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9780444818898

Control of Semiconductor Interfaces: Proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12

by ; ;
  • ISBN13:

    9780444818898

  • ISBN10:

    0444818898

  • Format: Hardcover
  • Copyright: 1994-05-01
  • Publisher: Elsevier Science Ltd

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Table of Contents

Preface
Committees
Understanding semiconductor interfacesp. 1
Semiconductor interfaces and their implications to VLSI device reliabilityp. 9
The role of hydrogen in metal/Si interface formationp. 13
Correlation between barrier height and interface structure of Ag/Si(111) Schottky diodesp. 21
Differences in Fermi-level pinning position and thermal stability between epitaxial and non-epitaxial Al/Si interfacesp. 27
Hydrogen-mediated epitaxial clustering of Si(111) [actual symbol not reproducible] surface studied by TOF-ICISSp. 33
Schottky limit on ideally H-terminated unpinned silicon(111) surfacesp. 39
Heavy-ion RBS/ERDA studies on the growth of silver on hydrogen-terminated Si(111) surfacesp. 45
Transition metal/silicon interfaces: interfacial reaction and electrical propertiesp. 51
Contact resistivity and interfacial reaction of V/(001)Si systemsp. 57
Initial stage of InAs MBE growth on GaAs substratep. 63
Strain-compensations for interfacial strain and average strain in InGaAs/InAlP highly compressive-strained multiple quantum well structures on InP grown by gas source molecular beam epitaxyp. 69
Origin of tilt in highly mismatched [actual symbol not reproducible] structures grown by MOVPEp. 75
Defects formed at the InGaAs/GaAS interfacep. 81
Towards high quality heteroepitaxy on mismatched substratep. 87
Oxygen incorporation in GaAs/AlGaAs interfaces grown by molecular beam epitaxyp. 93
Influence of thin Ge interlayer on anti-phase domain formation in GaAs growthp. 97
Recent applications of X-ray topography to the study of III-V semiconductorsp. 103
In-situ characterization of AlGaAs/GaAs quantum well interfaces by photoluminescence surface state spectroscopyp. 109
A new Raman system for in-situ observation of semiconductor crystal growing in flowing gasp. 115
OMVPE growth: an in situ X-ray analysisp. 121
Control of surface bonding by realtime monitoring using synchrotron radiation photoelectron spectroscopyp. 127
Metallic-semiconducting phase transition as observed in ultra thin FeSi[subscript 2]-Si heterostructuresp. 133
Initial features of diamond growth on siliconp. 143
The electron affinity of CVD diamond with surface modificationsp. 149
Electrical properties of polycrystalline diamond/hydrogenated amorphous silicon interfacesp. 155
Hydrogen-terminated surfaces of homoepitaxial diamonds and their metal contact propertiesp. 161
Nanocrystal growth of InSb on Se-passivated GaAsp. 167
Barrier heights of 3C- and 6H-SiC Schottky contacts: explanation by the MIGS-and-electronegativity modelp. 169
Development of thermally stable NiGe-based ohmic contacts to n-type GaAsp. 175
Electrical abruptness of Ni/GaAs interfaces fabricated by in situ photoelectrochemical processp. 181
Barrier height control and current transport in GaAs and InP Schottky diodes having an ultrathin silicon interface control layerp. 187
Control of Schottky barrier height of InP by phosphine plasma treatmentp. 193
Novel interlayer as an interfacial reaction suppressor in high GaAs Schottky barrierp. 199
Interfacial reaction between metal and [actual symbol not reproducible] layer compoundp. 205
Effect of deuterium anneal on SiO[subscript 2]/Si(100) interface traps and MOS tunneling current of ultrathin SiO[subscript 2] filmsp. 211
Room temperature oxidation of silicon in the Cu[subscript 3]Si/Si structurep. 217
Oxidation mechanism of dimers on Si(001) surfacesp. 221
First-principle calculation of core level energy shifts on the initial oxidation stage of Si(111) surfacep. 227
Doping by single ion implantationp. 233
Radiation effects induced by high energy He single ions at Si/SiO[subscript 2] interfacesp. 241
Reactions at semiconductor metal interfacesp. 247
Microscopic understanding of Schottky barrier height at epitaxial-Al/(111)Si interfacep. 255
Comparison of the spatial variation in the barrier height of Si and GaAs Schottky diodes as measured by ballistic electron emission microscopyp. 261
Scanning tunneling microscopy of GaAs initial growth on InAs(001) vicinal surfacesp. 267
Application of silicon interface control layer technique to fabrication of InGaAs metal-insulator-semiconductor FETsp. 271
Control of silicon nitride-In[subscript 0.53]Ga[subscript 0.47]As interface by ultrathin silicon interface control layerp. 277
Crystal orientation of orthorhombic BaMgF[subscript 4] films formed on Si substratesp. 283
Heteroepitaxial growth of Al[subscript 2]O[subscript 3] film on Si by remote rf plasma-excited metalorganic molecular beam epitaxyp. 289
Performance of plasma deposited tungsten and tungsten nitride as thermally stable Schottky contact to GaAsp. 295
A new type of atomic ordering in Al[subscript 0.48]In[subscript 0.52]As and relationship between ordering structure and surface reconstruction during gas source MBE growthp. 301
Dimer model for comprehensive interpretation of selenium-passivated GaAs(001) surface structuresp. 303
Unpinning of GaAs surface Fermi level by atomic layer passivationp. 305
Contactless electromodulation for the characterization of semiconductor surfaces/interfacesp. 307
High-spatial resolution analysis of interfaces of semiconductor superlattices by using nm-sized electron probep. 315
Three-dimensional structures of sulfur-passivated GaAs(111) and (100) surfaces analyzed by using soft X-ray standing wavesp. 321
Growth mode of Ti-thin films on Si(111) and double heteroepitaxial growth of epi-Si/epi-TiSi[subscript 2]/Si(111)p. 327
Nondestructive characterization of interfacial microstructures in multilayer semiconductors using synchrotron radiation techniquesp. 333
Surface chemical investigation and topography study of hydrogen baked Si surfaces by infrared spectroscopy and atomic force microscopyp. 339
Experimental evidence for hole-generated 1/f noise traps in MOS transistorsp. 347
Characteristics of an optoelectronic analogue memory in a GaAs metal-semiconductor-metal photodetectorp. 351
The interface reactions of Cu and Ni with Pb/Sn solderp. 357
Dopant control and diffusion at the Si/Si[subscript 1-x]Ge[subscript x] interface for high speed heterojunction bipolar transistorsp. 359
Planar to columnar structure transition of MBE grown Si/PtSi/Si(111) double heterostructurep. 365
Interfaces and interface properties of the Au/Si(111) systemp. 371
Preparation and electronic properties of epitaxial [beta]-FeSi[subscript 2] on Si(111) substratep. 377
Native oxide characterization on silicon surfacesp. 383
Effect of N[superscript +]-polysilicon/SiO[subscript 2] interface on the electrical characteristics of MOS capacitorsp. 389
Nanometer scale plasma polymerized thin film formation and patterningp. 393
The change of atomic structures and compositional ratios by thermal annealing of 2D Ag-Cu binary adsorbates on the Si(111) surfacep. 399
Roughness control and electrical properties of SiO[subscript 2]/Si(001) interfacesp. 405
Structural and electrical properties of [superscript 28]Si[superscript +] and [superscript 40]Ar[superscript +] ion implanted epitaxial ReSi[subscript 2] films grown on n-Si(100) substratep. 411
Effect of surface termination of Si-cluster on the visible luminescence of porous-Si: a correlation with hydrogen, fluorine and oxygen atomsp. 417
Metastable phase formation in Al alloy/TiN/Ti/Si systemsp. 423
A study on the interface of LPCVD-W and SiO[subscript 2]p. 429
Influence of surface charges on four-point-probe resistivity measurement for N-type silicon epitaxial wafersp. 435
Effect of crystalline orientation on native oxide thickness measured by XPSp. 441
FT-IR-RAS analysis of the structure of the SiO[subscript 2]/Si interfacep. 447
Study on lattice strain distribution in SiGe/Si systemp. 453
A trial to detect isolated defects in Si induced by single ion implantationp. 459
Two-dimensional MBE growth characteristics of InGaAs studied by scanning tunneling microscopyp. 461
Characterization of the interface between Ga[subscript 2]Se[subscript 3] epitaxial layer and (100)GaP substrate by transmission electron microscopyp. 467
Interface formation between layered semiconductor GaSe and GaAs(001) surfacep. 471
MOCVD growth of GaN on III-V, Si and GaAs-coated Si substratesp. 477
Atomic incorporation difference between arsenic into GaSb and antimony into GaAsp. 483
The C-V profile of heavily silicon [delta]-doped GaAs grown by MBEp. 489
Interdiffusion effect on the band structure of GaAs/Ge superlatticep. 495
Influence of the cap layer thickness on the interface quality in In[subscript 0.2]Ga[subscript 0.8]As/GaAs single quantum wellsp. 501
InP MIS diode improved by UV and plasma oxidationp. 507
Observation of InP and GaInAs surfaces after [actual symbol not reproducible] treatment by a scanning tunneling microscopep. 513
Zinc diffusion into InGaAsP materials using dimethylzinc by open tube techniquep. 519
Open-tube diffusion in GaAs using zinc- and tin-doped spin-on silica filmsp. 525
High-resolution TEM evaluation of InAs/InP strained layer superlattices grown on (001)InAs substrates by atomic layer epitaxyp. 531
Incorporation process of the As atoms on InP(001) surface studied by EXAFSp. 537
EXAFS study for the 1ML InP[subscript 1-x] As[subscript x] layers on InP(001)p. 543
Raman scattering of ultrathin InAs layers inserted in GaAsp. 549
Determination of strain distribution at the GaAsP/GaAs interface by thickness fringe analysisp. 555
Evaluation of pn junction interfaces in InGaAsP/InGaAsP MQW LD by the C-V methodp. 561
Effects of interface states on C-V profile characterization of semiconductor-semiconductor interfaces of GaAs and related alloysp. 567
Surface structures of GaAs(001) with selenium adsorbate studied by scanning tunneling microscopyp. 573
Author indexp. 575
Subject indexp. 579
Table of Contents provided by Blackwell. All Rights Reserved.

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