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Preface V
Foreword VII
List of Contributors XI
Overview XIII
1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization 1
Toshiyuki Tsuchiya
2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating–Substrate Systems 27
Mototsugu Sakai
3 Thin-film Characterization Using the Bulge Test 67
Oliver Paul, Joao Gaspar
4 Uniaxial Tensile Test for MEMS Materials 123
Takahiro Namazu
5 On-chip Testing of MEMS 163
Harold Kahn
6 Reliability of a Capacitive Pressure Sensor 185
Fumihiko Sato, Hideaki Watanabe, Sho Sasaki
7 Inertial Sensors 205
Osamu Torayashiki, Kenji Komaki
8 Inertial Sensors 225
Noriyuki Yasuike
9 Reliability of MEMS Variable Optical Attenuator 239
Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong
10 Eco Scan MEMS Resonant Mirror 267
Yuzuru Ueda, Akira Yamazaki
Index 291
The New copy of this book will include any supplemental materials advertised. Please check the title of the book to determine if it should include any access cards, study guides, lab manuals, CDs, etc.
The Used, Rental and eBook copies of this book are not guaranteed to include any supplemental materials. Typically, only the book itself is included. This is true even if the title states it includes any access cards, study guides, lab manuals, CDs, etc.