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9780444899057

Sige Based Technologies: Proceedings of Symposium a on Sige Based Technologies of the 1992 E-Mrs Spring Conference : Strasbourg, France, June 2-4, 1

by ; ;
  • ISBN13:

    9780444899057

  • ISBN10:

    0444899057

  • Format: Hardcover
  • Copyright: 1992-12-01
  • Publisher: Elsevier Science Ltd

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Table of Contents

Quantum Wells
Systematic blue shift of exciton luminescence in strained Si[subscript 1-x]Ge[subscript x]/Si quantum well structures grown by gas source silicon molecular beam epitaxyp. 1
Photoluminescence of SiGe/Si quantum wells prepared by LPCVDp. 5
Photoluminescence of confined excitations in MBE-grown Si[subscript 1-x]Ge[subscript x]/Si(100) single quantum wellsp. 10
Magnetotransport studies of remote doped Si/Si[subscript 1-x]Ge[subscript x] heterostructures grown on relaxed SiGe buffer layersp. 15
Electron intersubband absorption in modulation and well-doped Si/Si[subscript 1-x]Ge[subscript x] multiple quantum wellsp. 20
Hole transport in Si[subscript 0.8]Ge[subscript 0.2] quantum wells at low temperaturesp. 24
Band gap luminescence in pseudomorphic Si[subscript 1-x]Ge[subscript x] quantum wells grown by molecular beam epitaxyp. 27
Growth Methods
The deposition of Si-Ge strained layers from GeH[subscript 4], SiH[subscript 2]Cl[subscript 2], SiH[subscript 4] and Si[subscript 2]H[subscript 6]p. 30
Chemical vapour deposition of epitaxial SiGe thin films from SiH[subscript 4]-GeH[subscript 4]-HCl-H[subscript 2] gas mixtures in an atmospheric pressure processp. 34
Si/SiGe/Si heterostructure growth without interface roughness at high germanium mole fractions by low temperature low pressure chemical vapour depositionp. 38
A comparative study of heavy boron doping in silicon and Si[subscript 1-x]Ge[subscript x] layers grown by molecular beam epitaxyp. 42
Photoluminescence and X-ray diffraction study of highly uniform silicon and Ge[subscript x]Si[subscript 1-x] epitaxial layersp. 46
Low temperature silicon and Si[subscript 1-x]Ge[subscript x] epitaxy by rapid thermal chemical vapour deposition using hydridesp. 52
Crystallization of amorphous Ge[subscript x]/Si[subscript 1-x] films on SiO[subscript 2]p. 57
Growth and Characterization
Photoluminescence and electrical characterization of SiGe/Si heterostructures grown by rapid thermal chemical vapour depositionp. 60
Characterization of SiGe multiple quantum wells by spectroscopic ellipsometry and photoluminescencep. 69
SiGe materials characterized by high resolution Raman spectroscopy and spectroscopic ellipsometryp. 73
Evolution of surface morphology and strain during SiGe epitaxyp. 78
Photoreflectance study of strained (001) Si[subscript 1-x]Ge[subscript x]/Si layersp. 85
Band edge and deep level photoluminescence of fully strained Si[subscript 1-x]Ge[subscript x]/Si alloysp. 89
Observation of electroluminescence from pseudomorphic Si[subscript 1-x]Ge[subscript x] alloy layersp. 94
Surfaces and Interfaces
Atomistic processes of surface segregation during Si-Ge MBE growthp. 98
Germanium segregation induced reconstruction of SiGe layers deposited on Si(100)p. 104
Temperature-dependent growth anisotropy observed on Si(001) surfaces during silicon gas source molecular beam epitaxy using disilanep. 108
Effect of a surfactant on the growth of Si/Ge heterostructuresp. 112
The electrical assessment of p-isotype Si/SiGe/Si heterostructures grown by MBEp. 116
Processing/Devices
Normal incidence hole intersubband quantum well infrared photodetectors in pseudomorphic Ge[subscript x]Si[subscript 1-x]/Sip. 120
Low-temperature in situ cleaning of silicon wafers with an ultra high vacuum compatible plasma sourcep. 126
Molecular beam epitaxy grown Si/Si[subscript 0.87]Ge[subscript 0.13] heterojunction bipolar transistors with ideal I-V characteristicsp. 132
50 GHz Si[subscript 1-x]Ge[subscript x] heterobipolar transistor: growth of the complete layer sequence by molecular beam epitaxyp. 137
A comparison of the behaviour of Si[subscript 0.5]Ge[subscript 0.5] alloy during dry and wet oxidationp. 141
UV-assisted oxidation of SiGe strained layersp. 145
Boron-doped Si/Ge superlattices and heterostructuresp. 150
Electrical characterization of Si-Ge heterostructure bipolar transistorsp. 154
Strain relaxation in epitaxial Si[subscript 1-x]Ge[subscript x]/Si(100) layers induced by reaction with palladiump. 157
Strain/Defects
The energy of systems of misfit dislocations in epitaxial strained layersp. 161
1 MeV electron irratiation induced degradation of boron-doped strained Si[subscript 1-x]Ge[subscript x] layersp. 166
Deep level transient spectroscopy study of defects in megaelectronvolt germanium ion implanted siliconp. 173
Crystallization kinetics of boron- and germanium-implanted [100] Si: a balance between doping and strain effectsp. 176
Stress in Si[subscript 1-x]Ge[subscript x] films prepared by ion beam sputtering: origin and relaxationp. 180
Elastic strain energy of graded Si[subscript 1-x]Ge[subscript x] buffer layersp. 184
Experimental study of Si-Ge tetrahedral solid solution in Ni-Co-Mg talcsp. 189
Porous Silicon
Electroluminescent performance of porous siliconp. 196
Bright visible photoluminescence in thin silicon filmsp. 200
Ultrathin Si/Ge Superlattices (Workshop)
Quantitative theory of optical properties of Si-Ge heterostructuresp. 205
Electronic properties of strained Si/Ge superlattices: tight binding approachp. 209
Si/Ge superlattice embedded in silicon and germanium: electronic structure and transition probabilitiesp. 212
Buffer concepts of ultrathin Si[subscript m]Ge[subscript n] superlatticesp. 215
Characterization of short-period Si[subscript m]Ge[subscript n] superlattices by high-resolution transmission electron microscopy and X-ray diffractionp. 221
Photoluminescence studies of Si/Si[subscript 1-x]Ge[subscript x] quantum wells and Si[subscript m]Ge[subscript n] superlatticesp. 227
Photoluminescence from short-period strained-layer superlattices of (Si[subscript 6]Ge[subscript 4])[subscript p] after hydrogen passivationp. 234
Optical and electrical characterization of Si/Ge superlatticesp. 237
Band-to-band transitions in strain-symmetrized, short-period Si/Ge superlatticesp. 243
Optical transitions in strained Ge/Si superlatticesp. 246
In-plane and vertical high-frequency conductivity in Si/Ge short-period superlatticesp. 251
Differential optical absorption spectroscopy and X-ray characterization of symmetrically strained Ge-Si superlatticesp. 254
Ambient pressure scanning tunneling microscope imaging of hydrogen-passivated Si/Ge multilayersp. 259
Photocapacitance studies of short-period Si/Ge superlatticesp. 265
In-plane Raman scattering of [001]-grown Si/Ge superlatticesp. 269
Author Indexp. 274
Subject Indexp. 276
Table of Contents provided by Blackwell. All Rights Reserved.

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