Predictive Simulation of Semiconductor Processing

by Dabrowski, Jarek; Weber, Eicke R.

• ISBN13: 9783642058042
• ISBN10: 3642058043
• Format: Paperback
• Copyright: 2010-12-03
• Publisher: Springer Nature

Summary

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.