Organometallic Vapor-Phase Epitaxy : Theory and Practice

by Stringfellow, Gerald B.

• ISBN13: 9780126738407
• ISBN10: 0126738408
• eBook ISBN(s): 9780126738407
• Additional ISBN(s): 9780323139175
• Format: Hardcover
• Copyright: 1989-08-01
• Publisher: Academic Pr

Summary

This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.Key Features* Updated with new emphasis on the semiconducting nitride materials???GaN and its alloys with In and Al* Emphasizes the newly understood aspects of surface processes* Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics

Table of Contents

Preface

Glossary of Acronyms Used in the Text

Notation for Organometallic Precursor Molecules

Overview of the OMVPE Process

Source Molecules. Thermodynamics. Kinetics

Hydrodynamics and Mass Transport

Design of the OMVPE Process

Specific Materials

Superlattice Structures

Devices

Each chapter includes references

Index

Table of Contents provided by Publisher. All Rights Reserved.