Micro and Nanosystems

by Lavan, D.; Mcnie, M.; Prasad, S.

• ISBN13: 9781558998261
• ISBN10: 1558998268
• Format: Hardcover
• Copyright: 2005-11-08
• Publisher: Cambridge Univ Pr

Summary

This volume focuses on (a) microsystems, including micromachines and microelectromechanical systems (MEMS), as well as micro-optical-electromechanical systems (MOEMS), and (b) nanosystems, also referred to as nanoelectromechanical systems (NEMS) or molecular machines, including devices that incorporate nanotubes, nanocantilevers, and molecular or atomic manipulators. A wide range of physical and chemical sensor applications have been addressed with these technologies and are outlined in the volume, including inertial, magnetic, environmental, chemical, and biological detection. The volume also provides an overall perspective on the technology required to leap from conventional micro- and nanosystems to bionanosystems, and to realize functional materials and systems for applications such as drug delivery. Additional highlights include a look at the application of focused ion beam milling in characterizing MEMS devices, which is becoming a conventional tool for this purpose. The electrodeposition of structures through high aspect ratio features in thick resists, which is a new and powerful trend in MEMS fabrication, is also examined. And surface and materials issues for reliability of MEMS devices are assessed and provide insight into how characterization schemes for evaluating MEMS reliability can be developed. Topics include: metrology and materials characterization; surfaces and interfaces; reliability and packaging; tribology; materials and mechanics; new materials and fabrication methodologies; RF and optical applications; micro- and nanofluidics; drug and protein delivery; actuators and BioMEMS; process and device modeling; materials and devices; MEMS and photonics; sensors and materials; nanosystems and devices; applied micro- and nanotechnology; self-assembled structures; and nanomaterials synthesis and applications.

Table of Contents

Modification of deposition process of piezoelectric polycrystalline film by hydrothermal method - improvement of the deposition process by pre-treatment using hydrogen peroxide	p. 3
Micromirror arrays for high temperature operation	p. 9
Anchoring of organic molecules on Cu(001) surface through S-headgroup	p. 17
In situ pretreatment approach for surface deterioration alleviation amidst thermal desorption of Si(100)	p. 23
Significance of surface topography on performance and lifetime of MEMS switches and relays	p. 29
Effects of hydrogen annealing process conditions on nano scale silicon (011) fins	p. 37
Detection of residual stress in silicon carbide MEMS by [mu]-Raman spectroscopy	p. 43
Strain transduction in conductor-modified polymers	p. 49
Characterization of Ti/TiN and TiN conductive layer for high temperature MEMS devices	p. 57
Exchange spring type magnet realized in FePt/Fe multilayers deposited by magnetron sputtering	p. 63
Fabrication of electrical nanocontacts to nanometer-sized materials and structures using a focused ion beam	p. 71
Through-wafer polysilicon interconnect fabrication with in situ boron dumping	p. 77
Low temperature MEMS manufacturing processes : plasma activated wafer bonding	p. 85
Spontaneous growth of nickel silicide nanowires and formation of self-assembled nanobridges by the metal induced growth method	p. 91
Self assembled monolayer methods in the fabrication of high-Tc superconductor SNS junction nano-devices	p. 97
Electrical and optical properties of self-assembled, ordered gold nanocrystal/silica thin films prepared by sol-gel processing	p. 103
Micro-molded high Q polymer resonators for optical loss determination	p. 111
Fine-tuning of the spectral collection efficiency in a multilayer junction through the LSP technique	p. 117
Mechanically tunable nanophotonic devices	p. 123
Micrometer scale silicon dioxide tunnels for on-chip fluidic sample delivery to nanometer-scale chemical sensors	p. 131
A fabrication of a novel microfluidic reactor microsynthesis of MIP's particles	p. 137
Oligonucleotide metallization for conductive bio-inorganic interfaces in self assembled nanoelectronics and nanosystems	p. 145
Efficient atomization using MHz MEMS-based ultrasonic nozzles	p. 149
Thin film silicon microbridges for DNA detection	p. 157
Fabrication and electromechanical properties of conductive polymer microbridge actuators	p. 163
Low-cost and chemical resistant microfluidic devices based on thermoplastic elastomers for a novel biosensor system	p. 169
Multi-layer photopolymer micromachining	p. 175
A novel latching relay fabricated using an oxide molded tungsten process	p. 189
Hot embossing lithography : release layer characterization by chemical force microscopy	p. 197
Carbohydrate-carbohydrate recognition promotes cell adhesion	p. 203
Fabrication and evaluation of conducting polymer nanowire heterostructures	p. 211
Composition influence on the properties of titanium-doped gamma iron oxide nanoparticles prepared by laser pyrolysis method	p. 217
A systematic study of the formation of nano-tips on silicon thin films by excimer laser irradiation	p. 225
Functionally engineered carbon nanotubes-peptide nucleic acid nanocomponents	p. 231
Investigation of electric characteristics of nanoscale composite A[superscript 1]B[superscript 5]C[superscript 6] semiconductors : experiment and numerical simulation	p. 235
Etching silicon through an effective nanomask : an electrochemical way to nanomachining	p. 241
An optical diffraction microphone with active grating diaphragm	p. 247
Fabrication of a bimodal ferromagnetic nanosystem in an etched silicon structure and its magnetic and magneto-optic characterization	p. 253
Nanocomposite thin film coatings for protection of materials surfaces	p. 259
Embedded piezoresistive microantilever sensors : materials for sensing chemical and biological analytes	p. 265
Interpretation of the phonon frequency shifts in ZnO quantum dots	p. 271
In vivo biostability of CVD silicon oxide and silicon nitride films	p. 279
In situ pretreatment approach for surface deterioration alleviation amidst thermal desorption of GaAs(100)	p. 285
Effect of dopants on the band structure of barium strontium titanate thin films	p. 291
Multi-band terahertz imaging system design	p. 299
A wide band gap boron-doped microcrystalline silicon film obtained with VHF glow discharge method	p. 305
Diode laser bonding of planar MEMS, MOEMS, and microfluidic devices	p. 309
Investigating narrow plasmons in nanoparticle arrays fabricated using electron beam lithography	p. 317
Microchannel arrays in borophosphosilicate glass for photonic device and optical sensor applications	p. 323
Development of humidity sensors using layer-by-layer nanoassembly of polypyrrole	p. 329
Stabilized Pd-alloy/AIN/Si hydrogen sensors	p. 337
Multi-technology measurements of amorphous carbon films	p. 345
Towards novel light-activated shape memory polymer : thermomechanical properties of photo-responsive polymers	p. 353
Surface modification and neural tissue culture of thin film electrode materials	p. 359
Atomic force microscopy probe with integrated loop and shielded leads for micromagnetic sensing	p. 365
Functionalization of microfluidic channels with in situ grown carbon nanotubes	p. 371
Growth, characterization and processing of VO[subscript 2] thin films for micro-switching devices	p. 377
Effects of substrate materials on the electrical behavior of Pd/AIN/semiconductor based hydrogen sensors	p. 383
Ultra-fine ZnO nanobelts and their photoluminescence emission	p. 389
Synthesis of nanoscale devices for neural electrophysiological imaging	p. 395
Anomalous temperature dependence of Fermi-edge singularity in modulation doped AlGaAs/InGaAs/GaAs heterostructures	p. 401
Composite contacts in microsystems : fabrication of metal-nanostructured titania nanocomposites	p. 407
Thermally stimulated electron emission from scratched metal surfaces	p. 413
Fabrication methods for improved electromechanical behavior in piezoelectric membranes	p. 419
Quantum sizing of power electronics : a trend towards miniaturization of power electronic systems and equipments	p. 425
In search of metallic nanowires on Si(001)	p. 431
Space charge limited current in porous silicon with traces of nitrogen dioxide	p. 437
Functional carbon nanotube substrates for tissue engineering applications	p. 443
Influence of growth parameters and annealing on properties of MBE grown GaAsSbN SQWs	p. 453
Critical process issues in the fabrication of a lateral, self-cleaning, MEMS switch	p. 463
Self organized InAs quantum dots on patterned GaAs substrates	p. 469
Colloidal crystal wires from directed assembly	p. 477
The performance of the gate electrode using Co thin films selectively deposited on SAMs patterns for a-Si TFT	p. 483
Surface electronic states and electrostatic attractive forces between metals or semiconductor and tribocharged polymers	p. 491
Chirality characterization of dispersed single wall carbon nanotubes	p. 497
Energetic neutral atom beam lithography/epitaxy for nanoscale device fabrication	p. 503
TiN/GaN metal/semiconductor multilayer nanocomposites grown by reactive pulsed laser deposition	p. 507
Zinc powder evaporation : an efficient way of synthesizing a wide range of high-quality ZnO nanostructures at lower temperature	p. 513
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