Microelectromechanical Systems - Materials and Devices IV

by Delrio, Frank W.; De Boer, Maarten P.; Eberl, Christoph; Gusev, Evgeni

• ISBN13: 9781605112763
• ISBN10: 1605112763
• Format: Hardcover
• Copyright: 2011-04-30
• Publisher: Cambridge Univ Pr

Summary

Symposium S, "Microelectromechanical Systems-Materials and Devices IV," held November 29-December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS/NEMS), technologies which were spawned from the fabrication and integration of small-scale mechanical, electrical, thermal, magnetic, fluidic, and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection, and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials, and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials, and biomaterials (ceramic, metallic, polymeric, composite based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology.

Table of Contents

Material Development and Optimization

Biodegradable microfluidic scaffolds with tunable degradation properties from amino alcohol-based poly(ester amide) elastomers

Measurements of resonance frequency of parylene microspring arrays using atomic force microscopy

Gold in flux-less bonding: noble or not noble

Giant piezoresistive variation of metal particles dispersed in PDMS matrix

Characterization of Group III-nitride based surface acoustic wave devices for high temperature applications

Transport model for microfluidic device for cell culture and tissue development

Refractive index memory effect of ferroelectric materials by domain control

Synthesis and control of ZnS nanodots and nanorods with different crystalline structure from an identical raw material solution and the excitonic UV emission

Improving PZT thin film texture through Pt metallization and seed layers

Process Integration

Patterning nanomaterials on fragile micromachined structures using electron beam lithography

Pt/TiO2 growth templates for enhanced PZT films and MEMS devices

Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210°C

PZT thick films for 100 MHz ultrasonic transducers fabricated using chemical solution deposition process

Reliability and stability of thin-film amorphous silicon MEMS on glass substrates

High yield polymer MEMS process for CMOS/MEMS integration

Characterization of textured PZT thin films prepared by sol-gel method onto stainless steel substrates

Micro- and Nanosensors

A picowatt energy harvester

Mechanical and material characterization of bilayer microcantilever-based IR detectors

Film conductivity controlled variation of the amplitude distribution of high-temperature resonators

Ultrafine silicon nano-wall hollow needles and applications in inclination sensor and gas transport

Development of a robust design for wet etched co-integrated pressure sensor systems

SU8/modified MWNT composite for piezoresistive sensor application

Thin film amorphous silicon bulk-mode disk resonators fabricated on glass substrates

Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite

Material and Device Reliability

Characterizing the effect of uniaxial strain on the surface roughness of Si nanowire MEMS-based microstructures

Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing

Characterisation of hydrophobic forces in liquid self assembly of micron sized functional building blocks

Nanoindentation characterization of PECVD silicon nitride on silicon subjected to mechanical fatigue loading

Effect of phosphorus doping on the Young's modulus and stress of polysilicon thin films

Residual stress in sputtered silicon oxycarbide thin films

Solid bridging during pattern collapse (stiction) studied on silicon nanoparticles

Fabrication and characterization of two compliant electrical contacts for MEMS: gallium microdroplets and carbon nanotube turfs

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