MEMS and NEMS: Systems, Devices, and Structures

by Lyshevski; Sergey Edward

• ISBN13: 9780849312625
• ISBN10: 0849312620
• Edition: 1st
• Format: Hardcover
• Copyright: 2002-01-18
• Publisher: CRC Press

Summary

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Table of Contents

Overview and Introduction	1	(10)
New Trends in Engineering and Science: Micro- and Nanoscale Systems	11	(46)
Introduction to Design of MEMS and NEMS	11	(4)
Biological and Biosystems Analogies	15	(3)
Overview of Nano- and Microelectromechanical Systems	18	(7)
Applications of Micro- and Nanoelectromechanical Systems	25	(7)
Micro- and Nanoelectromechanical Systems	32	(10)
Microelectromechanical Systems, Devices, and Structures Definitions	34	(1)
Microfabrication: Introduction	35	(7)
Synergetic Paradigms in MEMS	42	(3)
MEMS and NEMS Architectures	45	(12)
References	56	(1)
Fundamentals of MEMS Fabrication	57	(52)
Introduction and Description of Basic Processes	57	(11)
Microfabrication and Micromachining of ICs, Microstructures, and Microdevices	68	(10)
MEMS Fabrication Technologies	78	(31)
Bulk Micromachining	84	(5)
Surface Micromachining	89	(13)
High-Aspect-Ratio (LIGA and LIGA-Like) Technology	102	(4)
References	106	(3)
Devising and Synthesis of MEMS and NEMS	109	(28)
MEMS Motion Microdevices Classifier and Synthesis	109	(22)
Microelectromechanical Microdevices	121	(7)
Synthesis and Classification Solver	128	(3)
Nanoelectromechanical Systems	131	(6)
References	136	(1)
Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures	137	(176)
Introduction to Modeling, Analysis, and Simulation	137	(3)
Electromagnetics and Its Application for MEMS and NEMS	140	(39)
Basic Foundations in Model Developments of Micro- and Nanoactuators in Electromagnetic Fields	156	(5)
Lumped-Parameter Mathematical Models of MEMS	161	(11)
Direct-Current Microtransducers	172	(7)
Induction Micromachines	179	(34)
Two-Phase Induction Micromotors	180	(12)
Three-Phase Induction Micromotors	192	(21)
Synchronous Microtransducers	213	(28)
Single-Phase Reluctance Micromotors	214	(2)
Permanent-Magnet Synchronous Microtransducers	216	(25)
Microscale Permanent-Magnet Stepper Micromotors	241	(9)
Mathematical Model in the Machine Variables	242	(3)
Mathematical Models of Permanent-Magnet Stepper Micro-motors in the Rotor and Synchronous Reference Frames	245	(5)
Piezotransducers	250	(13)
Piezotransducers: Steady-State Models and Characteristics	253	(7)
Mathematical Models of Piezoactuators: Dynamics and Nonlinear Equations of Motion	260	(3)
Fundamentals of Modeling of Electromagnetic Radiating Energy Microdevices	263	(13)
Classical Mechanics and Its Application	276	(35)
Newtonian Mechanics	278	(14)
Lagrange Equations of Motion	292	(17)
Hamilton Equations of Motion	309	(2)
Thermoanalysis and Heat Equation	311	(2)
Nanosystems, Quantum Mechanics, and Mathematical Models	313	(32)
Atomic Structures and Quantum Mechanics	313	(10)
Molecular and Nanostructure Dynamics	323	(19)
Schrodinger Equation and Wavefunction Theory	324	(6)
Density Functional Theory	330	(4)
Nanostructures and Molecular Dynamics	334	(1)
Electromagnetic Fields and Their Quantization	335	(7)
Molecular Wires and Molecular Circuits	342	(3)
References	344	(1)
Control of Microelectromechanical Systems	345	(48)
Introduction to Microelectromechanical Systems Control	345	(1)
Lyapunov Stability Theory	346	(15)
Control of Microelectromechanical Systems	361	(14)
Proportional-Integral-Derivative Controllers	361	(1)
Tracking Control	362	(6)
Time-Optimal Control	368	(1)
Sliding Mode Control	369	(1)
Constrained Control of Nonlinear MEMS: Hamilton-Jacobi Method	369	(4)
Constrained Control of Nonlinear Uncertain MEMS: Lyapunov Method	373	(2)
Intelligent Control of MEMS	375	(13)
Hamilton-Jacobi Theory and Quantum Mechanics	388	(5)
References	391	(2)
Case Studies: Synthesis, Analysis, Fabrication, and Computer- Aided-Design of MEMS	393	(66)
Introduction	393	(1)
Design and Fabrication	394	(6)
Analysis of Translational Microtransducers	400	(3)
Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control	403	(2)
Three-Phase Synchronous Reluctance Micromotors	405	(5)
Microfabrication	410	(16)
Microcoils/Microwindings Fabrication Through the Copper, Nickel and Aluminum Electrodeposition	410	(11)
Nix%Fe100-x% Thin Films Electrodeposition	421	(3)
NiFeMo and NiCo Thin Films Electrodeposition	424	(1)
Micromachined Polymer Magnets	425	(1)
Planarization	426	(1)
Magnetization Dynamics of Thin Films	426	(2)
Microstructures and Microtransducers With Permanent Magnets: Micromirror Actuators	428	(15)
Reluctance Electromagnetic Micromotors	443	(5)
Micromachined Polycrystalline Silicon Carbide Micromotors	448	(3)
Axial Electromagentic Micromotors	451	(1)
Synergetic Computer-Aided Design of MEMS	452	(7)
References	456	(3)
Index	459