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9780735408760

ION Implantation Technology 2010: 18th International Conference on Ion Implantation Technology IIT 2010, Kyoto, Japan 6-11 June 2011

by ; ; ;
  • ISBN13:

    9780735408760

  • ISBN10:

    0735408769

  • Format: Hardcover
  • Copyright: 2011-01-24
  • Publisher: Amer Inst of Physics

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Summary

The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.

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