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9783527294282

Microoptics

by ;
  • ISBN13:

    9783527294282

  • ISBN10:

    3527294287

  • Format: Hardcover
  • Copyright: 1999-06-01
  • Publisher: Vch Verlagsgesellschaft Mbh
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List Price: $145.00

Summary

In the last few decades microoptics has become one of the fastest developing areas of optical research. New technologies for the fabrication of microoptical components have been adapted from Very Large Scale Integration processes. Parallel to passive microoptical components, optoelectronics research has lead to new miniaturised components which can be used as sources, detectors, or modulators for highly integrated optoelectronic systems. This book gives an overview over the field of 3D microoptics. It starts with an introduction to general aspects of microoptics such as its definition, and the performance and scaling behavior of optical components. Then it focuses on planar fabrication techniques for microoptical components and presents a variety of components and optoelectronic devices which can be produced by these techniques. The reader is lead to Array Optics and connected to hot topics such as Smart Pixels. The last third of the book presents applications which covers Optical Memories, Optical Interconnection Networks and Optical Computing. Advanced and research students as well as active scientists will find a text and reference book which leads them to the state of the art in the field of microoptics. Jürgen Jahns studied Physics. After he received his doctorate in 1978 he became a member of the Siemens technical staff in Munich. He worked on robotics, sensors and optical communications. 1986 he moved to AT&T Bell Labs where he worked on optical computing, optical interconnections, diffractive optics, and mircooptic packaging. Since 1994 he has been a Full Professor for Optical Communications and Information Processing at the University of Hagen, Germany. He is member of the editorial advisory board of "Optics Communications" and feature editor for special issues of the "Journal of the Optical Society of America A" and "Applied Optics". Stefan Sinzinger received his doctorate in Physics 1993. Then he worked at the NEC Research Institute in Princeton, NJ. Since 1994 he has been a research assistant at the University of Hagen, Germany.

Table of Contents

Preface 1(2)
Form macrooptics to microoptics --- an overview
3(12)
Optics technology
3(2)
Classification of optical hardware
5(1)
Optical functions and their implementation
6(4)
Scope of this book
10(1)
Organization of the book
10(2)
Further reading
12(1)
Acknowledgment
13(2)
Optical components with small dimensions
15(22)
Microlens performance
15(12)
Diffraction limit
15(2)
Aberrations
17(4)
Quality criteria for lens performance
21(6)
Scaling --- from macro- to micro-components
27(5)
Scaling of diffractive and refractive lenses
27(3)
Scaling of prisms
30(2)
Glossary
32(1)
List of symbols
33(1)
Exercises
34(3)
Lithographic fabrication technology
37(48)
Pattern generation
38(12)
Plotting and photoreduction
40(1)
Laser beam writing
40(2)
X-ray and e-beam writing
42(5)
Grey-level masks
47(3)
Special masks
50(1)
Coating or thin layer deposition
50(4)
Spin coating
51(1)
Physical vapour deposition (PVD)
51(3)
Chemical Vapour Deposition (CVD)
54(1)
Alignment and exposure
54(7)
Exposure geometry
55(2)
Light sources for mask lithography
57(1)
Illumination with x-ray (synchrotron) and proton radiation
58(1)
Multimask alignment
59(2)
Through-wafer alignment
61(1)
Pattern transfer
61(12)
Etching
63(5)
Laser micromachining --- laser initiated ablation
68(1)
Mechanical micromachining --- diamond turning of microoptical components
69(1)
Replication of microrelief structures
70(3)
Diffusion --- ion-exchange processes
73(1)
Bonding of planar structures
73(5)
Flip-chip bonding
74(2)
Thermo-anodic bonding
76(2)
Glossary
78(1)
List of new symbols
79(1)
Exercises
80(5)
Refractive microoptics
85(44)
Surface profile microlenses
86(18)
Melted photoresist lenses -- reflow lenses
86(7)
Microlens fabrication by mass transport mechanisms in semiconductors
93(1)
Microlenses formed by volume change of a substrate material
94(2)
Lithographically initiated volume growth in PMMA for microlens fabrication
96(3)
Dispensed or droplet microlenses
99(1)
Direct writing techniques for refractive microoptics
100(3)
Grey-scale lithography for ROE fabrication
103(1)
Gradient-index (GRIN) optics
104(11)
GRIN rod lenses
105(3)
Planar GRIN lenses
108(7)
Microprisms and micromirrors
115(6)
Lithography for the fabrication of microprisms
116(3)
Micromachining of microprisms using single point diamond turning or embossing
119(1)
Anisotropic etching of mirror structures in crystalline materials
119(2)
Glossary
121(1)
List of new symbols
122(1)
Exercises
123(6)
Diffractive microoptics
129(52)
Trading spatial resolution for reduced phase thickness
129(5)
Blazing and phase quantization
129(3)
Alternative quantization schemes for microlenses
132(2)
Examples of diffractive optical components
134(1)
Fabrication of diffractive optics
134(5)
Multimask processing for kinoform DOEs
135(2)
Fabrication errors for kinoform elements
137(2)
Modelling of diffractive optics
139(28)
Approaches to rigorous diffraction theory
140(3)
Thin and thick gratings
143(2)
Scalar diffraction theory
145(2)
Fresnel and Fraunhofer diffraction
147(1)
Linear kinoform grating
148(3)
Diffractive lenses
151(5)
Ray-tracing analysis of diffractive lenses
156(2)
Chromatic aberrations of diffractive lenses
158(1)
Detour-phase diffractive optical elements
158(3)
Polarisation-selective diffractive optical elements
161(1)
Holographic optical elements as thick Bragg gratings
161(5)
Effective medium theory of zero-order gratings
166(1)
Design of diffractive optical elements
167(5)
DOEs optimized for imaging along a tilted optical axis
167(2)
Iterative design techniques for DOEs
169(3)
Glossary
172(1)
List of new symbols
173(1)
Exercises
174(7)
Integrated waveguide optics
181(26)
Modes in optical waveguides
181(5)
Discrete waveguide modes
182(2)
Field distribution of the modes
184(2)
Waveguide couplers and beam splitters
186(6)
External coupling
186(3)
Coupling between waveguides
189(2)
3 dB couplers for beam splitting
191(1)
Branching waveguides
192(1)
Waveguide optical modulators
192(4)
The electro-optic effect
192(1)
The electro-optic phase modulator
193(1)
Polarisation modulator --- dynamic phase retarder
193(1)
Integrated intensity modulators
194(1)
Electro-optic directional couplers
195(1)
Applications of waveguide optics
196(6)
Waveguide optics in optical interconnects
196(3)
Waveguide optical sensors
199(3)
Glossary
202(1)
List of new symbols
203(1)
Exercises
204(3)
Microoptical systems
207(24)
Systems integration
208(7)
MOEMS for optical systems integration
208(3)
Stacked optics
211(2)
Planar optics
213(2)
Imaging systems for optical interconnects
215(11)
Dilute arrays
215(2)
Conventional imaging
217(1)
Multichannel imaging system
218(3)
Hybrid imaging
221(1)
Integrated microoptical imaging systems
222(4)
Glossary
226(1)
List of new symbols
227(1)
Exercises
228(3)
Optoelectronic devices and smart pixel arrays
231(24)
Superlattices and multiple quantum wells
231(3)
Hetero-superlattices
232(1)
nipi-superlattices
233(1)
The SEED (self electro-optic effect device)
234(5)
Structure and fabrication
234(1)
Energy dissipation and efficiency
235(1)
All-optical modulation
236(1)
S-SEED
237(1)
Performance of S-SEEDs
237(2)
Vertical cavity surface emitting lasers
239(8)
Structure and fabrication
239(3)
Mirrors and resonator
242(2)
I-V characteristics and efficiency
244(1)
Spectral characteristics and thermal effects
245(1)
Other material combinations
246(1)
Smart pixel arrays (SPAs)
247(3)
Glossary
250(1)
List of new symbols
251(1)
Exercises
252(3)
Array illuminators
255(28)
Image plane array illumination
257(6)
Phase-contrast array illumination
258(4)
Multiple beam-splitting through aperture division
262(1)
Multiple beam-splitting through waveguide coupling
262(1)
Fresnel plane array illuminators
263(3)
Fourier plane array illuminators
266(9)
Dammann gratings
267(4)
Modifications of Dammann's design procedure
271(2)
Lenslet arrays as Fourier plane array illuminators
273(2)
Cascading of beam-splitter gratings
275(1)
Summary
275(2)
Glossary
277(1)
List of new symbols
278(1)
Exercises
279(4)
Microoptical components for beam shaping
283(30)
Beam shaping from a general perspective
285(3)
Lateral laser beam shaping
288(6)
Collimation of astigmatic beams
288(3)
Beam shaping for laser machining
291(2)
Beam shaping for LIDAR
293(1)
Axial beam shaping
294(3)
Temporal beam shaping
297(2)
Multiple aperture beam shaping
299(1)
Intra-cavity beam shaping
300(5)
Intra-cavity beam shaping of individual laser beams
300(3)
Intra-cavity beam shaping of arrays of laser beams
303(2)
Glossary
305(1)
List of new symbols
306(1)
Exercises
307(6)
Microoptics for optical information technology
313(38)
Optical information processing
313(2)
Analog information processing
313(2)
Digital optical information processing
315(1)
Optical interconnects
315(8)
Terminology
316(2)
Interconnect hierarchy
318(4)
Optical clock distribution
322(1)
Microoptics for optical data storage
323(17)
Basics of optical data storage
324(3)
Microoptics for read/write heads
327(7)
Volume optical memories
334(6)
Glossary
340(2)
List of new symbols
342(1)
Exercises
343(8)
Further application areas of microoptics
351(28)
Microlens arrays for imaging
352(3)
Beam steering with microoptical components
355(5)
Microoptical sensors
360(4)
Shack-Hartmann wavefront sensor
360(1)
Confocal sensing using microoptics
361(3)
Microoptics for optical design
364(7)
Achromatic diffractive/refractive doublets
364(2)
Multi-order lenses
366(2)
Athermalization with hybrid elements
368(3)
Glossary
371(1)
List of new symbols
372(1)
Exercises
373(6)
Conclusion 379(2)
Abbreviations 381(2)
Solutions to exercises 383

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