Physics and Technology of Submicron Structures book cover, ISBN 9783642834332

Physics and Technology of Submicron Structures

by Heinrich, Helmut; Bauer, Gunther; Kuchar, Friedemar
  • ISBN13: 9783642834332
  • ISBN10: 3642834337
  • eBook ISBN(s): 9783642834318
  • Edition: Reprint
  • Format: Paperback
  • Copyright: 2011-12-08
  • Publisher: Springer Verlag
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