Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition

by Lyshevski; Sergey Edward

• ISBN13: 9780849328381
• ISBN10: 0849328381
• Edition: 2nd
• Format: Hardcover
• Copyright: 2005-01-11
• Publisher: CRC Press

Summary

Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science.Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development.Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.

Table of Contents

Nano- and Microscience, Engineering, and Technology
Introduction and Overview: From Micro- to Nanoscale and Beyond to Stringoscale	1	(3)
Introductory Definitions	4	(2)
Current Developments and the Need for Coherent Revolutionary Developments	6	(4)
Societal Challenges and Implications	10	(5)
Microsystems and Microtechnology	10	(1)
Nanosystems and Nanotechnology	10	(1)
Nanoengineering and Nanoscience	11	(4)
Conclusions	15	(4)
Homework Problems	16	(1)
References	16	(3)
Nano- and Microscale Systems, Devices, and Structures
Sizing Features: From Micro- to Nanoscale, and from Nano- to Stringoscale	19	(8)
Mendeleyev's Periodic Table of Elements and Electronic Configurations	19	(5)
Nanoengineering and Nanoscience	24	(2)
Smaller Than Nano-, Pico-, and Femtoscale---Reality or Fantasy?	26	(1)
MEMS and NEMS Definitions	27	(7)
Introduction to Taxonomy of Nano- and Microsystems Synthesis and Design	34	(13)
Introduction to Design and Optimization of Nano- and Microsystems in the Behavioral Domain	47	(6)
Homework Problems	51	(1)
References	52	(1)
Nano- and Microsystems: Classification and Consideration
Biomimetics, Biological Analogies, and Design of NEMS and MEMS	53	(10)
Biomimetics Fundamentals	53	(2)
Biomimetics for NEMS and MEMS	55	(2)
Biomimetics, Nano-ICs, and Nanocomputer Architectronics	57	(4)
Biomimetics and Nervous Systems	61	(2)
Micro- and Nanoelectromechanical Systems: Scaling Laws and Mathematical Modeling	63	(6)
Mechanical Systems	65	(1)
Fluidic Systems	65	(1)
Chemical (Biological) Systems	65	(1)
Thermal Systems	65	(1)
Electromagnetic Systems	65	(4)
MEMS Examples and MEMS Architectures	69	(17)
MEMS Examples	69	(3)
Nanostructures: Giant Magnetoresistance and Multilayered Nanostructure	72	(2)
Integration of Microactuators and ICs	74	(2)
Microelectromechanical Systems Definitions	76	(1)
MEMS and NEMS Architectures	77	(7)
Linkage Groups in Molecular Building Blocks	84	(2)
Introduction to Microfabrication and Micromachining	86	(11)
Thin-Film Deposition	89	(2)
Photolithography	91	(1)
Etching	92	(1)
ICs and Microfabrication	92	(1)
Homework Problems	93	(1)
References	94	(3)
Fundamentals of Microfabrication and MEMS Fabrication Technologies
Introduction and Description of Basic Processes in Microfabrication	97	(10)
Photolithography	99	(3)
Etching	102	(1)
Bonding	103	(1)
Introduction to MEMS Fabrication and Web Site Resources	104	(3)
Microfabrication and Micromachining of ICs, Microstructures, and Microdevices	107	(7)
Oxidation	109	(1)
Photolithography	109	(1)
Etching	110	(1)
Doping	111	(1)
Metallization	112	(1)
Deposition	113	(1)
MEMS Assembling and Packaging	113	(1)
MEMS Fabrication Technologies	114	(21)
Bulk Micromachining	115	(4)
Surface Micromachining	119	(3)
Example Process	122	(5)
High-Aspect-Ratio (Liga and Liga-Like) Technology	127	(4)
Homework Problems	131	(1)
References	132	(3)
Devising and Synthesis of NEMS and MEMS
Motion Nano- and Microdevices: Synthesis and Classification	135	(15)
Cardinality	143	(1)
Algebra of Sets	144	(2)
Sets and Lattices	146	(4)
Microaccelerometers as Microelectromechanical Microdevices	150	(6)
Optimization with Application to Synthesis and Classification Solver	156	(10)
Illustrative Examples of the Matlab Application	157	(1)
Linear Programming	158	(1)
Nonlinear Programming	159	(7)
Nanoengineering Bioinformatics and Its Application	166	(25)
Introduction and Definitions	166	(1)
Basic Bioscience Fundamentals	167	(13)
Bioinformatics and Its Applications to Escherichia coli Bacteria	180	(1)
Sequential, Fourier Transform and Autocorrelation Analysis in Genome Analysis	180	(5)
Entropy Analysis	185	(4)
References	189	(2)
Modeling of Micro- and Nanoscale Electromechanical Systems and Devices
Introduction to Modeling, Analysis, and Simulation	191	(3)
Basic Electromagnetics with Applications to MEMS and NEMS	194	(19)
Model Developments of Micro- and Nanoactuators Using Electromagnetics	213	(14)
Lumped-Parameter Mathematical Models of MEMS	217	(4)
Energy Conversion in NEMS and MEMS	221	(6)
Classical Mechanics and Its Application to MEMS	227	(34)
Newtonian Mechanics	230	(1)
Newtonian Mechanics, Energy Analysis, Generalized Coordinates, and Lagrange Equations: Translational Motion	230	(7)
Newtonian Mechanics: Rotational Motion	237	(4)
Friction Models in Microelectromechanical Systems	241	(2)
Lagrange Equations of Motion	243	(16)
Hamilton Equations of Motion	259	(2)
Direct-Current Micromachines	261	(5)
Simulation of MEMS in the Matlab Environment with Examples	266	(9)
Induction Micromachines	275	(38)
Introduction and Analogies	275	(2)
Two-Phase Induction Micromotors	277	(1)
Control of Induction Micromotors	277	(3)
Modeling of Induction Micromotors	280	(1)
Modeling of Induction Micromotors Using Kirchhoff's and Newton's Laws	281	(6)
Modeling of Induction Micromotors Using the Lagrange Equations	287	(2)
s-Domain Block Diagram of Two-Phase Induction Micromotors	289	(1)
Three-Phase Induction Micromotors	289	(1)
Dynamics of Induction Micromotors in the Machine Variables	290	(5)
Dynamics of Induction Micromotors in the Arbitrary Reference Frame	295	(11)
Simulation of Induction Micromachines in the Matlab Environment	306	(7)
Synchronous Micromachines	313	(55)
Introduction and Analogies	313	(1)
Axial Topology Permanent-Magnet Synchronous Micromachines	314	(1)
Fundamentals of Axial Topology Permanent-Magnet Synchronous Micromachines	314	(4)
Mathematical Models of Axial Topology Permanent-Magnet Synchronous Micromachines	318	(1)
Lumped-Parameter Modeling and Mathematical Model Development	319	(7)
High-Fidelity Modeling and Mathematical Model Development	326	(3)
Radial Topology Single-Phase Synchronous Reluctance Micromotors	329	(1)
Mathematical Model of Synchronous Reluctance Micromotors	329	(4)
Simulation of Reluctance Motors	333	(1)
Three-Phase Synchronous Reluctance Micromotors	334	(3)
Torque Production Analysis	337	(1)
Control of Synchronous Reluctance Micromotors	337	(1)
Lumped-Parameter Mathematical Models	338	(2)
Radial Topology Permanent-Magnet Synchronous Micromachines	340	(1)
Mathematical Model of Two-Phase Permanent-Magnet Synchronous Micromotors	340	(2)
Radial Topology Three-Phase Permanent-Magnet Synchronous Micromachines	342	(15)
Mathematical Models of Permanent-Magnet Synchronous Micromachines in the Arbitrary, Rotor, and Synchronous Reference Frames	357	(8)
Simulation and Analysis of Permanent-Magnet Synchronous Micromotors in Simulink	365	(3)
Permanent-Magnet Stepper Micromotors	368	(9)
Mathematical Model in the Machine Variables	369	(3)
Mathematical Models of Permanent-Magnet Stepper Micromotors in the Rotor and Synchronous Reference Frames	372	(5)
Piezotransducers	377	(15)
Piezoactuators: Steady-State Models and Characteristics	379	(10)
Mathematical Models of Piezoactuators: Dynamics and Nonlinear Equations of Motion	389	(3)
Modeling of Electromagnetic Radiating Energy Microdevices	392	(13)
Thermodynamics, Thermoanalysis, and Heat Equation	405	(10)
Homework Problems	407	(6)
References	413	(2)
Quantum Mechanics and Its Applications
Atomic Structures and Quantum Mechanics	415	(38)
Introduction	415	(3)
Some Basic Fundamentals	418	(4)
Quantum Theory: Basic Principles	422	(6)
Harmonic Oscillator: Newtonian Mechanics, Schrodinger Equation, and Quantum Theory	428	(17)
Schrodinger Equation for the Hydrogen Atom	445	(7)
Some Applications of the Schrodinger Equation and Quantum Mechanics	452	(1)
Mathematical Modeling of Atoms with Many Electrons	452	(1)
Empirical Constants Concept	452	(1)
Hartree-Fock Modeling Method: Self-Consistent Field Theory	452	(1)
Molecular and Nanostructure Dynamics	453	(17)
Schrodinger Equation and Wave Function Theory	454	(1)
Mathematical Models: Energy-Based Quantum and Classical Mechanics	455	(4)
Density Functional Theory	459	(3)
Nanostructures and Molecular Dynamics	462	(2)
Electromagnetic Fields and Their Quantization	464	(6)
Quantum Mechanics and Energy Bands	470	(17)
Homework Problems	483	(1)
References	484	(3)
Molecular and Carbon Nanoelectronics
Past, Current, and Future of Electronics with Prospects for 2020 and Beyond	487	(4)
Fundamentals	491	(3)
Carbon Nanotubes	494	(11)
Analysis of Carbon Nanotubes	494	(7)
Classification of Carbon Nanotubes	501	(4)
Carbon-Based Nanoelectronics and Three-Dimensional Nano-ICs	505	(34)
Fullerene-Centered Nanoelectronics	506	(3)
Heterofullerenes	509	(3)
Endohedral Fullerenes	512	(4)
Biocentered Nanoelectronics	516	(6)
Nanoelectronics and Analysis of Molecular Electronic Devices	522	(13)
Homework Problems	535	(1)
References	536	(3)
Control of MEMS and NEMS
Continuous-Time and Discrete-Time MEMS	539	(7)
Analog Control of MEMS Using Transfer Functions	546	(15)
Analog PID Controllers	546	(5)
Control of a Microsystem with Permanent-Magnet DC Micromotor Using PID Controller	551	(10)
The Hamilton-Jacobi Theory and Optimal Control of MEMS and NEMS	561	(23)
Stabilization Problem for Linear MEMS and NEMS	566	(9)
Tracking Problem for Linear MEMS and NEMS	575	(2)
Transformation Method and Tracking Control of Linear MEMS	577	(4)
Time-Optimal Control of MEMS and NEMS	581	(3)
Sliding Mode Control of MEMS and NEMS	584	(8)
Feedback Linearization and Control of Permanent-Magnet Synchronous Micromotors	589	(3)
Constrained Control of Nonlinear MEMS and NEMS	592	(3)
Optimization of Microsystems Using Nonquadratic Performance Functionals	595	(6)
Hamilton-Jacobi Theory and Quantum Mechanics	601	(2)
Lyapunov Stability Theory in Analysis and Control of MEMS and NEMS	603	(11)
Digital Control of MEMS and NEMS	614	(31)
Introduction to Digital Control and Transfer Function Concept	614	(10)
Control of Digital Microsystems with Permanent-Magnet DC Micromotors	624	(7)
Control of Linear Discrete-Time MEMS and NEMS Using the Hamilton-Jacobi Theory	631	(4)
Constrained Optimization of Discrete-Time MEMS and NEMS	635	(5)
Tracking Control of Discrete-Time Microsystems	640	(2)
Homework Problems	642	(1)
References	643	(2)
Examples in Synthesis, Analysis, Design and Fabrication of MEMS
Introduction	645	(1)
Analysis of Energy Conversion and MEMS Performance from Materials and Fabrication Viewpoints	646	(11)
Analysis of Translational Microtransducers	657	(3)
Single-Phase Reluctance Micromotors: Modeling, Analysis, and Control	660	(1)
Microfabrication Topics	661	(14)
Microcoils/Microwindings Fabrication through the Copper, Nickel, and Aluminum Electrodeposition	662	(9)
Nix% Fe100-x% Thin-Film Electrodeposition	671	(2)
NiFeMo and NiCo Thin-Film Electrodeposition	673	(1)
Micromachined Polymer Magnets	674	(1)
Planarization	675	(1)
Magnetization Dynamics of Thin Films	675	(1)
Microstructures and Microtransducers with Permanent-Magnet: Micromirror Actuators	676	(15)
Electromagnetic System Modeling in Microactuators with Permanent Magnets: High-Fidelity Modeling and Analysis	683	(1)
Electromagnetic Torques and Forces: Preliminaries	683	(1)
Coordinate Systems and Electromagnetic Fields	684	(2)
Electromagnetic Torques and Forces	686	(4)
Some Other Aspects of Microactuator Design and Optimization	690	(1)
Reluctance Electromagnetic Micromotors	691	(5)
Micromachined Polycrystalline Silicon Carbide Micromotors	696	(2)
Axial Electromagnetic Micromotors	698	(1)
Cognitive Computer-Aided Design of MEMS	699	(6)
Homework Problems	702	(1)
References	703	(2)
Index	705