2)

Details of the energy loss spectrum

86

(3)

Near-edge structure

87

(1)

Extended fine structure

88

(1)

Specimen thickness effects

89

(1)

Detection limits

89

(1)

Analytical strategy

90

(1)

Conclusion

90

(1)

7. Mapping in the STEM

91

(6)

Introduction

91

(1)

X-ray mapping (including linescans)

91

(4)

Digital mapping

92

(2)

Digital linescans

94

(1)

High-angle annular dark-field imaging (HAADFI)

95

(2)

8. Limits to STEM and advanced STEM

97

(8)

Limits to microprobe analysis

97

(1)

Developments of the FEG

98

(1)

Spherical aberration

99

(1)

Operation of the STEM

100

(1)

Spectrum imaging

100

(1)

Beam damage and drilling holes

101

(4)

Appendices

105

(6)

Appendix A: Glossary

105

(4)

Appendix B: Further reading

109

(2)

Index

111

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