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9780071356367

Microchip Fabrication : A Practical Guide to Semiconductor Processing

by
  • ISBN13:

    9780071356367

  • ISBN10:

    0071356363

  • Edition: 4th
  • Format: Hardcover
  • Copyright: 2000-04-03
  • Publisher: MCG
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List Price: $65.00

Summary

Novice-friendly intro to semiconductor processing.

Table of Contents

Chapter 1: The Semiconductor Industry.

Chapter 2: Semiconductor Materials and Process Chemicals.

Chapter 3: Manufacturing Wafers.

Chapter 4: Overview of Wafer Fabrication.

Chapter 5: Contamincation Control.

Chapter 6: Process Yields.

Chapter 7: Oxidation.

Chapter 8: Basic Patterning - Surface Preparation to Exposure.

Chapter 9: Basic Patterning - Developing to Final Inspection.

Chapter 10: Advanced Photolithography Processes.

Chapter 11: Doping.

Chapter 12: Deposition.

Chapter 13: Metallization.

Chapter 14: Process and Device Evaluation.

Chapter 15: The Business of Wafer Fabrication.

Chapter 16: Semiconductor Devices and Integrated Circuit Formation.

Chapter 17: Integrated Circuit Types.

Chapter 18: Packaging.

Index.

Supplemental Materials

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