Microstereolithography and other Fabrication Techniques for 3D MEMS

by Varadan, Vijay K.; Jiang, Xiaoning; Varadan, V. V.

• ISBN13: 9780471521853
• ISBN10: 047152185X
• Edition: 1st
• Format: Hardcover
• Copyright: 2001-03-30
• Publisher: WILEY

Summary

This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.

Author Biography

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USA
Vijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

Table of Contents

Preface	xi
Microelectromechanical Systems	1	(50)
Introduction	1	(3)
Microfabrications for MEMS	4	(15)
Bulk Micromachining of Silicon	5	(3)
Surface Micromachining of Silicon	8	(2)
Wafer Bonding for MEMS	10	(3)
LIGA Process	13	(1)
Micromachining of Polymeric MEMS Devices	13	(4)
3D Microfabrications	17	(2)
Microsensing and Microactuation for MEMS	19	(13)
Sensing Mechanisms	19	(8)
Microactuation	27	(5)
Materials for MEMS	32	(3)
Metal and Metal Alloys for MEMS	32	(1)
Polymer for MEMS	33	(1)
Other Materials for MEMS	34	(1)
Smart Electronics and Conformal Antennas	35	(5)
Wireless Telemetry Systems	40	(3)
Scope of This Book	43	(8)
References	44	(7)
Fundamentals of Polymer Synthesis for MEMS	51	(30)
Introduction	51	(1)
Classification of Polymers	52	(9)
Linear, Branched, and Cross-Linked Polymers (Based on Structure)	52	(1)
Thermoplastic and Thermosetting Polymers (Based on Physical Properties)	53	(1)
Plastics, Elastomers, Fibers and Liquid Resins (Based on End Use)	53	(1)
Chain and Step-growth Polymerization (Based on the Method of Synthesis)	54	(7)
UV Radiation Curing	61	(7)
Relationship between Wavelength and Radiation Energy	61	(2)
Mechanisms of UV Curing	63	(2)
Basic Kinetics of Photopolymerization	65	(3)
UV Curing with Pigmentation	68	(10)
UV Light Sources	78	(3)
References	80	(1)
Stereolithography (SL)	81	(30)
Introduction	81	(7)
Stereolithography (SL)	82	(1)
Selective Laser Sintering	83	(1)
Laminated Object Manufacturing (LOM)	84	(2)
Fused Deposition Modeling (FDM)	86	(1)
Rapid Prototyping for 3D Microfabrication	87	(1)
Photopolymerization in SL	88	(9)
SL System	97	(6)
CAD Design	97	(3)
Layer Preparation	100	(1)
Imaging System	101	(2)
Microstereolithography (MSL)	103	(8)
History of MSL	103	(2)
Comparison Between MSL and SL	105	(3)
References	108	(3)
Microstereolithography Techniques I-Scanning Method	111	(18)
Classical MSL	111	(2)
IH Series Processes	113	(8)
IH Process	113	(3)
Mass-IH Process	116	(1)
Super-IH Process	117	(4)
Two Photon MSL	121	(4)
Other MSL Approaches	125	(4)
References	126	(3)
Microstereolithography Techniques II-Projection Method	129	(10)
Introduction	129	(1)
Real Mask Projection MSL	129	(3)
Dynamic Mask Projection MSL	132	(7)
References	138	(1)
Polymeric MEMS Architecture with Silicon, Metal, and Ceramics	139	(26)
Burnout and Sintering	139	(3)
Electroplating	142	(5)
Electroplating Fundamentals	142	(3)
Microelectroplating	145	(2)
Ceramic MSL	147	(4)
Metallic Microstructures	151	(10)
Spatial Forming	152	(1)
EFAB Process	153	(3)
Localized Electrochemical Deposition	156	(5)
Metal-Polymer Microstructures	161	(4)
References	162	(3)
Combined Silicon and Polymeric Structures	165	(8)
Architecture Combination by Photoforming Process	165	(3)
MSL Integrated with Thick Film Lithography	168	(2)
AMANDA Process	170	(3)
References	172	(1)
Micromolding	173	(24)
Introduction	173	(2)
Micromold Inserts	175	(4)
Polymer Micromold Inserts	175	(1)
Metal Micromold Inserts	176	(2)
Silicon Micromold Inserts	178	(1)
Micromolding Processes	179	(18)
Microinjection Molding	179	(5)
Microphotomolding	184	(1)
Microhot Embossing	184	(3)
Microtransfer Molding	187	(1)
Micromolding in Capillaries (MIMIC)	188	(7)
Jet Molding	195	(1)
References	195	(2)
Applications	197	(46)
Active MEMS Devices	197	(11)
Microvalves	197	(4)
Micropumps	201	(5)
SMA microactuator	206	(2)
Passive MEMS Devices	208	(24)
Pressure Transducer	209	(3)
Flowmeter	212	(1)
Passive Biomicrodevices	213	(19)
Implementation of 3D Microsystem	232	(11)
Passive Biochips for a Microsystem	233	(2)
Active Biochips	235	(3)
Experiments	238	(3)
References	241	(2)
Appendix 1 Some Polymers for MEMS	243	(4)
Appendix 2 An Example of CAD Model and NC Codes for Microstereolithography	247	(8)
Index	255