Scanning Microscopy for Nanotechnology

by Zhou, Weilie; Wang, Zhong Lin

• ISBN13: 9780387333250
• ISBN10: 0387333258
• Format: Hardcover
• Copyright: 2006-11-15
• Publisher: Springer Verlag

Summary

With the rapid development of nanotechnology, scanning electron microscopy (SEM) can be exploited not only for nanomaterials characterization, but also integrated with new technology for in-situ nanomaterials engineering and manipulation. Scanning Microscopy for Nanotechnology is comprised of both techniques and application chapters, and covers topics including nanomaterials imaging, X-ray microanalysis, high resolution SEM, low kV SEM, cryo-SEM, as well as new techniques including electron back scatter diffracation (EBSD) and scanning transmission electron microscopy (STEM). The fabrication techniques integrated with SEM, such as e-beam nanolithography, nanomanipulation, and focused ion beam nanofabrication, are major new dimensions for SEM application. Applications include the study of nanoparticles, nanowires and nanotubes, three dimensional nanostructures, quantum dots, magnetic nanomaterials, photonic structures, and bio-inspired nanomaterials. The book will appeal not only to a broad range of nanomaterials researchers, but to SEM development specialists as well.

Table of Contents

1. Fundamentals of Scanning Electron Microscopy (SEM)	1
Weilie Zhou, Robert Apkarian, Zhong Lin Wang, and David Joy
1. Introduction	1
2. Configuration of Scanning Electron Microscopes	9
3. Sample Preparation	32
4. Summary	39
2. Backscattering Detector and EBSD in Nanomaterials Characterization	41
Tim Maitland and Scott Sitzman
1. Introduction	41
2. Data Measurement	51
3. Data Analysis	54
4. Applications	61
5. Current Limitations and Future	74
6. Conclusion	75
3. X-ray Microanalysis in Nanomaterials	76
Robert Anderhalt
1. Introduction	76
2. Monte Carlo Modeling of Nanomaterials	87
3. Case Studies	91
4. Summary	100
4. Low kV Scanning Electron Microscopy	101
M. David Frey
1. Introduction	101
2. Electron Generation and Accelerating Voltage	103
3. "Why Use Low kV?"	105
4. Using Low kV	112
5. Conclusion	119
5. E-beam Nanolithography Integrated with Scanning Electron Microscope	120
Joe Nabity, Lesely Anglin Compbell, Mo Zhu, and Weilie Zhou
1. Introduction	120
2. Materials and Processing Preparation	127
3. Pattern Generation	132
4. Pattern Processing	137
5. Applications	143
6. Summary	148
6. Scanning Transmission Electron Microscopy for Nanostructure Characterization	152
S.J. Pennycook, A.R. Lupini, M. Varela, A. Borisevich, Y. Peng, M.P. Oxley, K. Van Benthem, M.F. Chisholm
1. Introduction	152
2. Imaging in the STEM	155
3. Spectroscopic Imaging	173
4. Three-Dimensional Imaging	176
5. Recent Applications to Nanostructure Characterization	177
6. Future Directions	188
7. Introduction to In-Situ Nanomanipulation for Nanomaterials Engineering	192
Rishi Gupta and Richard E. Stallcup, II
1. Introduction	192
2. SEM Contamination	193
3. Types of Nanomanipulators	197
4. End Effectors	200
5. Applications of Nanomanipulators	205
6. Summary	223
8. Applications of FIB and DualBeam for Nanofabrication	225
Brandon Van Leer, Lucille A. Giannuzzi, and Paul Anzalone
1. Introduction	225
2. Onboard Digital Patterning with the Ion Beam	226
3. FIB Milling or CVD Deposition with Bitmap Files	230
4. Onboard Digital Patterning with the Electron Beam	231
5. Automation for Nanometer Control	233
6. Direct Fabrication of Nanoscale Structures	234
7. Summary	234
9. Nanowires and Carbon Nanotubes	237
Jianye Li and Jie Liu
1. Introduction	237
2. III-V Compound Semiconductors Nanowires	237
3. II-VI Compound Semiconductors Nanowires	250
4. Elemental Nanowires	260
5. Carbon Nanotubes	267
6. Conclusions	278
10. Photonic Crystals and Devices	281
Xudong Wang and Zhong Lin Wang
1. Introduction	281
2. SEM Imaging of Photonic Crystals	289
3. Fabrication of Photonic Crystals in SEM	298
4. Summary	302
11. Nanoparticles and Colloidal Self-assembly	306
Gabriel Caruntu, Daniela Caruntu, and Charles J. O'Connor
1. Introduction	306
2. Metal Nanoparticles	307
3. Mesoporous and Nanoporous Metal Nanostructures	322
4. Nanocrystalline Oxide	329
5. Nanostructured Semiconductor and Thermoelectric Materials	347
6. Conclusions	353
12. Nano-building Blocks Fabricated through Templates	357
Feng Li and John B. Wiley
1. Introduction	357
2. Materials and Methods	358
3. Nano-Building Blocks	361
4. Conclusions	380
13. One-dimensional Wurtzite Semiconducting Nanostructures	384
Pu Xian Gao and Zhong Lin Wang
1. Introduction	384
2. Synthesis and Fabrication of 1D Nanostructures	384
3. One-Dimensional Metal Oxide Nanostructures	389
4. Growth Mechanisms	414
5. Summary	423
14. Bio-inspired Nanomaterials	427
Peng Wang, Guobao Wet Xiaohua Liu, and Peter X. Ma
1. Introduction	427
2. Nanofibers	429
3. Nanoparticles	444
4. Surface Modification	455
5. Summary	462
15. Cryo-Temperature Stages in Nanostructural Research	467
Robert P. Apkarian
1. Introduction	467
2. Terminology Used in Cryo-HRSEM of Aqueous Systems	468
3. Liquid Water, Ice, and Vitrified Water	469
4. History of Low Temperature SEM	472
5. Instrumentation and Methods	473
Author Index	491
Subject Index	513