Precision Manufacturing

by Dornfeld, David; Lee, Dae-eun

• ISBN13: 9780387324678
• ISBN10: 0387324674
• Format: Hardcover
• Copyright: 2007-11-30
• Publisher: Springer Verlag

Summary

Today there is a high demand for the creation of high precision products The processes used for manufacturing these products is now highly sophisticated and has spawned a specialized genre called precision engineering. Precision engineering is primarily concerned with the precision design, precision manufacturing, and metrology. The need for precision engineering and manufacturing is especially acute when producing any type of integrated circuit where the placement of millions of transistors on an IC needs to be exact. The adherence to precision manufacturing techniques during the production process prevents waste, increases interchangeability among similar parts, and allows for interchangeability among similar parts lowering the manufacturing cost and often increasing quality.

Table of Contents

Preface & Acknowledgements	p. xvii
Introduction to precision manufacturing	p. 1
Precision engineering	p. 1
Precision manufacturing	p. 2
Competitive drivers of precision manufacturing	p. 7
Historical developments in manufacturing	p. 9
Background	p. 9
Key drivers	p. 13
Historical examples	p. 16
Organization of this book	p. 33
Machine design for precision manufacturing	p. 37
Background on machine design for manufacturing	p. 37
Philosophy of precision machine design	p. 39
Sources of error - overview	p. 41
Principles of measurement	p. 49
Definition of terms - accuracy, repeatibility, and resolution	p. 49
Accuracy	p. 49
Repeatability (or precision)	p. 53
Resolution	p. 54
Probabilistic measure of accuracy	p. 55
Metrology and measurement	p. 57
Abbé's principle	p. 64
Metrology techniques	p. 67
Measurement of dimension and angle	p. 67
Measurement of form	p. 73
Straightness	p. 73
Flatness	p. 84
Roundness	p. 88
Other form errors	p. 99
Measurement of surface roughness	p. 99
Kinematic precision	p. 110
Subsurface damage	p. 112
Mechanical errors	p. 121
Introduction	p. 121
Errors due to machine elements (excluding bearings)	p. 123
Kinematic design	p. 128
Connectivity	p. 128
Kinematic elements	p. 129
Contact and complex support	p. 133
Summary of kinematic design	p. 142
Structural compliance	p. 143
Microscale compliance	p. 143
Macroscale compliance	p. 145
Bearings and spindles	p. 153
Bearings	p. 153
Aerostatic bearings and spindles	p. 163
Thermal errors	p. 167
Background on the thermal error problem	p. 167
Thermal effects in precision engineering	p. 171
Determining the effect of temperature other than 20°C	p. 180
Free and constrained bodies	p. 181
Effect of spatial temperature gradients	p. 184
Effect of temperature transients: soak-out time and sinusoidal response	p. 187
Conductive, convective, and radiative heat transfer parameters	p. 193
Specific heat sources and examples of thermal problems	p. 196
Environmental control of precision machinery	p. 202
Machine enclosures	p. 203
Factory and room enclosures	p. 204
Machine treatment without enclosures	p. 206
Thermal effects and metrology	p. 208
Observations	p. 215
Error mapping and error budgets	p. 217
Introduction	p. 217
Error mapping	p. 218
Error budget	p. 232
Definition of error budget	p. 232
Error budget flow chart	p. 233
Combinational rules for errors	p. 234
Error due to compliance and vibration	p. 239
Introduction	p. 239
Excitations in machine tools	p. 243
Weight deformation	p. 246
Cutting force deformation	p. 249
Type A deformation: Deformation due to the variation of the cutting force	p. 250
Introduction and background	p. 250
Examples for single edge cutting	p. 254
Machine stiffness and directional orientation	p. 256
Type B deformation: Deformation due to the variation of the stiffness along the tool path	p. 263
Comparison of the errors from deformation types A and B	p. 267
Forced vibrations	p. 272
Self-excited vibrations (chatter)	p. 273
Introduction	p. 273
Basic stability; effect of structural dynamics	p. 278
Variation of spindle speed and stability lobes	p. 288
Advanced analysis	p. 292
Sensors for precision manufacturing	p. 295
Introduction	p. 295
The relevance of precision manufacturing and the need for in-process monitoring and control	p. 295
Requirements for sensor technology for precision manufacturing	p. 297
Overview of sensors in manufacturing	p. 300
Introduction	p. 300
Sensor systems for process monitoring	p. 303
New developments in signal and information processing for tool condition monitoring	p. 308
Introduction	p. 308
Intelligent sensors	p. 311
Implementation strategies	p. 314
Multisensor approaches	p. 316
Sensors for high speed machining	p. 317
Acoustic emission in manufacturing	p. 320
Background	p. 320
Acoustic emission sources-diagnostics	p. 322
Acoustic emission sources-process monitoring	p. 323
Acoustic emission in machining	p. 325
Signal processing, feature extraction and sensor fusion	p. 334
Introduction	p. 334
Intelligent sensor defined	p. 337
Sensor fusion defined	p. 338
Fusion methodologies	p. 339
Neural networks	p. 341
Applications of signal processing and sensor fusion	p. 349
Introduction	p. 349
Tool wear detection using time series analysis of acoustic emission	p. 350
Time series analysis	p. 351
Experimental evaluation	p. 355
Sensor integration using neural networks for intelligent tool condition monitoring	p. 358
Use of multiple sensors	p. 360
Experimental evaluation	p. 363
The need for engineering models to design and predict the performance of in-process sensors	p. 369
Basic sensor classification and new sensing technologies	p. 372
Introduction	p. 372
Basic sensor types	p. 377
Mechanical sensors	p. 377
Thermal sensors	p. 380
Electrical sensors	p. 382
Magnetic sensors	p. 382
Radiant sensors	p. 383
Chemical sensors	p. 383
Applications of sensors in precision manufacturing	p. 384
AE-based monitoring of grinding wheel dressing	p. 384
Fast AE RMS analysis for wheel condition monitoring	p. 385
Grinding wheel topographical mapping	p. 387
Wheel wear mechanism	p. 389
AE-based monitoring of face milling	p. 390
AE-based monitoring of chemical mechanical planarization	p. 393
Monitoring of abrasive process parameters	p. 395
Precision scribing of CMP-treated wafers	p. 398
AE-based endpoint detection for CMP	p. 401
AE monitoring of surface chemical reactions for copper CMP	p. 403
AE characteristics of oxidation and dissolution in copper CMP	p. 411
Monitoring of precision scribing	p. 416
Monitoring of ultraprecision Turning of Single crystal copper	p. 418
Monitoring of ultraprecision turning of polycrystalline copper	p. 421
Summary	p. 422
Process planning for precision manufacturing	p. 425
Manufacturing system characteristics	p. 425
Process planning basics	p. 435
Process capability	p. 438
Background	p. 438
Process capability defined	p. 440
Cp as a planning metric	p. 444
Legacy-system integration for precision manufacturing	p. 451
Future integration for precision manufacturing process planning	p. 452
Precision machining processes	p. 455
Introduction	p. 455
Influence of machining parameters, work material, and tool geometry	p. 462
Influence of uncut chip thickness	p. 462
Machining brittle materials	p. 465
Effects of work material crystallography/directionality	p. 472
Process operating conditions	p. 478
Precision mfg. processes-diamond turning/milling	p. 482
Introduction	p. 482
Machine tool design	p. 484
Tool design and alignment	p. 491
Chip formation and process mechanics	p. 496
Abrasive processes - fixed and loose	p. 505
Fixed abrasive processes	p. 505
Material removal mechanisms	p. 505
Grinding forces, power and specific energy	p. 512
Grinding stiffness, contact stiffness and process time constant	p. 517
Nanogrinding	p. 520
Loose abrasive processes	p. 521
Polishing and lapping	p. 522
Chemical mechanical planarization (CMP)	p. 532
Process modeling in CMP	p. 540
Non-traditional processes	p. 551
Precision manufacturing applications and challenges	p. 555
Introduction	p. 555
Basic semiconductor device manufacturing	p. 559
Introduction	p. 559
So, what are they anyway and how are they made?	p. 561
Microfabrication: background and overview	p. 561
Lithography	p. 564
Applications of semiconductor manufacturing - MEMS	p. 570
Nanotechnology	p. 572
Background and definitions	p. 572
Nanostructured materials	p. 576
Nanofabrication techniques	p. 578
E-beam and nano-imprint Fabrication	p. 582
Epitaxy and strain engineering	p. 585
Quantum structure nanofabrication using epitaxy on patterned substrates	p. 585
Quantum structure nanofabrication using strain-induced self-assembly	p. 587
Scanned probe techniques	p. 589
Self-assembly	p. 595
MEMS and nanotechnology applications	p. 600
Nanotechnology applications	p. 601
Micro-machining and small scale defects	p. 604
Introduction	p. 604
Surface and edge finish	p. 607
Modeling	p. 611
Finite element modeling	p. 613
Molecular dynamics	p. 615
Multiscale modeling	p. 619
Mechanistic modeling	p. 620
Workpiece and design issues	p. 622
Micromolding	p. 622
Creation of micropattern and microstructure	p. 625
Creation of 3-dimensional shapes	p. 630
Ultrasonic vibration assisted micromachining	p. 631
Micro-tools	p. 633
Cutting fluid	p. 638
Metrology in micromachining	p. 640
Conclusion and outlook	p. 644
Burrs - preventing and minimizing burr formation in precision components	p. 646
Introduction and background	p. 647
Process-based solutions	p. 651
Milling	p. 652
Drilling	p. 654
Examples of application of burr minimization strategies	p. 657
Tool path planning in milling	p. 657
Burr control chart	p. 660
Integrated process planning and burr minimization	p. 661
Summary and conclusions	p. 662
Future of precision manufacturing	p. 665
Introduction	p. 665
The manufacturing pipeline	p. 666
Sustainable design/environmentally conscious design and manufacturing	p. 669
Technologies for sustainable manufacturing	p. 670
Green manufacturing pipeline	p. 671
Sustainable manufacturing or ""does green = sustainable?""	p. 676
Manufacturing technology wedges	p. 678
Examples of wedge technology application areas for manufacturing	p. 680
Consumable use in machining	p. 681
Energy use in nanoscale manufacturing	p. 685
Environmentally conscious design of precision machines	p. 693
Sustainability budgets	p. 694
Constructing the sustainability budget	p. 696
Summary comments/conclusion	p. 701
References	p. 705
Index	p. 765
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