The Materials Science of Semiconductors

by Rockett, Angus

• ISBN13: 9780387256535
• ISBN10: 0387256539
• Edition: 1st
• Format: Hardcover
• Copyright: 2007-12-01
• Publisher: Springer Verlag

Summary

The Materials Science of Semiconductors serves as a general textbook on semiconductors, and discusses semiconductors in detail, from the fundamental basis for their electronic structure to engineering of alloys and the effects of defects. Written for graduate and advanced undergraduate students in the hard sciences, this book covers the materials science of semiconductors rather than focusing on electronic devices as a primary topic.

Author Biography

Angus Rockett is a Professor of Materials Science and Engineering at the University of Illinois at Urbana-Champaign. He is a fellow of the AVS and teaches short courses and tuitorials for the AVS, MRS and IEEE. He has in excess of 120 published journal articles and conference proceedings and has conducted research in a wide variety of thin film and electronic materials topics. He received a B.S. in Physics from Brown University in 1980 and a Ph.D. from the University of Illinois in Materials Science in 1986. He has been a visiting scientist at the Uppsala University in Sweden, the Hahn Meitner Institute in Berlin, Germany and has served as a senior program administrator at the U.S. Department of Energy in Germantown, Maryland.

Table of Contents

Preface	p. VII
Objectives	p. vii
Topics and use of the book	p. viii
Acknowledgements	p. ix
An Environment of Challenges	p. 1
Overview	p. 1
A history of modern electronic devices	p. 2
An issue of scale	p. 7
Defining electronic materials	p. 11
Purity	p. 13
Performance	p. 14
Summary points	p. 17
Homework problems	p. 18
Suggested readings & references	p. 19
The Physics of Solids	p. 21
Electronic band structures of solids	p. 21
Free electrons in solids	p. 23
Free electrons in a periodic potential	p. 24
Nearly free electrons	p. 25
Energy vs. momentum in 3d	p. 28
Electrons and holes	p. 32
Direct and indirect semiconductors	p. 35
Effective mass	p. 37
Density of states	p. 38
Intrinsic and extrinsic semiconductors	p. 40
Intrinsic semiconductors	p. 40
Extrinsic semiconductors	p. 42
Properties and the band structure	p. 44
Resistance, capacitance, and inductance	p. 44
Optical properties	p. 53
Thermal properties	p. 54
Quantum wells and confined carriers	p. 59
Summary points	p. 67
Homework	p. 69
Suggested readings & references	p. 71
Overview of Electronic Devices	p. 73
Diffusion and drift of carriers	p. 74
Chemical potential	p. 74
Carrier motion in a chemical potential gradient	p. 74
Simple diodes	p. 75
The junction contact potential	p. 77
Biased junctions	p. 81
Non-ideal diode behaviors	p. 88
Schottky barriers and ohmic contacts	p. 96
Ideal metal/semiconductor junctions	p. 96
Real schottky diodes	p. 101
Semiconductor heterojunctions	p. 102
Heterojunctions at equilibrium	p. 103
Heterojunctions as diodes	p. 109
Transistors	p. 111
Bipolar junction transistors	p. 111
Field-effect transistors	p. 114
Light-emitting devices	p. 119
Light-emitting diodes	p. 120
Laser diodes	p. 124
Summary	p. 134
Homework problems	p. 136
Suggested readings & references	p. 139
Aspects of Materials Science	p. 141
Structures of materials	p. 141
Crystal lattices	p. 142
The reciprocal lattice	p. 148
Basic thermodynamics of materials	p. 151
Phase diagrams	p. 155
Kinetics	p. 163
Reaction kinetics	p. 164
Nucleation	p. 166
Atomic transport	p. 170
Organic molecules	p. 172
Applications	p. 178
A basis for phase transformations	p. 178
Silicon crystal fabrication	p. 180
Rapid thermal processing	p. 187
Summary points	p. 189
Homework	p. 191
Suggested Readings and References	p. 194
Engineering Electronic Structure	p. 195
Linking atomic orbitals to bands	p. 196
Homopolar semiconductors	p. 197
Heteropolar compounds	p. 201
LCAO: from atomic orbitals to bands	p. 206
Common semiconductor energy bands	p. 215
Pressure and temperature dependence	p. 223
Applications	p. 226
Experimental band structures	p. 226
Gunn diodes	p. 228
Summary points	p. 232
Homework	p. 233
Suggested readings & references	p. 235
Semiconductor Alloys	p. 237
Alloy selection	p. 238
Overview	p. 238
Choosing alloy constituents	p. 241
Semiconductor alloy thermodynamics	p. 245
Regular solution theory revisited	p. 245
Ternary and quaternary solutions	p. 249
More mechanisms for alloy ordering	p. 252
Band gap bowing	p. 255
Binary and pseudobinary alloys	p. 255
Bowing in quaternary alloys	p. 260
Silicon-germanium alloys	p. 261
Structure and solubility	p. 262
Band gap engineering	p. 264
Alloying and carrier mobility	p. 267
Metastable semiconductor alloys	p. 268
Applications	p. 272
Heterojunction bipolar transistors	p. 272
Solar cells	p. 276
Summary points	p. 280
Homework	p. 282
Suggested readings & references	p. 285
Defects in Semiconductors	p. 289
Point defects	p. 289
Electronic states due to point defects	p. 291
Shallow levels	p. 295
Depth of intrinsic defects	p. 299
Ionization of defects	p. 300
Point defect densities	p. 302
Vacancies and dopant diffusivity	p. 308
Line defects	p. 311
Strain relief in heterostructures	p. 320
Energetics of strain relief	p. 322
Misfit dislocations	p. 328
Dislocation dynamics	p. 329
Reducing problems due to strain relief	p. 336
Planar and volume defects	p. 337
Twins and stacking faults	p. 337
Surfaces, interfaces, grain boundaries	p. 340
Volume defects	p. 343
SiC: a case study in stacking faults	p. 344
Summary points	p. 349
Homework	p. 352
Suggested readings & references	p. 355
Amorphous Semiconductors	p. 357
Structure and bonding	p. 358
Hydrogenated amorphous Si	p. 364
Deposition methods for a-Si	p. 366
Electronic properties	p. 367
Carrier transport and mobility	p. 367
Mobility measurements	p. 370
Doping	p. 372
Short-range order	p. 373
Optical properties	p. 374
Amorphous semiconductor Alloys	p. 377
Applications	p. 380
Thin film transistors	p. 380
Solar cells	p. 383
Summary points	p. 389
Homework	p. 391
Suggested readings and references	p. 392
Organic Semiconductors	p. 395
Materials overview	p. 395
Conjugated organic materials	p. 396
Ionized organic molecular structures	p. 403
Overview of organic devices	p. 407
Light emitting devices	p. 408
Transistors	p. 411
Molecular optoelectronic materials	p. 414
Molecular electron transporters	p. 415
Molecular hole transporters	p. 417
Dye molecules	p. 420
Molecules for thin film transistors	p. 427
Polymer optoelectronic organics	p. 428
Polymers for organic light emitting devices	p. 429
Polymers for transistors	p. 434
Contact to organic materials	p. 436
The cathode contact	p. 436
The anode contact	p. 439
Defects in organic materials	p. 440
Patterning organic materials	p. 442
Summary points	p. 446
Homework	p. 448
Suggested readings & references	p. 450
Thin Film Growth Processes	p. 455
Growth processes	p. 455
Gas phase transport	p. 460
Adsorption	p. 461
Desorption	p. 464
Sticking coefficient & surface coverage	p. 466
Nucleation & growth of thin films	p. 468
Surface diffusion	p. 474
Surface energy	p. 477
Morphology determined by nucleation	p. 481
Microstructure evolution	p. 484
Residual stress and adhesion	p. 485
Applications	p. 488
Adsorption, desorption and binding of H to Si	p. 488
Surface processes in GaAs epitaxial growth	p. 491
Summary points	p. 496
Homework problems	p. 499
Suggested readings & references	p. 502
Physical Vapor Deposition	p. 505
Evaporation	p. 505
Basic system geometries	p. 506
Sources	p. 508
Vapor pressure	p. 516
Monitoring deposition rates	p. 517
Simple rate monitoring methods	p. 518
Reflection high-energy electron diffraction	p. 520
Sputtering	p. 526
Sputtering yield	p. 527
Energetic particles	p. 533
Sputtering systems	p. 539
Glow discharge basics	p. 542
Fast particle modification of films	p. 553
Application	p. 560
Summary points	p. 564
Homework problems	p. 567
Suggested readings & references	p. 570
Chemical Vapor Deposition	p. 573
Overview	p. 574
CVD apparatus	p. 578
Gas flow in CVD reactors	p. 581
Reactant selection and design	p. 584
Stimulated CVD	p. 587
Selective CVD	p. 591
Atomic layer deposition	p. 594
Sample CVD and ALD processes	p. 597
Summary points	p. 604
Homework problems	p. 606
Suggested readings & references	p. 608
Appendix	p. 611
Useful constants	p. 611
Units	p. 612
Unit conversions	p. 612
Index	p. 615
Table of Contents provided by Ingram. All Rights Reserved.