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Preface | p. ix |
Conference Photograph | p. xi |
Copper Interconnects: Microstructure and Interfaces | |
Grain Size and Cap Layer Effects on Electromigration Reliability of Cu Interconnects: Experiments and Simulation | p. 3 |
Impact of Surface and Grain Boundary Scattering on the Resistivity of Nanometric Cu Interconnects | p. 12 |
Improved Interconnect Properties for Nano-Twinned Copper: Microstructure and Stability | p. 23 |
Micro-Scale Evaluation of Interface Strength on the Patterned Structures in LSI Interconnects | p. 33 |
Conical Dark-Field Analysis for Small Grain Characterization in Narrow Cu Interconnect Structures: Potential and Challenges | p. 39 |
Electron Backscattered Diffraction Analysis of Narrow Copper Interconnects in Cross-View to Investigate Scale Effect on Microstructure | p. 47 |
Sub-100NM Metal Interconnects | |
Effect of Impurity on Cu Electromigration | p. 57 |
Stress Phenomena in Times of Porous Low-K Dielectrics | p. 68 |
Investigation of Stress-Induced Voiding of Double Cross-Shaped Single via Test Structure and Derivatives for Deep-Sub Micron Technology Nodes | p. 78 |
Influence of the Activation Energy of the Different Migration Effects on Failure Locations in Metallization | p. 85 |
Application of Ti-Based Self-Formation Barrier Layers to Cu Dual-Damascene Interconnects | p. 91 |
Growth of Single Crystalline Copper Nanowhiskers | p. 98 |
Advanced Stress Characterization Techniques | |
Quality Control on Strained Semiconductor Devices | p. 109 |
Advanced Stress, Strain and Geometrical Analysis in Semiconductor Devices | p. 114 |
A New Methodology for In-Situ Residual Stress Measurement in MEMS Structures | p. 120 |
fibDAC Stress Relief-A Novel Stress Measurement Approach for BEoL Structures | p. 127 |
Design and Application of a Sensor to Monitor Stress in Deep Submicron Copper Interconnects | p. 133 |
Strain Determination Using Electron Backscatter Diffraction | p. 139 |
Mechanical Properties of Materials | |
Assessment of Mechanical Properties of Nanoscale Structures for Microprocessor Manufacturing | p. 147 |
Optimization of Dielectric and Elastic Properties of Nanoporous Ultralow-K Dielectric Materials | p. 153 |
Cohesive Toughness of Low-k Film with Periodically Changing Elastic Modulus: Cube-Corner Indentation | p. 159 |
Mechanical Solder Characterisation under High Strain Rate Conditions | p. 166 |
Time and Temperature Dependent Micromechanical Properties of Solder Joints for 3D-Package Integration | p. 176 |
3D Integration and Packaging: Materials and Reliability | |
Thermomechanical Reliability Challenges for 3D Interconnects with Through-Silicon Vias | p. 189 |
3D IC TSV-Based Technology: Stress Assessment for Chip Performance | p. 202 |
Elimination of the Axial Deformation Problem of Cu-TSV in 3D Integration | p. 214 |
Sub-Imaging Techniques for 3D-Interconnecte on Bonded Wafer Pairs | p. 221 |
Effect of Microstructure on Electromigration in Pb-Free Solder Interconnect | p. 229 |
Damage Induced in Interconnect Structures Mimicking Stresses during Flip Chip Packaging | p. 238 |
Microstructure Characterization of Lead-Free Solders Depending on Alloy Composition | p. 245 |
Author Index | p. 255 |
Table of Contents provided by Ingram. All Rights Reserved. |
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