Micromanufacturing

by Ehmann, Kornel F.; Bourell, David; Culpepper, Martin L.; Hodgson, Thom J.; Kurfess, Thomas R.

• ISBN13: 9781402059483
• ISBN10: 1402059485
• Format: Hardcover
• Copyright: 2007-04-12
• Publisher: Springer Verlag

Summary

This international technology assessment study has focused on the emerging global trend toward the miniaturization of manufacturing processes, equipment and systems for microscale components and products, i.e., "Small Equipment for Small Parts". It encompasses the creation of miniaturized units or hybrid processes integrated with metrology, material handling and assembly to create microfactories capable of producing microprecision products in a fully automated manner at low cost. The study has investigated both the state-of-the-art as well as emerging technologies from the scientific, technological, and commercialization perspectives across key industrial sectors in the U.S., Asia and Europe including medical, electronics, aerospace, and consumer products. This study does NOT include the lithographic-based processes common to the microelectromechanical systems (MEMS) community. While the U.S. gets high marks for nanotechnology R&D, emphasis in the U.S. on micromanufacturing R&D is lagging behind the rest of the world, particularly in technology transfer and ongoing development. This will undoubtedly have serious long-term implications, since it is well-recognized that micromanufacturing will be a critical enabling technology in bridging the gap between nanoscience and technology developments and their realization in useful products and processes. While examples do exist where U.S. government programs are focused squarely on industry-university-government collaboration, the scale of efforts both in Asia and Europe is significantly larger. On this latter point, Europe appears to be very strong, particularly as these partnerships work to refine and fine-tune developments for industry adaptation and commercialization.

Table of Contents

Foreword	p. xi
Preface	p. xiii
List of Figures	p. xvii
List of Tables	p. xxi
Executive Summary	p. xxiii
Introduction
Background and Scope	p. 1
Methodology	p. 4
Overview of Report	p. 8
Format of Report	p. 9
Acknowledgements	p. 9
Design
Abstract	p. 11
The Approach Taken to Assess the State-of-the-Art in NLBMM Design	p. 12
Unique Requirements for the Design of NLBMM Parts, Processes and Equipment	p. 12
The Design Process and the Important Elements of Design of/for NLBMM Products	p. 15
The State-of-the-Art and Gaps between Existing and Required Capabilities	p. 18
Summary and Conclusions	p. 26
References	p. 27
Materials
Abstract	p. 29
Materials for Micromanufacturing	p. 29
Materials Issues in Micromanufacturing	p. 44
Summary and Conclusions	p. 50
References	p. 51
Processes
Abstract	p. 53
Micromanufacturing Processes and Equipment	p. 53
Micromanufacturing Issues	p. 80
Summary and Conclusions	p. 84
References	p. 85
Metrology, Sensors and Control
Abstract	p. 89
Introduction	p. 90
Summary and Conclusions	p. 108
References	p. 108
Non-lithography Applications
Abstract	p. 111
Applications of Non-lithography Machining	p. 113
Flexible Manufacturing and Desktop Manufacturing	p. 116
MEMS Foundry	p. 118
Summary	p. 119
References	p. 120
Business, Education, the Environment, and Other Issues
Abstract	p. 121
Business	p. 121
Education	p. 123
Environment	p. 125
Government Policies	p. 126
Appendices
Panelist Biographies	p. 131
Questionnaire for Site Visits	p. 136
Site Reports-Asia
National Institute of Advanced Industrial Science and Technology	p. 141
Asia Pacific Microsystems, Inc. (APM)	p. 146
FANUC, FA & Robot	p. 148
Hitachi Chemical R&D Center in Tsukuba	p. 153
ITRI - Mechanical Industry Research Laboratories (MIRL)	p. 156
ITRI - Nano Technology Research Center (NTRC)	p. 160
Instrument Technology Research Center (ITRC)	p. 163
Korean Advanced Institute of Science and Technology (KAIST)	p. 168
Korean Institute of Machinery and Materials (KIMM)	p. 175
Kyocera Corporation	p. 179
Kyoto University	p. 184
Matsuura Machinery Corporation	p. 187
Metal Industries Research and Development Centre (MIRDC)	p. 189
Mitsubishi Electric Corporation (MEC)	p. 193
Nagoya University - Center for Cooperative Research in Advanced Science and Technology	p. 198
Nagoya University - Laboratory of Structure and Morphology Control	p. 200
Nagoya University - Department of Micro System Engineering	p. 202
National Cheng Kung University	p. 207
National Science Council	p. 212
National Taiwan University	p. 215
Olympus Corporate R&D Center	p. 220
RIKEN (The Institute of Physical & Chemical Research)	p. 223
Samsung Electro Mechanics Corp., R&D Center	p. 228
Sankyo Seiki	p. 231
Sansyu Finetool Co., Ltd	p. 234
Seiko Instruments Inc. (SII)	p. 238
Seoul National University	p. 243
University of Electro Communications	p. 245
University of Tokyo	p. 248
I. I. S., The University of Tokyo	p. 251
Yonsei University	p. 255
Site Reports-Europe
Basel World	p. 260
Robert Bosch, GmbH	p. 264
École Polytechnique Fédérale de Lausanne (EPFL)	p. 267
Fraunhofer Institute - Manufacturing Engineering and Automation	p. 271
Fraunhofer Institute - Production Systems and Design Technology	p. 276
Fraunhofer Institute - Production and Laser Technology	p. 284
Fraunhofer Institute - Reliability and Microintegration	p. 296
Karlsruhe Research Center	p. 302
Klocke Nanotechnik	p. 307
Kugler GmbH	p. 313
Laser Zentrum Hannover e. V	p. 318
Institut für Mikrotechnik Mainz GmbH (IMM)	p. 322
Philips Center for Industrial Technology (CFT)	p. 329
Swiss Federal Institute of Technology - Zurich (ETHZ)	p. 333
Technical University of Eindhoven	p. 339
Carl Zeiss Industrielle Messtechnik, GmbH	p. 342
Zumtobel	p. 347
Glossary	p. 352
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